JPS60166185A - レ−ザ焦点合わせ装置 - Google Patents

レ−ザ焦点合わせ装置

Info

Publication number
JPS60166185A
JPS60166185A JP59021817A JP2181784A JPS60166185A JP S60166185 A JPS60166185 A JP S60166185A JP 59021817 A JP59021817 A JP 59021817A JP 2181784 A JP2181784 A JP 2181784A JP S60166185 A JPS60166185 A JP S60166185A
Authority
JP
Japan
Prior art keywords
laser
light
output
laser light
irradiated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59021817A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0231635B2 (https=
Inventor
Yoshihide Kanehara
好秀 金原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59021817A priority Critical patent/JPS60166185A/ja
Publication of JPS60166185A publication Critical patent/JPS60166185A/ja
Publication of JPH0231635B2 publication Critical patent/JPH0231635B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Lasers (AREA)
  • Laser Beam Processing (AREA)
JP59021817A 1984-02-10 1984-02-10 レ−ザ焦点合わせ装置 Granted JPS60166185A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59021817A JPS60166185A (ja) 1984-02-10 1984-02-10 レ−ザ焦点合わせ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59021817A JPS60166185A (ja) 1984-02-10 1984-02-10 レ−ザ焦点合わせ装置

Publications (2)

Publication Number Publication Date
JPS60166185A true JPS60166185A (ja) 1985-08-29
JPH0231635B2 JPH0231635B2 (https=) 1990-07-16

Family

ID=12065608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59021817A Granted JPS60166185A (ja) 1984-02-10 1984-02-10 レ−ザ焦点合わせ装置

Country Status (1)

Country Link
JP (1) JPS60166185A (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5948292A (en) * 1997-06-05 1999-09-07 Mitsubishi Denki Kabushiki Kaisha Laser beam machining apparatus, focus positioning device for laser beam machining apparatus, and converged laser beam diameter measuring device
KR100670940B1 (ko) 2005-02-07 2007-01-17 (주)한빛레이저 레이저빔의 초점위치 고속이동형 집속장치
JP2012238864A (ja) * 2002-04-18 2012-12-06 Applied Materials Inc 走査による熱束処理
CN104842065A (zh) * 2015-05-28 2015-08-19 南京南车浦镇城轨车辆有限责任公司 一种基于压力传感的激光加工头辅助对焦装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5035796A (https=) * 1973-08-01 1975-04-04
JPS5270851A (en) * 1975-10-23 1977-06-13 Mitsubishi Electric Corp Focal point adjusting system for rays

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5035796A (https=) * 1973-08-01 1975-04-04
JPS5270851A (en) * 1975-10-23 1977-06-13 Mitsubishi Electric Corp Focal point adjusting system for rays

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5948292A (en) * 1997-06-05 1999-09-07 Mitsubishi Denki Kabushiki Kaisha Laser beam machining apparatus, focus positioning device for laser beam machining apparatus, and converged laser beam diameter measuring device
JP2012238864A (ja) * 2002-04-18 2012-12-06 Applied Materials Inc 走査による熱束処理
KR100670940B1 (ko) 2005-02-07 2007-01-17 (주)한빛레이저 레이저빔의 초점위치 고속이동형 집속장치
CN104842065A (zh) * 2015-05-28 2015-08-19 南京南车浦镇城轨车辆有限责任公司 一种基于压力传感的激光加工头辅助对焦装置
CN104842065B (zh) * 2015-05-28 2016-08-24 南京中车浦镇城轨车辆有限责任公司 一种基于压力传感的激光加工头辅助对焦装置

Also Published As

Publication number Publication date
JPH0231635B2 (https=) 1990-07-16

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