JPH0262014B2 - - Google Patents
Info
- Publication number
- JPH0262014B2 JPH0262014B2 JP59005086A JP508684A JPH0262014B2 JP H0262014 B2 JPH0262014 B2 JP H0262014B2 JP 59005086 A JP59005086 A JP 59005086A JP 508684 A JP508684 A JP 508684A JP H0262014 B2 JPH0262014 B2 JP H0262014B2
- Authority
- JP
- Japan
- Prior art keywords
- aerosol
- measuring
- particles
- saturated steam
- microparticles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/065—Investigating concentration of particle suspensions using condensation nuclei counters
Landscapes
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59005086A JPS60147638A (ja) | 1984-01-13 | 1984-01-13 | 超微小粒子数の測定方法とその測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59005086A JPS60147638A (ja) | 1984-01-13 | 1984-01-13 | 超微小粒子数の測定方法とその測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60147638A JPS60147638A (ja) | 1985-08-03 |
| JPH0262014B2 true JPH0262014B2 (OSRAM) | 1990-12-21 |
Family
ID=11601577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59005086A Granted JPS60147638A (ja) | 1984-01-13 | 1984-01-13 | 超微小粒子数の測定方法とその測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60147638A (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05272190A (ja) * | 1992-03-26 | 1993-10-19 | Fudo Technical:Kk | 合成スラブ |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0663961B2 (ja) * | 1986-03-24 | 1994-08-22 | 日本科学工業株式会社 | 液中不純物測定方法とその測定装置 |
| JPS62225926A (ja) * | 1986-03-27 | 1987-10-03 | Rion Co Ltd | 粒子計測方法 |
| JPS6428540A (en) * | 1987-07-24 | 1989-01-31 | Rion Co | Automatic monitoring of concentrated nucleus counter |
| US5026155A (en) * | 1989-09-06 | 1991-06-25 | Air Products And Chemicals, Inc. | Process for sizing particles using condensation nucleus counting |
| JP4484340B2 (ja) * | 2000-08-25 | 2010-06-16 | シスメックス株式会社 | 粒子撮像装置 |
| KR100895542B1 (ko) * | 2007-07-05 | 2009-05-06 | 안강호 | 응축핵 계수기 |
| JP5171344B2 (ja) * | 2008-03-28 | 2013-03-27 | 東京エレクトロン株式会社 | パーティクル検出システム、パーティクル検出方法及びプログラム |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS556952B2 (OSRAM) * | 1972-12-07 | 1980-02-21 | ||
| US4173415A (en) * | 1976-08-20 | 1979-11-06 | Science Spectrum, Inc. | Apparatus and process for rapidly characterizing and differentiating large organic cells |
| JPS547597A (en) * | 1977-06-20 | 1979-01-20 | Hitachi Ltd | Electric insulator |
| JPS5742839A (en) * | 1980-08-28 | 1982-03-10 | Nitta Zerachin Kk | Method and device for measuring number of ultrafine particles |
-
1984
- 1984-01-13 JP JP59005086A patent/JPS60147638A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05272190A (ja) * | 1992-03-26 | 1993-10-19 | Fudo Technical:Kk | 合成スラブ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60147638A (ja) | 1985-08-03 |
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