JPS60162901A - 非接触変位測定装置 - Google Patents
非接触変位測定装置Info
- Publication number
- JPS60162901A JPS60162901A JP1777884A JP1777884A JPS60162901A JP S60162901 A JPS60162901 A JP S60162901A JP 1777884 A JP1777884 A JP 1777884A JP 1777884 A JP1777884 A JP 1777884A JP S60162901 A JPS60162901 A JP S60162901A
- Authority
- JP
- Japan
- Prior art keywords
- pulse
- light
- circuit
- light receiving
- receiving element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1777884A JPS60162901A (ja) | 1984-02-02 | 1984-02-02 | 非接触変位測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1777884A JPS60162901A (ja) | 1984-02-02 | 1984-02-02 | 非接触変位測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60162901A true JPS60162901A (ja) | 1985-08-24 |
| JPH0437925B2 JPH0437925B2 (enExample) | 1992-06-22 |
Family
ID=11953173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1777884A Granted JPS60162901A (ja) | 1984-02-02 | 1984-02-02 | 非接触変位測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60162901A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6250602A (ja) * | 1985-08-30 | 1987-03-05 | Toshiba Corp | 試料面位置測定装置 |
| JPH06221853A (ja) * | 1993-01-25 | 1994-08-12 | Agency Of Ind Science & Technol | 位置検出装置 |
| JPH06288764A (ja) * | 1992-08-13 | 1994-10-18 | Seikosha Co Ltd | 測距装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS503447U (enExample) * | 1973-05-11 | 1975-01-14 | ||
| JPS5023247A (enExample) * | 1973-06-29 | 1975-03-12 | ||
| JPS50110553A (enExample) * | 1974-02-08 | 1975-08-30 |
-
1984
- 1984-02-02 JP JP1777884A patent/JPS60162901A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS503447U (enExample) * | 1973-05-11 | 1975-01-14 | ||
| JPS5023247A (enExample) * | 1973-06-29 | 1975-03-12 | ||
| JPS50110553A (enExample) * | 1974-02-08 | 1975-08-30 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6250602A (ja) * | 1985-08-30 | 1987-03-05 | Toshiba Corp | 試料面位置測定装置 |
| JPH06288764A (ja) * | 1992-08-13 | 1994-10-18 | Seikosha Co Ltd | 測距装置 |
| JPH06221853A (ja) * | 1993-01-25 | 1994-08-12 | Agency Of Ind Science & Technol | 位置検出装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0437925B2 (enExample) | 1992-06-22 |
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