JPS60164685U - 真空装置 - Google Patents

真空装置

Info

Publication number
JPS60164685U
JPS60164685U JP5264084U JP5264084U JPS60164685U JP S60164685 U JPS60164685 U JP S60164685U JP 5264084 U JP5264084 U JP 5264084U JP 5264084 U JP5264084 U JP 5264084U JP S60164685 U JPS60164685 U JP S60164685U
Authority
JP
Japan
Prior art keywords
vacuum
silencer
vacuum equipment
air source
vacuum container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5264084U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6332935Y2 (enrdf_load_stackoverflow
Inventor
藪中　文春
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5264084U priority Critical patent/JPS60164685U/ja
Publication of JPS60164685U publication Critical patent/JPS60164685U/ja
Application granted granted Critical
Publication of JPS6332935Y2 publication Critical patent/JPS6332935Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP5264084U 1984-04-12 1984-04-12 真空装置 Granted JPS60164685U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5264084U JPS60164685U (ja) 1984-04-12 1984-04-12 真空装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5264084U JPS60164685U (ja) 1984-04-12 1984-04-12 真空装置

Publications (2)

Publication Number Publication Date
JPS60164685U true JPS60164685U (ja) 1985-11-01
JPS6332935Y2 JPS6332935Y2 (enrdf_load_stackoverflow) 1988-09-02

Family

ID=30572773

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5264084U Granted JPS60164685U (ja) 1984-04-12 1984-04-12 真空装置

Country Status (1)

Country Link
JP (1) JPS60164685U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926521A (enrdf_load_stackoverflow) * 1972-07-05 1974-03-09
JPS5136130U (enrdf_load_stackoverflow) * 1974-09-11 1976-03-17

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926521A (enrdf_load_stackoverflow) * 1972-07-05 1974-03-09
JPS5136130U (enrdf_load_stackoverflow) * 1974-09-11 1976-03-17

Also Published As

Publication number Publication date
JPS6332935Y2 (enrdf_load_stackoverflow) 1988-09-02

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