JPS60152071A - 半導体圧力センサ - Google Patents

半導体圧力センサ

Info

Publication number
JPS60152071A
JPS60152071A JP59007670A JP767084A JPS60152071A JP S60152071 A JPS60152071 A JP S60152071A JP 59007670 A JP59007670 A JP 59007670A JP 767084 A JP767084 A JP 767084A JP S60152071 A JPS60152071 A JP S60152071A
Authority
JP
Japan
Prior art keywords
metal thin
thin film
wiring
pressure sensor
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59007670A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0340958B2 (enrdf_load_stackoverflow
Inventor
Teizo Takahama
高浜　禎造
Shunji Miura
俊二 三浦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Fuji Electric Corporate Research and Development Ltd
Fuji Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd, Fuji Electric Corporate Research and Development Ltd, Fuji Electric Manufacturing Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP59007670A priority Critical patent/JPS60152071A/ja
Publication of JPS60152071A publication Critical patent/JPS60152071A/ja
Publication of JPH0340958B2 publication Critical patent/JPH0340958B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP59007670A 1984-01-19 1984-01-19 半導体圧力センサ Granted JPS60152071A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59007670A JPS60152071A (ja) 1984-01-19 1984-01-19 半導体圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59007670A JPS60152071A (ja) 1984-01-19 1984-01-19 半導体圧力センサ

Publications (2)

Publication Number Publication Date
JPS60152071A true JPS60152071A (ja) 1985-08-10
JPH0340958B2 JPH0340958B2 (enrdf_load_stackoverflow) 1991-06-20

Family

ID=11672232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59007670A Granted JPS60152071A (ja) 1984-01-19 1984-01-19 半導体圧力センサ

Country Status (1)

Country Link
JP (1) JPS60152071A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009053034A (ja) * 2007-08-27 2009-03-12 Mitsumi Electric Co Ltd 半導体圧力センサ及びその製造方法
US11703081B2 (en) 2019-03-15 2023-07-18 Ntn Corporation Rolling bearing

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009053034A (ja) * 2007-08-27 2009-03-12 Mitsumi Electric Co Ltd 半導体圧力センサ及びその製造方法
US11703081B2 (en) 2019-03-15 2023-07-18 Ntn Corporation Rolling bearing

Also Published As

Publication number Publication date
JPH0340958B2 (enrdf_load_stackoverflow) 1991-06-20

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