JPS60153171A - ２セル型圧覚センサ - Google Patents

２セル型圧覚センサ

Info

Publication number
JPS60153171A
JPS60153171A JP59008782A JP878284A JPS60153171A JP S60153171 A JPS60153171 A JP S60153171A JP 59008782 A JP59008782 A JP 59008782A JP 878284 A JP878284 A JP 878284A JP S60153171 A JPS60153171 A JP S60153171A
Authority
JP
Japan
Prior art keywords
pressure
cells
substrate
cell
sensitive module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59008782A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0473303B2 (enrdf_load_stackoverflow
Inventor
Teizo Takahama
高浜　禎造
Mitsuo Kobayashi
光男 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Corporate Research and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Corporate Research and Development Ltd filed Critical Fuji Electric Corporate Research and Development Ltd
Priority to JP59008782A priority Critical patent/JPS60153171A/ja
Publication of JPS60153171A publication Critical patent/JPS60153171A/ja
Publication of JPH0473303B2 publication Critical patent/JPH0473303B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Pressure Sensors (AREA)
JP59008782A 1984-01-20 1984-01-20 ２セル型圧覚センサ Granted JPS60153171A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59008782A JPS60153171A (ja) 1984-01-20 1984-01-20 ２セル型圧覚センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59008782A JPS60153171A (ja) 1984-01-20 1984-01-20 ２セル型圧覚センサ

Publications (2)

Publication Number Publication Date
JPS60153171A true JPS60153171A (ja) 1985-08-12
JPH0473303B2 JPH0473303B2 (enrdf_load_stackoverflow) 1992-11-20

Family

ID=11702443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59008782A Granted JPS60153171A (ja) 1984-01-20 1984-01-20 ２セル型圧覚センサ

Country Status (1)

Country Link
JP (1) JPS60153171A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153172A (ja) * 1984-01-20 1985-08-12 Fuji Electric Corp Res & Dev Ltd 圧覚センサ
JPS63154926A (ja) * 1986-12-19 1988-06-28 Agency Of Ind Science & Technol 圧覚センサ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153172A (ja) * 1984-01-20 1985-08-12 Fuji Electric Corp Res & Dev Ltd 圧覚センサ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153172A (ja) * 1984-01-20 1985-08-12 Fuji Electric Corp Res & Dev Ltd 圧覚センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153172A (ja) * 1984-01-20 1985-08-12 Fuji Electric Corp Res & Dev Ltd 圧覚センサ
JPS63154926A (ja) * 1986-12-19 1988-06-28 Agency Of Ind Science & Technol 圧覚センサ

Also Published As

Publication number Publication date
JPH0473303B2 (enrdf_load_stackoverflow) 1992-11-20

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