JPS60147638A - 超微小粒子数の測定方法とその測定装置 - Google Patents
超微小粒子数の測定方法とその測定装置Info
- Publication number
- JPS60147638A JPS60147638A JP59005086A JP508684A JPS60147638A JP S60147638 A JPS60147638 A JP S60147638A JP 59005086 A JP59005086 A JP 59005086A JP 508684 A JP508684 A JP 508684A JP S60147638 A JPS60147638 A JP S60147638A
- Authority
- JP
- Japan
- Prior art keywords
- aerosol
- measuring
- particles
- saturated steam
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 27
- 239000011882 ultra-fine particle Substances 0.000 title claims description 14
- 239000002245 particle Substances 0.000 claims abstract description 80
- 239000000443 aerosol Substances 0.000 claims abstract description 52
- 229920006395 saturated elastomer Polymers 0.000 claims abstract description 22
- 238000002156 mixing Methods 0.000 claims abstract description 11
- 238000009792 diffusion process Methods 0.000 claims description 21
- 239000011859 microparticle Substances 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000000149 argon plasma sintering Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000691 measurement method Methods 0.000 claims 1
- 239000010419 fine particle Substances 0.000 abstract 3
- 238000009738 saturating Methods 0.000 abstract 1
- 238000009833 condensation Methods 0.000 description 17
- 230000005494 condensation Effects 0.000 description 16
- 238000010586 diagram Methods 0.000 description 11
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000010191 image analysis Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 241000157302 Bison bison athabascae Species 0.000 description 1
- 230000005679 Peltier effect Effects 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 238000004887 air purification Methods 0.000 description 1
- 239000007771 core particle Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002285 radioactive effect Effects 0.000 description 1
- 229920003987 resole Polymers 0.000 description 1
- 238000001089 thermophoresis Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/065—Investigating concentration of particle suspensions using condensation nuclei counters
Landscapes
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59005086A JPS60147638A (ja) | 1984-01-13 | 1984-01-13 | 超微小粒子数の測定方法とその測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59005086A JPS60147638A (ja) | 1984-01-13 | 1984-01-13 | 超微小粒子数の測定方法とその測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60147638A true JPS60147638A (ja) | 1985-08-03 |
| JPH0262014B2 JPH0262014B2 (OSRAM) | 1990-12-21 |
Family
ID=11601577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59005086A Granted JPS60147638A (ja) | 1984-01-13 | 1984-01-13 | 超微小粒子数の測定方法とその測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60147638A (OSRAM) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62222145A (ja) * | 1986-03-24 | 1987-09-30 | Nippon Kagaku Kogyo Kk | 液中不純物測定方法とその測定装置 |
| JPS62225926A (ja) * | 1986-03-27 | 1987-10-03 | Rion Co Ltd | 粒子計測方法 |
| JPS6428540A (en) * | 1987-07-24 | 1989-01-31 | Rion Co | Automatic monitoring of concentrated nucleus counter |
| JPH0399248A (ja) * | 1989-09-06 | 1991-04-24 | Air Prod And Chem Inc | 凝縮核計数法を使用した粒子径測定法 |
| JP2002071549A (ja) * | 2000-08-25 | 2002-03-08 | Sysmex Corp | 粒子撮像装置 |
| JP2009014727A (ja) * | 2007-07-05 | 2009-01-22 | Kang Ho Ahn | 凝縮核計数器 |
| JP2009243941A (ja) * | 2008-03-28 | 2009-10-22 | Tokyo Electron Ltd | パーティクル検出システム、パーティクル検出方法及びプログラム |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05272190A (ja) * | 1992-03-26 | 1993-10-19 | Fudo Technical:Kk | 合成スラブ |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4990594A (OSRAM) * | 1972-12-07 | 1974-08-29 | ||
| JPS5326199A (en) * | 1976-08-20 | 1978-03-10 | Science Spectrum | Method and apparatus for rapid determination and distinction of large cell |
| JPS547597A (en) * | 1977-06-20 | 1979-01-20 | Hitachi Ltd | Electric insulator |
| JPS5742839A (en) * | 1980-08-28 | 1982-03-10 | Nitta Zerachin Kk | Method and device for measuring number of ultrafine particles |
-
1984
- 1984-01-13 JP JP59005086A patent/JPS60147638A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4990594A (OSRAM) * | 1972-12-07 | 1974-08-29 | ||
| JPS5326199A (en) * | 1976-08-20 | 1978-03-10 | Science Spectrum | Method and apparatus for rapid determination and distinction of large cell |
| JPS547597A (en) * | 1977-06-20 | 1979-01-20 | Hitachi Ltd | Electric insulator |
| JPS5742839A (en) * | 1980-08-28 | 1982-03-10 | Nitta Zerachin Kk | Method and device for measuring number of ultrafine particles |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62222145A (ja) * | 1986-03-24 | 1987-09-30 | Nippon Kagaku Kogyo Kk | 液中不純物測定方法とその測定装置 |
| JPS62225926A (ja) * | 1986-03-27 | 1987-10-03 | Rion Co Ltd | 粒子計測方法 |
| JPS6428540A (en) * | 1987-07-24 | 1989-01-31 | Rion Co | Automatic monitoring of concentrated nucleus counter |
| JPH0399248A (ja) * | 1989-09-06 | 1991-04-24 | Air Prod And Chem Inc | 凝縮核計数法を使用した粒子径測定法 |
| JP2002071549A (ja) * | 2000-08-25 | 2002-03-08 | Sysmex Corp | 粒子撮像装置 |
| JP2009014727A (ja) * | 2007-07-05 | 2009-01-22 | Kang Ho Ahn | 凝縮核計数器 |
| JP2009243941A (ja) * | 2008-03-28 | 2009-10-22 | Tokyo Electron Ltd | パーティクル検出システム、パーティクル検出方法及びプログラム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0262014B2 (OSRAM) | 1990-12-21 |
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