JPS60153182A - 圧覚センサの製造方法 - Google Patents

圧覚センサの製造方法

Info

Publication number
JPS60153182A
JPS60153182A JP59009794A JP979484A JPS60153182A JP S60153182 A JPS60153182 A JP S60153182A JP 59009794 A JP59009794 A JP 59009794A JP 979484 A JP979484 A JP 979484A JP S60153182 A JPS60153182 A JP S60153182A
Authority
JP
Japan
Prior art keywords
pressure
ring
sensitive
receiving surface
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59009794A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0446462B2 (enExample
Inventor
Ken Meguro
目黒　謙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Corporate Research and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Corporate Research and Development Ltd filed Critical Fuji Electric Corporate Research and Development Ltd
Priority to JP59009794A priority Critical patent/JPS60153182A/ja
Publication of JPS60153182A publication Critical patent/JPS60153182A/ja
Publication of JPH0446462B2 publication Critical patent/JPH0446462B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Pressure Sensors (AREA)
JP59009794A 1984-01-23 1984-01-23 圧覚センサの製造方法 Granted JPS60153182A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59009794A JPS60153182A (ja) 1984-01-23 1984-01-23 圧覚センサの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59009794A JPS60153182A (ja) 1984-01-23 1984-01-23 圧覚センサの製造方法

Publications (2)

Publication Number Publication Date
JPS60153182A true JPS60153182A (ja) 1985-08-12
JPH0446462B2 JPH0446462B2 (enExample) 1992-07-30

Family

ID=11730111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59009794A Granted JPS60153182A (ja) 1984-01-23 1984-01-23 圧覚センサの製造方法

Country Status (1)

Country Link
JP (1) JPS60153182A (enExample)

Also Published As

Publication number Publication date
JPH0446462B2 (enExample) 1992-07-30

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