JPS60144933A - 液相成長装置 - Google Patents
液相成長装置Info
- Publication number
- JPS60144933A JPS60144933A JP59000603A JP60384A JPS60144933A JP S60144933 A JPS60144933 A JP S60144933A JP 59000603 A JP59000603 A JP 59000603A JP 60384 A JP60384 A JP 60384A JP S60144933 A JPS60144933 A JP S60144933A
- Authority
- JP
- Japan
- Prior art keywords
- solution
- liquid phase
- supersaturation
- degree
- growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/29—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
- H10P14/2901—Materials
- H10P14/2907—Materials being Group IIIA-VA materials
- H10P14/2909—Phosphides
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/26—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using liquid deposition
- H10P14/263—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using liquid deposition using melted materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/26—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using liquid deposition
- H10P14/265—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using liquid deposition using solutions
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Semiconductor Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59000603A JPS60144933A (ja) | 1984-01-06 | 1984-01-06 | 液相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59000603A JPS60144933A (ja) | 1984-01-06 | 1984-01-06 | 液相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60144933A true JPS60144933A (ja) | 1985-07-31 |
| JPH0464174B2 JPH0464174B2 (https=) | 1992-10-14 |
Family
ID=11478305
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59000603A Granted JPS60144933A (ja) | 1984-01-06 | 1984-01-06 | 液相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60144933A (https=) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4840806A (https=) * | 1971-09-21 | 1973-06-15 |
-
1984
- 1984-01-06 JP JP59000603A patent/JPS60144933A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4840806A (https=) * | 1971-09-21 | 1973-06-15 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0464174B2 (https=) | 1992-10-14 |
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