JPS6014488A - Laser diode inspecting device - Google Patents

Laser diode inspecting device

Info

Publication number
JPS6014488A
JPS6014488A JP12211483A JP12211483A JPS6014488A JP S6014488 A JPS6014488 A JP S6014488A JP 12211483 A JP12211483 A JP 12211483A JP 12211483 A JP12211483 A JP 12211483A JP S6014488 A JPS6014488 A JP S6014488A
Authority
JP
Japan
Prior art keywords
laser diode
suction
suction stage
probe
diode bar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12211483A
Other languages
Japanese (ja)
Other versions
JPH0144028B2 (en
Inventor
Masao Kinoshita
雅夫 木下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP12211483A priority Critical patent/JPS6014488A/en
Publication of JPS6014488A publication Critical patent/JPS6014488A/en
Publication of JPH0144028B2 publication Critical patent/JPH0144028B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/0014Measuring characteristics or properties thereof

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Semiconductor Lasers (AREA)

Abstract

PURPOSE:To efficiently inspect the characteristics of laser diode elements with excellent workability by a method wherein the titled inspecting device is constituted, involving a suction stage, a vertically movable mechanism, a single axle table, two probes and a sensor which detects laser beams. CONSTITUTION:A laser diode bar 7 is put on a suction stage 16 having suction holes in a state that the top electrodes of laser diode elements have been faced upwards and the bar 7 is attractingly fixed onto the stage 16. Then, a feed screw 11 is made to revolve by a driving source such as a motor, etc., and one element on the end of the laser diode bar 7 is made to transfer just below a probe 19a. Moreover, an actuator 14 is actuated, the suction stage 16 is made to rise, the probe 19a is made to contact with the top electrode of the one element on the end of the laser diode bar 7, and a probe 19b is made to contact with the top surface of the suction stage 16. At this time, current is flowed between the probe 19a and the probe 19b, the one element on the end of the laser diode bar 7 is made to luminescence, the emitted light is detected by a sensor 17 and the characteristics of the element is inspected. In the same way, the characteristics of laser diode elements are one after another inspected by making a vertically movable mechanism 12 and a single axle table 9 drive.

Description

【発明の詳細な説明】 〔発明の属する技術分野〕 本発明に、レーザダイオード検査装置、特化、レーザダ
イオード金バーの状態でIJf!jt!+に検査するた
めのレーザダイオード検査装置【関する。
[Detailed Description of the Invention] [Technical Field to Which the Invention Pertains] The present invention provides a laser diode inspection device, specialized for IJf! jt! + Laser diode inspection equipment for inspection.

〔共通的技術〕[Common technology]

一般に、本発明および従来のレーザダイオード検査装置
の検査対象とlるレーザダイオードバーに、第1図に示
すようにレーザダイオード素子lがバー状態で連成した
構造をしている。すなわちレーザダイオード素子1に、
第2図に詳細ケ示すように、上@電極2と下面電極3 
+Cげさ1わたサンドイッチ状をしており、上面電咎2
と下■1極3との間IC電流を流すと、発生した元が相
対する反射@4で増幅さね発光領域部5からレーザ元8
全発Tる0このようなレーザダイオードでに、ウェハ全
臂開することにJ:v反射面4を形成しているため、多
くの半尋体索すの場合/C行っているつエバ状態で各素
子の持回全検査するという方法がと力ない。
In general, a laser diode bar to be inspected by the laser diode inspection apparatus of the present invention and the conventional laser diode inspection apparatus has a structure in which laser diode elements l are coupled in a bar state as shown in FIG. That is, in the laser diode element 1,
As shown in detail in Figure 2, the upper @electrode 2 and the lower electrode 3
It has a sandwich shape with 1 layer and 2 layers on the top.
When an IC current is passed between the lower pole 1 and the lower pole 3, the generated source is amplified by the opposing reflection @4, and the laser source 8 is transferred from the light emitting region 5 to the laser source 8.
In such a laser diode, the wafer is fully opened to form a J:v reflective surface 4, so in many half-body scans /C is performed in the EVA state. There is no way to test each element every time.

〔従来技術〕[Prior art]

従来のレーザダイオード検査装置に、各々のレーザダイ
オード素子全完全丸分離した後、作業者が1素子ずつ電
極だ挾んで特注?検査【7ていた。
In conventional laser diode inspection equipment, after each laser diode element is completely separated, a worker picks up the electrodes of each element and custom-orders them. Inspection [7]

しかしながら、このような従来のレーザダイオード検査
装置でに、幅が0.2旅、長さが0,25朋。
However, in such conventional laser diode testing equipment, the width is 0.2 mm and the length is 0.25 mm.

厚さがQ、 l mm程度と非常に小さなレーザダイオ
ード素子を取り扱うために、素子のハンドリング、発光
面の判別、表裏の判別、位置決めが困難で、検査時間が
非常くかかり、また検査精度の低下や素子の破損ケまね
くなどの多くの欠点があった。
In order to handle very small laser diode elements with a thickness of approximately Q, l mm, it is difficult to handle the elements, distinguish the light-emitting surface, distinguish between the front and back sides, and position the elements, resulting in a very long inspection time and a decrease in inspection accuracy. It had many drawbacks, such as damage to the elements.

〔発明の目的〕[Purpose of the invention]

本発明の目的に、以上のような従来の欠点を除き作業上
が良く、効率内光レーザダイオードの特注?検査できる
レーザダイオード検査装置を提供すること屹ある。
The purpose of the present invention is to create a custom-made optical laser diode that is easy to work with and efficient, excluding the above-mentioned drawbacks of the conventional ones. It is an object of the present invention to provide a laser diode inspection device that can inspect laser diodes.

〔発明の構成〕[Structure of the invention]

本発明のレーザダイオード検査装置は、複数個のレーザ
ダイオード素子が側面でつながっているレーザダイオー
ドパー全−万の発光面全外側lこ回け、上面で吸着固定
しレーザダイオ−トノく−と吸触する開が良4体からな
る吸着ステージと、前記吸着ステージを絶縁体を介して
保持しかつ上下動可能な上下動機格と一前記上下動機構
を前記吸着固定したレーザダイオードパーの長手方向v
c移動可能な一軸テーブルと、前記吸着ステージが上昇
した位置で前記吸着ステージの表凹と吸着固にしたレー
ザダイオードパーの円の13子の上+111’に極部と
にそil−ぞわ吸油可能な2本のプローブと、前 −記
グローブの吸油しfcレーザダイオード索十の外側ヶ回
いた発元囲と対向しレーザ光を検出1−る七ン丈とを含
んで桶奴さノする。
In the laser diode inspection device of the present invention, a laser diode in which a plurality of laser diode elements are connected on the side is rotated around the entire outer side of the light emitting surface of the laser diode, and is fixed by suction on the top surface and brought into contact with the laser diode hole. a suction stage consisting of four parts, a vertical movable mechanism that holds the suction stage via an insulator and is movable up and down, and a laser diode par to which the vertical movement mechanism is fixed by suction in the longitudinal direction v.
(c) A movable uniaxial table and a pole part at +111' above the 13th circle of the laser diode which is fixed by suction to the concave surface of the suction stage at the position where the suction stage is raised. The tube includes two possible probes and a seven-inch length that detects the laser beam and faces the source surrounding the outer part of the FC laser diode cable which absorbs the oil of the glove. .

〔実施例の説明〕[Explanation of Examples]

次に、本発明の実施例ICついて、図凹ケ参照して詳細
に説明する。
Next, an IC according to an embodiment of the present invention will be described in detail with reference to the drawings.

第1図に、本発明VCより検査されるレーザダイオード
パーを示す斜視図である。複数個のレーザダイオードの
素子lが側聞6でつながっていて、反射[y114がレ
ーザダイメートバー7の長手方向の面を形成している0
上面電棒2に各素子ごと/C分離さhていて、下lTI
電罹3に各素子共通となっている。
FIG. 1 is a perspective view showing a laser diode device inspected by the VC of the present invention. A plurality of laser diode elements 1 are connected by side walls 6, and the reflection [y114 forms the longitudinal surface of the laser dimer bar 700]
Each element is separated from the upper electric rod 2, and the lower lTI
It is common to each element in the electric shock absorber 3.

第31■に本発明の一実施例を示すレーザダイオード検
査装置の斜視図であり、第4図μ第3図に示す吸着テー
ブル部の一部断o1klである。
FIG. 31 is a perspective view of a laser diode inspection apparatus showing an embodiment of the present invention, and FIG. 4 is a partial cross-sectional view of the suction table portion shown in FIG.

水平シャフトiorガイドとし、モータなどの動力源に
連結さXhた送りネジ11/C,J:り移り可能な一軸
テーブル9の上面范、垂直シャフト13をガイドとして
アクチュエータ14Eより上下動可能な上下動機格12
が取り付けら力、ている0表■が良導体からなる吸着ス
テージ16に、上向trcし ゛−ザダイオードバ−7
に吸着Tる吸着孔20を肩し、吸着し−たレーザダイオ
ードパー7の長手方向が一軸テーブル9の送り方向と一
致するよう丸、絶縁体15を介して上下動機購12に取
り付けられている○ ′−!た、吸着ステージ16の側方f−汀、吸着された
レーザダイオードパー7の発光面となっている反射面4
と対向し、レーザ光全検出するセンサ17が配置さ力、
ている。さらに、吸着ステージ16を間にほさみセンサ
17と対向する位置に、グローパisa、18bが配置
され、そり、ぞhのグローブ19.l、19bの先端が
、吸着ステージ16が上昇したとさに、センサに7と対
向する1つのレーザダイオードの上面電極2と、吸着ス
テージ16の上向とて、そhぞh吸油するように配置さ
hている。
Feed screws 11/C, J connected to a power source such as a motor with a horizontal shaft as a guide; a vertical motor that can be moved up and down by an actuator 14E with the upper surface of the uniaxial table 9 movable and a vertical shaft 13 as a guide; Case 12
When the diode bar 7 is attached, the diode bar 7 is placed on the adsorption stage 16 made of a good conductor, and the diode bar 7
The laser diode par 7 is attached to the vertical movable unit 12 via an insulator 15 so that the longitudinal direction of the laser diode par 7 coincides with the feeding direction of the uniaxial table 9. ○ ′−! In addition, the side f-side of the suction stage 16, the reflective surface 4 which is the light emitting surface of the suctioned laser diode par 7.
A sensor 17 is arranged to face the laser beam and detect the entire laser beam.
ing. Further, a glow sensor 18b is disposed at a position facing the sensor 17 with the suction stage 16 in between, and the glove 19. When the suction stage 16 is raised, the tip of the l, 19b is placed above the top electrode 2 of one laser diode facing the sensor 7 and the top of the suction stage 16 so that it absorbs oil. It is placed.

次に、第3図tC示すレーザダイオード検査装置の動作
例について述べる。
Next, an example of the operation of the laser diode inspection apparatus shown in FIG. 3 tC will be described.

まず、レーザダイオードパー7葡上凹゛電極2金上rし
て、吸着孔20のある4J& Nステージ16の上にの
せ、咬着固定する。
First, the concave electrode 2 is placed on the laser diode par 7, placed on the 4J&N stage 16 with the suction holes 20, and fixed by clamping.

次に、送9ネジ11をモータ等の駆動掠(図示せず)几
より回転させレーザダイオードパー7の端の1素f金グ
ローブ19aI7)真下rc移動する。
Next, the feed screw 11 is rotated by a drive mechanism (not shown) such as a motor, and the laser diode is moved directly below the gold globe 19aI7) at the end of the laser diode part 7.

さら1(、アクチュエータ14′ft作動し、吸着ステ
ージ16を上昇させ、グローブ19aとレーザダイオー
ドパー7の端の1素子の上回電極と’ktiD触させ、
またプローブ19bと吸着ステージ16の上面と吸油さ
せる。
Furthermore, the actuator 14'ft is operated to raise the suction stage 16 and bring the globe 19a into contact with the upper electrode of one element at the end of the laser diode par 7,
Also, the probe 19b and the upper surface of the suction stage 16 are made to absorb oil.

ここで、グローブ+92と19bとの間だ電流を流し、
レーザダイオードバー7の端の1素子を発光させ、その
出力元全七ンサ17で検出して素子の特注を検査する。
Now, a current is passed between globe +92 and 19b,
One element at the end of the laser diode bar 7 is caused to emit light, and its output source is detected by all seven sensors 17 to inspect the customization of the element.

同様にして、上下動機構12お工ひ一軸テーブル9を駆
動することでエフ仄々とレーザダイオード素子の%註ヲ
検査することができる。
Similarly, by driving the single-axis table 9 using the vertical movement mechanism 12, it is possible to inspect the laser diode element with ease.

〔発明の効果〕〔Effect of the invention〕

本発明のレーザダイオード検査装置は、ハンドリング、
発光面の判別、表裏の判別、位置決めが素子単体九比べ
はるかに容易なバー状態で、扱うことができ、また−回
のセツティングで、多数個の素子の特注を次々と検査す
ることができるため、大幅に検査時間を短縮でき、また
検査精度の同上、素子の破損の減少等、効果が大きい。
The laser diode inspection device of the present invention includes handling,
It can be handled in a bar state, which makes it much easier to identify the light-emitting surface, front and back, and position it compared to a single element, and it is also possible to inspect a large number of custom-made elements one after another with just one setup. Therefore, the inspection time can be significantly shortened, and there are also significant effects such as improving inspection accuracy and reducing element damage.

さら(S造が簡単なため、安価な装置の製作が可能であ
るという効果もある。
Furthermore, since the S construction is simple, it is possible to manufacture the device at low cost.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図に本発明および従来のレーザダイオード検査装置
の検査対象となるレーザダイオードバーの一例を示す斜
視図、第2図に第1図に示すレーザダイオードバーを構
成するレーザダイオード素子の一個を示す斜視図、第3
図に本発明の一実施例を示す斜視図、第4図に第3図足
示す吸着ステージ部の一部断閤Mである。
Fig. 1 is a perspective view showing an example of a laser diode bar to be inspected by the present invention and the conventional laser diode inspection apparatus, and Fig. 2 shows one of the laser diode elements constituting the laser diode bar shown in Fig. 1. Perspective view, 3rd
FIG. 4 is a perspective view showing an embodiment of the present invention, and FIG. 4 is a partial cutout M of the suction stage section shown in FIG. 3.

Claims (1)

【特許請求の範囲】[Claims] 複数個のレーザダイオード素すが側圓でつながっている
レーザダイオードバーを−1の発光I1g]金外41!
l fC向は上面で吸着固定しレーザダイオードバーと
吸触する囲が良導体からなる吸着ステージと、前記吸着
ステージケ絶縁体ケ介して保持しかつ上下動可能な上下
動機構と、前記上下動機構を前記吸着固定したレーザダ
イオードバーの長手方向1c移動可能な一軸テーブルと
、前記吸着ステージが上昇した位置で前記吸着ステージ
の表口と吸着固定したレーザダイオードバー内の1素す
の上回電極部とにそh−ぞれ吸触可能な2本のグローブ
と、前記グローブの吸触したレーザダイオード素子の外
側ケ回いた発光(8)と対回しレーザ光を検出するセン
丈とを含むこと?1時徴とするレーザダイオード検査装
置。
A laser diode bar connected by a side circle of multiple laser diodes is -1 light emission I1g] Kanagai 41!
In the fC direction, there is a suction stage whose upper surface is suction-fixed and which is in contact with the laser diode bar and whose surround is made of a good conductor, a vertical movement mechanism that holds the suction stage through an insulator and can move up and down, and the vertical movement mechanism. a uniaxial table movable in the longitudinal direction 1c of the laser diode bar fixed by suction, and an upper electrode portion of one element in the laser diode bar fixed by suction with the front face of the suction stage at a position where the suction stage is raised. - Includes two gloves that can be respectively sucked, and a length that detects the light emitted from the outside of the laser diode element (8) that is sucked by the gloves, and the counterclockwise laser beam. Laser diode inspection equipment that detects the 1 o'clock signal.
JP12211483A 1983-07-05 1983-07-05 Laser diode inspecting device Granted JPS6014488A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12211483A JPS6014488A (en) 1983-07-05 1983-07-05 Laser diode inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12211483A JPS6014488A (en) 1983-07-05 1983-07-05 Laser diode inspecting device

Publications (2)

Publication Number Publication Date
JPS6014488A true JPS6014488A (en) 1985-01-25
JPH0144028B2 JPH0144028B2 (en) 1989-09-25

Family

ID=14827974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12211483A Granted JPS6014488A (en) 1983-07-05 1983-07-05 Laser diode inspecting device

Country Status (1)

Country Link
JP (1) JPS6014488A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61169775A (en) * 1985-01-22 1986-07-31 Fujitsu Ltd Semiconductor device measuring apparatus
KR100339005B1 (en) * 2000-02-11 2002-05-31 구자홍 Probe of Laser Diode
KR100371314B1 (en) * 2000-01-20 2003-02-07 엘지전자 주식회사 Inspection Apparatus and Method of Laser Diode
JP2005315719A (en) * 2004-04-28 2005-11-10 Arufakusu Kk Device test fixture

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5227378A (en) * 1975-08-27 1977-03-01 Hitachi Ltd Wafer test method
JPS5676545A (en) * 1979-11-26 1981-06-24 Hitachi Ltd Scanning electron microscope or the like

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5227378A (en) * 1975-08-27 1977-03-01 Hitachi Ltd Wafer test method
JPS5676545A (en) * 1979-11-26 1981-06-24 Hitachi Ltd Scanning electron microscope or the like

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61169775A (en) * 1985-01-22 1986-07-31 Fujitsu Ltd Semiconductor device measuring apparatus
JPH0350415B2 (en) * 1985-01-22 1991-08-01 Fujitsu Ltd
KR100371314B1 (en) * 2000-01-20 2003-02-07 엘지전자 주식회사 Inspection Apparatus and Method of Laser Diode
KR100339005B1 (en) * 2000-02-11 2002-05-31 구자홍 Probe of Laser Diode
JP2005315719A (en) * 2004-04-28 2005-11-10 Arufakusu Kk Device test fixture
JP4580186B2 (en) * 2004-04-28 2010-11-10 アルファクス株式会社 Device inspection jig

Also Published As

Publication number Publication date
JPH0144028B2 (en) 1989-09-25

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