JPS60152887A - Heater - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

Detailed Description of the Invention [Technical Field] The present invention relates to a heating technology, particularly a technology for heating an object to be heated by accommodating it in a furnace. This invention relates to an effective technique for use in curing baking of hardening materials.

[Background Art] In the manufacture of semiconductor devices, it is conceivable that a resin-sealed package molded using a thermosetting resin is placed in a beta furnace and thermally cured.

However, in such a case, opening the door during the beta will reduce efficiency, so the main problem is that the door cannot be opened midway through, and product loading and unloading is restricted for a long period of time. Revealed by the inventor.

[Object of the Invention] An object of the present invention is to provide a heating technique that allows a product to be taken in and out during heating.

The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

[Summary of the Invention] A brief overview of typical inventions disclosed in this application is as follows.

In other words, by dividing the inside of the furnace into multiple chambers and providing multiple doors on the front of the furnace corresponding to the multiple chambers, heat dissipation is suppressed when each door is opened, thereby preventing a drop in thermal efficiency. This enabled timely loading and unloading of products.

[Example] FIG. 1 is a front view showing a heating device as an example of the present invention, and FIG. 2 is an enlarged side sectional view thereof.

In this embodiment, this heating device is configured as a device for curing-baking a resin-sealed package molded using a thermosetting resin.

This apparatus includes a baking oven 1 as a heating furnace, and an interior 2 of this oven 1 is partitioned into a plurality of compartments 3. Each compartment 3 is formed to have a volume capable of accommodating one magazine 31 (to be described later), and a horizontally long door 4 is attached to the frontage of each compartment 3 so as to be able to open one side in the horizontal direction. Electric heaters 5 as heating means are provided at appropriate locations in the interior 2 of the baking oven 1.
For example, it is configured so that the three groups of compartments can be uniformly heated all at once. An air blowing furnace 6 is disposed at the back of the interior 2 of the baking oven 1, and the air blowing furnace 6 is communicated with each compartment 3 from each blowing lower provided at the back of each compartment 3.

A plurality of vent holes 8 are opened in each compartment 3 so as to communicate the adjacent compartments 3 with each other, and the lowest vent 8 is connected to an exhaust passage 9 formed in the lower part of the furnace 1.
is communicated with. A centrifugal fan IO is installed at the bottom of the furnace 1 , and the fan 10 has an intake port 11 opened to the exhaust path 9 and an air supply port 12 communicated with the air supply path 6 .

An automatic loading/unloading device 13 for automatically loading and unloading objects to be heated is installed on the front side of the outside of the beta furnace 1. That is, a pair of left and right rails 14 are laid on the floor in front of the baking oven 1, respectively, substantially at right angles to the front of the oven 1, and on both rails 14, self-propelled carts 15 are installed, respectively. Screw type jacks 16 are mounted on both carts 15, respectively, and elevating bodies 18 are respectively fitted to ram screw shafts 17 of both jacks 16 so as to be able to move up and down.

A feed screw shaft 19 and a guide rail (not shown) are horizontally mounted between the two elevating bodies 18, and the feed screw shaft 19 is rotated forward and backward by a servo motor 20 mounted on the elevating body 18. ing. A movable body 21 is supported by the feed screw shaft 19 and the guide rail so as to be movable left and right, and a servo motor 22 is installed at the bottom of the movable body 21. The motor 22 is configured to rotate the left and right screw shafts 23 in forward and reverse directions, and a pair of holders 24 are coupled to the left and right screw shafts 23 so as to be openable and closable. Further, a rod 25 for opening and closing the door 4 is provided protruding from the moving body 21. On the floor between the left and right rails 14, an input conveyor 26 and a II output conveyor 27, each of which is a belt conveyor or the like, are installed.

In this embodiment, the object to be heated 28 is a multi-lead frame 29 in which a plurality of resin-sealed pancages 30 are molded with thermosetting resin, and the object to be heated 28 is a magazine formed into a substantially rectangular cylinder shape. A plurality of sheets are stored in a stacked manner in 31.

Next, the effect will be explained.

When a magazine 31 containing a plurality of objects to be heated 28 is carried to the baking oven 1 by the carry-in container 26, the automatic loading/unloading device 13 picks up the magazine 31.

That is, after the movable body 21 is three-dimensionally moved by the cart 15, jack 16, and feed screw shaft 19 and positioned directly above the magazine 31, it is moved by the left and right screw shafts 23 to both holders 2.
4.24 is closed to hold the magazine 31. When I picked up the magazine 31, it was ordered by a convenience store, etc.
The movable body 21 is moved three-dimensionally and conveys the magazine 31 to the front of the vacant compartment 3 of the baking oven 1. Therefore, the moving body 21 moves the rod 25 to the handle 4a of the door 4.
After hooking it, move back and open door 4. continue,
After the magazine 31 carried by the moving body 13 in the automatic loading/unloading device 13 is inserted into the compartment 3 with the door 4 open, the moving body 13 closes the door 4 by pushing it.

After the predetermined baking time has elapsed, the magazine 31 is removed from the compartment 3.
When taking out the paper, the automatic loading/unloading device 13 operates almost in the opposite manner to that described above. That is, the movable body 21 moves to the position of the compartment 3 from which the magazine 31 is to be taken out, opens the door 4, and removes the magazine 3 in the compartment 3 according to instructions from a computer or the like.
After the magazine 31 is picked up and pulled out and the door 4 is closed, the picked up magazine 31 is conveyed to the carry-out conveyor 26 and transferred.

On the other hand, in the interior 2 of the baking oven 1, the group of compartments 3 is heated all at once, and the hot air is blown by the fan 1O, and the air passage 6, each blowout lower, each vent 8, and the exhaust passage 9 are heated. The air is forcedly circulated almost equally to each compartment 3 through the air. Therefore, the three groups of compartments have a substantially isothermal and uniform atmosphere throughout the furnace.

In this atmosphere, when the door 4 of a certain compartment 3 is opened, the temperature of the opened compartment 3 decreases and the atmosphere also changes. However, since the interior 2 of the baking oven 1 is partitioned into three groups of compartments, changes in one open compartment 3 hardly affect the other compartments 3. Therefore, the doors of each compartment 3 can be opened and closed as needed.

Note that it is desirable that the operation of the automatic loading/unloading device 13 and the control of the electric heater 5, fan 10, etc. of the baking oven 1 be centrally managed by a computer or the like. In particular, it is desirable to rationally manage vacant rooms, control the beta duration of containment rooms, etc. across all compartments.

[Effects] (1) By dividing the inside of the furnace into multiple chambers and installing multiple doors on the front of the furnace, even if the door of one chamber is opened, the atmosphere inside the furnace will not change due to the door opening to other chambers. Since the spread of heat can be suppressed, heated items can be taken in and out in a timely manner.

(2) By taking in and out the heated objects in a timely manner, it is possible to process the heated objects continuously without batch processing, so the waiting time for heating treatment can be eliminated or shortened; Product completion time can be shortened and the number of products in progress can be reduced.

(3) By sharing heating means, hot air circulation means, etc. in each room group, the number of equipment such as heating means, circulation means, etc. can be saved, so that equipment costs and operating costs can be reduced.

(4) Automatic loading and unloading of heated materials into and out of each chamber and computer-controlled management enables unmanned operation, which enables continuous operation for long periods of time, is safe, and This also allows for consistency with the process.

Although the invention made by the present inventor has been specifically explained above based on Examples, it goes without saying that the present invention is not limited to the Examples and can be modified in various ways without departing from the gist thereof. Nor.

For example, there are no limitations on the shape, structure, or number of the chambers and doors, and there are no limitations on the heating means or hot air circulation means.

An articulated robot can be used as the automatic loading/unloading device, or it can be omitted.

[Field of Application] In the above description, the invention made by the present inventor was mainly applied to the cure-bake of resin-sealed packages, which is the field of application behind the invention, but the invention is not limited to this, for example. It can be applied when drying adhesives, printing inks, etc., and when performing aging heating tests to eliminate products that deteriorate at high temperatures.

[Brief explanation of drawings]

FIG. 1 is a front view showing a heating device as an embodiment of the present invention, and FIG. 2 is an enlarged side sectional view thereof. 1...Bake oven (heating furnace), 2...Inside the oven, 3...
- Compartment room, 4... Door, 5... Electric heater (heating means), 6... Air supply path, 7... Air outlet, 8... Ventilation port, 9... Exhaust path, 10...Fan, 11...Intake port, 12...Air supply port, 13...Automatic loading/unloading device,
14... Rail, 15... Dolly, 16... Jacket, 17... Feed screw shaft, 18... Elevating body, 19...
...Feed screw shaft, 20...Servo motor, 21...
Moving body, 22... Servo motor, 23... Left-right helical shaft, 24... Holder, 25... Rondo, 26...
Carrying in conveyor, 27... Carrying out conveyor, 28... Heated object, 29... Lead frame, 30... Resin sealed package, 31... Magazine.

Claims (1)

[Claims] (1) A heating device characterized in that the interior of the furnace is partitioned into a plurality of chambers and a plurality of doors are provided on the front side of the furnace. 2. The heating device according to claim 1, wherein the heating device is configured so that a plurality of chambers are heated all at once and hot air is circulated.