JPS60152152U - フオトレジスト基板の処理装置 - Google Patents

フオトレジスト基板の処理装置

Info

Publication number
JPS60152152U
JPS60152152U JP3966084U JP3966084U JPS60152152U JP S60152152 U JPS60152152 U JP S60152152U JP 3966084 U JP3966084 U JP 3966084U JP 3966084 U JP3966084 U JP 3966084U JP S60152152 U JPS60152152 U JP S60152152U
Authority
JP
Japan
Prior art keywords
protective layer
substrate
photoresist
gripping tool
holds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3966084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0314670Y2 (enrdf_load_stackoverflow
Inventor
木村　勝美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Nippon Synthetic Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Synthetic Chemical Industry Co Ltd filed Critical Nippon Synthetic Chemical Industry Co Ltd
Priority to JP3966084U priority Critical patent/JPS60152152U/ja
Publication of JPS60152152U publication Critical patent/JPS60152152U/ja
Application granted granted Critical
Publication of JPH0314670Y2 publication Critical patent/JPH0314670Y2/ja
Granted legal-status Critical Current

Links

JP3966084U 1984-03-19 1984-03-19 フオトレジスト基板の処理装置 Granted JPS60152152U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3966084U JPS60152152U (ja) 1984-03-19 1984-03-19 フオトレジスト基板の処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3966084U JPS60152152U (ja) 1984-03-19 1984-03-19 フオトレジスト基板の処理装置

Publications (2)

Publication Number Publication Date
JPS60152152U true JPS60152152U (ja) 1985-10-09
JPH0314670Y2 JPH0314670Y2 (enrdf_load_stackoverflow) 1991-04-02

Family

ID=30547814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3966084U Granted JPS60152152U (ja) 1984-03-19 1984-03-19 フオトレジスト基板の処理装置

Country Status (1)

Country Link
JP (1) JPS60152152U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5377703A (en) * 1976-12-18 1978-07-10 Basf Ag Device for treating printing plate
JPS58178348A (ja) * 1982-04-13 1983-10-19 Nippon Synthetic Chem Ind Co Ltd:The 画像形成法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5377703A (en) * 1976-12-18 1978-07-10 Basf Ag Device for treating printing plate
JPS58178348A (ja) * 1982-04-13 1983-10-19 Nippon Synthetic Chem Ind Co Ltd:The 画像形成法

Also Published As

Publication number Publication date
JPH0314670Y2 (enrdf_load_stackoverflow) 1991-04-02

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