JPS6014488A - Laser diode inspecting device - Google Patents

Abstract

PURPOSE:To efficiently inspect the characteristics of laser diode elements with excellent workability by a method wherein the titled inspecting device is constituted, involving a suction stage, a vertically movable mechanism, a single axle table, two probes and a sensor which detects laser beams. CONSTITUTION:A laser diode bar 7 is put on a suction stage 16 having suction holes in a state that the top electrodes of laser diode elements have been faced upwards and the bar 7 is attractingly fixed onto the stage 16. Then, a feed screw 11 is made to revolve by a driving source such as a motor, etc., and one element on the end of the laser diode bar 7 is made to transfer just below a probe 19a. Moreover, an actuator 14 is actuated, the suction stage 16 is made to rise, the probe 19a is made to contact with the top electrode of the one element on the end of the laser diode bar 7, and a probe 19b is made to contact with the top surface of the suction stage 16. At this time, current is flowed between the probe 19a and the probe 19b, the one element on the end of the laser diode bar 7 is made to luminescence, the emitted light is detected by a sensor 17 and the characteristics of the element is inspected. In the same way, the characteristics of laser diode elements are one after another inspected by making a vertically movable mechanism 12 and a single axle table 9 drive.

Description

[Detailed Description of the Invention] [Technical Field to Which the Invention Pertains] The present invention provides a laser diode inspection device, specialized for IJf! jt! + Laser diode inspection equipment for inspection.

[Common technology]

In general, a laser diode bar to be inspected by the laser diode inspection apparatus of the present invention and the conventional laser diode inspection apparatus has a structure in which laser diode elements l are coupled in a bar state as shown in FIG. That is, in the laser diode element 1,
As shown in detail in Figure 2, the upper @electrode 2 and the lower electrode 3
It has a sandwich shape with 1 layer and 2 layers on the top.
When an IC current is passed between the lower pole 1 and the lower pole 3, the generated source is amplified by the opposing reflection @4, and the laser source 8 is transferred from the light emitting region 5 to the laser source 8.
In such a laser diode, the wafer is fully opened to form a J:v reflective surface 4, so in many half-body scans /C is performed in the EVA state. There is no way to test each element every time.

[Prior art]

In conventional laser diode inspection equipment, after each laser diode element is completely separated, a worker picks up the electrodes of each element and custom-orders them. Inspection [7]

However, in such conventional laser diode testing equipment, the width is 0.2 mm and the length is 0.25 mm.

In order to handle very small laser diode elements with a thickness of approximately Q, l mm, it is difficult to handle the elements, distinguish the light-emitting surface, distinguish between the front and back sides, and position the elements, resulting in a very long inspection time and a decrease in inspection accuracy. It had many drawbacks, such as damage to the elements.

[Purpose of the invention]

The purpose of the present invention is to create a custom-made optical laser diode that is easy to work with and efficient, excluding the above-mentioned drawbacks of the conventional ones. It is an object of the present invention to provide a laser diode inspection device that can inspect laser diodes.

[Structure of the invention]

In the laser diode inspection device of the present invention, a laser diode in which a plurality of laser diode elements are connected on the side is rotated around the entire outer side of the light emitting surface of the laser diode, and is fixed by suction on the top surface and brought into contact with the laser diode hole. a suction stage consisting of four parts, a vertical movable mechanism that holds the suction stage via an insulator and is movable up and down, and a laser diode par to which the vertical movement mechanism is fixed by suction in the longitudinal direction v.
(c) A movable uniaxial table and a pole part at +111' above the 13th circle of the laser diode which is fixed by suction to the concave surface of the suction stage at the position where the suction stage is raised. The tube includes two possible probes and a seven-inch length that detects the laser beam and faces the source surrounding the outer part of the FC laser diode cable which absorbs the oil of the glove. .

[Explanation of Examples]

Next, an IC according to an embodiment of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a perspective view showing a laser diode device inspected by the VC of the present invention. A plurality of laser diode elements 1 are connected by side walls 6, and the reflection [y114 forms the longitudinal surface of the laser dimer bar 700]
Each element is separated from the upper electric rod 2, and the lower lTI
It is common to each element in the electric shock absorber 3.

FIG. 31 is a perspective view of a laser diode inspection apparatus showing an embodiment of the present invention, and FIG. 4 is a partial cross-sectional view of the suction table portion shown in FIG.

Feed screws 11/C, J connected to a power source such as a motor with a horizontal shaft as a guide; a vertical motor that can be moved up and down by an actuator 14E with the upper surface of the uniaxial table 9 movable and a vertical shaft 13 as a guide; Case 12
When the diode bar 7 is attached, the diode bar 7 is placed on the adsorption stage 16 made of a good conductor, and the diode bar 7
The laser diode par 7 is attached to the vertical movable unit 12 via an insulator 15 so that the longitudinal direction of the laser diode par 7 coincides with the feeding direction of the uniaxial table 9. ○ ′−! In addition, the side f-side of the suction stage 16, the reflective surface 4 which is the light emitting surface of the suctioned laser diode par 7.
A sensor 17 is arranged to face the laser beam and detect the entire laser beam.
ing. Further, a glow sensor 18b is disposed at a position facing the sensor 17 with the suction stage 16 in between, and the glove 19. When the suction stage 16 is raised, the tip of the l, 19b is placed above the top electrode 2 of one laser diode facing the sensor 7 and the top of the suction stage 16 so that it absorbs oil. It is placed.

Next, an example of the operation of the laser diode inspection apparatus shown in FIG. 3 tC will be described.

First, the concave electrode 2 is placed on the laser diode par 7, placed on the 4J&N stage 16 with the suction holes 20, and fixed by clamping.

Next, the feed screw 11 is rotated by a drive mechanism (not shown) such as a motor, and the laser diode is moved directly below the gold globe 19aI7) at the end of the laser diode part 7.

Furthermore, the actuator 14'ft is operated to raise the suction stage 16 and bring the globe 19a into contact with the upper electrode of one element at the end of the laser diode par 7,
Also, the probe 19b and the upper surface of the suction stage 16 are made to absorb oil.

Now, a current is passed between globe +92 and 19b,
One element at the end of the laser diode bar 7 is caused to emit light, and its output source is detected by all seven sensors 17 to inspect the customization of the element.

Similarly, by driving the single-axis table 9 using the vertical movement mechanism 12, it is possible to inspect the laser diode element with ease.

〔Effect of the invention〕

The laser diode inspection device of the present invention includes handling,
It can be handled in a bar state, which makes it much easier to identify the light-emitting surface, front and back, and position it compared to a single element, and it is also possible to inspect a large number of custom-made elements one after another with just one setup. Therefore, the inspection time can be significantly shortened, and there are also significant effects such as improving inspection accuracy and reducing element damage.

Furthermore, since the S construction is simple, it is possible to manufacture the device at low cost.

[Brief explanation of the drawing]

Fig. 1 is a perspective view showing an example of a laser diode bar to be inspected by the present invention and the conventional laser diode inspection apparatus, and Fig. 2 shows one of the laser diode elements constituting the laser diode bar shown in Fig. 1. Perspective view, 3rd
FIG. 4 is a perspective view showing an embodiment of the present invention, and FIG. 4 is a partial cutout M of the suction stage section shown in FIG. 3.

Claims (1)

[Claims] A laser diode bar connected by a side circle of multiple laser diodes is -1 light emission I1g] Kanagai 41!
In the fC direction, there is a suction stage whose upper surface is suction-fixed and which is in contact with the laser diode bar and whose surround is made of a good conductor, a vertical movement mechanism that holds the suction stage through an insulator and can move up and down, and the vertical movement mechanism. a uniaxial table movable in the longitudinal direction 1c of the laser diode bar fixed by suction, and an upper electrode portion of one element in the laser diode bar fixed by suction with the front face of the suction stage at a position where the suction stage is raised. - Includes two gloves that can be respectively sucked, and a length that detects the light emitted from the outside of the laser diode element (8) that is sucked by the gloves, and the counterclockwise laser beam. Laser diode inspection equipment that detects the 1 o'clock signal.