JP3614574B2 - Optical element inspection apparatus and optical element inspection method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an optical element inspection apparatus used when performing inspection on a large number of inspection target optical elements arranged in parallel, and an optical element inspection method performed using the optical element inspection apparatus.
[0002]
[Prior art]
Conventionally, in the manufacturing process of light-emitting elements and light-receiving elements, it is necessary to check the electro-optical characteristics of the light-emitting elements and light-receiving elements by inspection, but a large number of inspections arranged in parallel for each frame unit. Inspection of a target optical element, for example, a light emitting element, cannot be executed simultaneously with a light receiving element that is in a one-to-one relative relationship with each of the inspection target optical elements. Was the current situation.
[0003]
That is, when the light emitting elements as the inspection target optical elements arranged adjacent to each other are caused to emit light simultaneously, the light emitting elements other than the inspection target are emitted to the light receiving elements that are the inspection optical elements individually corresponding to the light emitting elements. Even light emitted from the element is incident, and as a result of receiving light interference from incident light from light emitting elements other than these inspection targets, inspection of light emitting elements individually supported by the light receiving element is executed. Becomes impossible. Further, when the optical element to be inspected is a light receiving element, it is impossible to execute the inspection with the light emitting element which is an inspection optical element individually corresponding to each of the light receiving elements, like the light emitting element. .
[0004]
Therefore, in order to improve such a current situation, a partition wall is provided between the inspection target optical elements arranged adjacent to each other, and the inspection target optical elements that are simultaneously driven by providing the partition correspond to each other. It is considered that only the optical element to be inspected is inspected with the inspection element. However, when the partition wall is provided, reflection by the wall surface of the partition wall occurs, and it is inevitable that the influence of the reflection affects the inspection result.
[0005]
Therefore, as a conventional form, in view of the above circumstances, one of these inspection target optical elements is arranged in spite of a large number of inspection target optical elements arranged in parallel for each frame unit. Each is sequentially inspected with a single inspection optical element, and in this case, it is common to use an optical element inspection apparatus having a configuration as shown in FIG. Hereinafter, a conventional optical element inspection method will be described with reference to FIG. In the following description, the inspection target optical element is a light emitting element and the inspection optical element is a light receiving element. However, the inspection target optical element is a light receiving element and the inspection optical element is a light source. Since the same applies to the case of a light emitting element, the description of such a case is omitted.
[0006]
As shown in FIG. 4, a light emitting element 41 which is an optical element to be inspected._{1 ~ n}Are, for example, a large number such as 50, which are arranged in parallel with respect to the lead frame 42 while being spaced apart at a constant pitch._{1 ~ n}The cathode terminal 41 a is connected to the lead frame 42, while the anode terminal 41 b is separated from the lead frame 42. And these light emitting elements 41_{1 ~ n}Is transported to a predetermined position in the optical element inspection apparatus by using a transport mechanism (not shown) together with the lead frame 42, and is positioned and supported.
[0007]
The optical element inspection apparatus includes an inspection unit 44 in which a single light receiving element 43 that is an inspection optical element is disposed, and a light emitting element 41 that is positioned and supported._{1 ~ n}Each of the cathode terminal 41a and the anode terminal 41b is provided with a contact unit 46 provided with a pair of contact pins 45 which are in contact with each other and are electrically connected. The inspection unit 44 holding the contact unit 46 has a light emitting element 41 with a pulse motor 48 connected through a ball screw 47._{1 ~ n}The light emitting elements 41 are separated by a distance corresponding to the distance between them._{1 ~ n}It moves intermittently along the parallel direction. Further, the optical element inspection apparatus at this time also includes a tester 49 for driving the inspection target optical element. Depending on the tester 49, the light emitting element 41 is passed through the contact pin 45._{1 ~ n}Each of these is made to emit light. Needless to say, the operation of each component constituting the optical element inspection apparatus here is comprehensively controlled by a microcomputer (not shown) functioning as a control means.
[0008]
Hereinafter, the light emitting element 41 by this optical element inspection apparatus_{1 ~ n}The inspection operation will be described. First, the light emitting element 41 arranged in parallel with the lead frame 42._{1 ~ n}Is transferred to a predetermined position of the optical element inspection apparatus together with the lead frame 42 and positioned and supported, the contact unit 46 operates, and the first one on the one end side (the left end side in FIG. 4) of the lead frame 42 Light emitting device 41 arranged in₁Each of the contact pins 45 is brought into contact with the cathode terminal 41a and the anode terminal 41b. The light emitting element 41 is then tested by the tester 49.₁Is caused to emit light, and the light emitting element 41₁The light-emitting element 41 with the light-receiving element 43 of the inspection unit 44 disposed at a position opposite to₁Is inspected.
[0009]
Next, the first light emitting element 41₁When the inspection is completed, the inspection unit 44 and the contact unit 46 are driven by the light emitting element 41 with the pulse motor 48._{1 ~ n}The light emitting element 41 is a distance corresponding to the spacing pitch between them._{1 ~ n}The inspection unit 44 and the contact unit 46 thus moved are moved along the parallel direction of the first and second light emitting elements 41 arranged on the one end side of the lead frame 42.₂It is made to face. Then, the contact unit 46 operates and the light emitting element 41 is operated.₂Each of the contact pins 45 is brought into contact with the cathode terminal 41a and the anode terminal 41b of the light emitting element 41, and then the light emitting element 41 emitted by the tester 49 is used.₂The inspection is executed by the light receiving element 43 of the inspection unit 44.
[0010]
Further, the nth light emitting element 41 is continuously repeated by repeating the same operation as described above._nAll the light emitting elements 41 are inspected._{1 ~ n}The lead frame 42 that has been inspected is conveyed by a conveyance mechanism (not shown) to a classification mechanism unit (not shown) that performs the next step.
[0011]
[Problems to be solved by the invention]
However, the conventional optical element inspection apparatus can inspect only one optical element (the light emitting element in the conventional example described above) one by one, which takes time and labor for the inspection. There existed a subject that it became a factor which causes the cost increase in manufacturing an optical element.
[0012]
[Means for Solving the Problems]
In the optical element inspection method according to claim 1 of the present invention, a plurality of inspection optical elements that inspect only a plurality of optical elements to be simultaneously driven among a plurality of inspection target optical elements arranged in parallel are inspected. These inspection optical elements are arranged in parallel to face the target optical element group, and these inspection optical elementsIs the arrangement pitch of the inspection target optical elements,Other than optical elements subject to inspectionDriven simultaneouslyNot subject to optical interference from the optical element to be inspectedMultiple placement pitchesSpaced apartOnly a plurality of inspection target optical elements individually corresponding to the plurality of inspection optical elements are driven simultaneously.It is characterized by that. The optical element inspection apparatus according to claim 2 is characterized in that the inspection target optical element is a light emitting element and the inspection optical element is a light receiving element, while the optical element inspection according to claim 3 is performed. The apparatus is characterized in that the optical element to be inspected is a light receiving element and the optical element for inspection is a light emitting element as a light source.
[0013]
An optical element inspection method according to claim 4 is:A plurality of inspection optical elements for inspecting only a plurality of optical elements to be simultaneously driven among a plurality of inspection target optical elements arranged in parallel individually are arranged in parallel to face the inspection target optical element group. In addition, these inspection optical elements are spaced apart at positions that do not receive optical interference from inspection target optical elements other than individually corresponding inspection target optical elements,A plurality of optical elements to be inspected are moved and driven, and each of the optical elements to be inspected that are simultaneously driven by a plurality of optical elements for inspection that are spaced apart are inspected individually, and then for inspection. The optical element group is moved along the parallel direction, and a plurality of inspection object blocking arranged at each position adjacent to each of the simultaneously driven inspection object optical elements are simultaneously driven, and a plurality of them are arranged apart from each other. Each of the inspection target element groups that are simultaneously driven by the inspection optical elements is repeatedly inspected individually.An optical element inspection method according to a fifth aspect is the optical element inspection method according to the fourth aspect, wherein the inspection target optical element is a light emitting element and the inspection optical element is a light receiving element. An optical element inspection method according to claim 6 is the optical element inspection method according to claim 4, wherein the inspection target optical element is a light receiving element, and the inspection optical element is a light emitting element serving as a light source. And An optical element inspection method according to a seventh aspect uses the optical element inspection apparatus according to any one of the fourth to sixth aspects.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0015]
First embodiment
FIG. 1 is a schematic perspective view showing the configuration of the optical element inspection apparatus according to the first embodiment of the present invention. This optical element inspection apparatus has a light emitting element 41 as in the conventional example._{1 ~ n}1 is the same as or similar to FIG. 4 (particularly, the light emitting element 41)._{1 ~ n}The same reference numerals as those in FIG._{1 ~ n}The detailed description about is omitted.
[0016]
The optical element inspection apparatus includes an inspection unit 1 and a contact unit 2. The inspection unit 1 includes a plurality of light receiving elements 3 which are inspection optical elements._{1 ~ m}Are arranged in a line at a predetermined interval. Light receiving element 3_{1 ~ m}The parallel interval α of, for example, the light emitting element 41_{1 ~ n}A pitch of 10 is appropriate. Light receiving element 3_{1 ~ m}The reason why the parallel interval α is set in this way will be described later.
[0017]
The contact unit 2 includes a plurality of sets of contact pins 4_{1 ~ m}Are in a row and the light receiving element 3_{1 ~ m}Are set up with the same parallel interval α. Each contact pin 4_{1 ~ m}Is composed of a pair of conductive pins, each of which is a light emitting element 41._{1 ~ n}The cathode terminal 41a and the anode terminal 41b are in contact with each other.
[0018]
The contact unit 2 and the inspection unit 1 are connected to each other by a connecting plate 5. Contact unit 2 and inspection unit 1 are contact pins 4_{1 ~ m}And light receiving element 3_{1 ~ m}And a certain interval (this interval is the light emitting element 41)._{1 ~ n}The contact pin parallel direction β.₁And light receiving element parallel direction β₂Are connected in parallel. Contact pin 4_{1 ~ m}And light receiving element 3_{1 ~ m}Is the parallel direction β₁, Β₂Are arranged at the same position along the contact pin 4_{1 ~ m}And light receiving element 3_{1 ~ m}Is the parallel direction β₁, Β₂It is arrange | positioned facing along the direction orthogonal to.
[0019]
The inspection unit 1 and the contact unit 2 are arranged in a parallel direction β by a ball screw 6 screwed into the inspection unit 1 and a pulse motor 7 that rotationally drives the ball screw 6.₂, Β₁A reciprocating linear movement is made along.
[0020]
In addition, this optical element inspection apparatus includes each contact pin 4_{1 ~ m}A tester 8 for supplying a test current to the tester, and an elevating mechanism 9 for repeatedly moving the test unit 1 and the contact unit 2 along the vertical direction in the figure. Of course, the operation of each component constituting the optical element inspection apparatus is comprehensively controlled by a microcomputer (not shown) functioning as a control means.
[0021]
Next, the light receiving element 3_{1 ~ m}Of the light emitting element 41_{1 ~ n}The reason why the formation pitch is set to a distance corresponding to 10 pitches will be described. In this optical element inspection apparatus, a plurality of light emitting elements 41 are simultaneously used._{1 ~ n}Is emitted, and the light is received by the light receiving element 3._{1 ~ m}It can be inspected with high accuracy. Therefore, the light emitting element 41 that has emitted light._{1 ~ n}Light emitting element 41 emitting light adjacent thereto_{1 ~ n}Light receiving element 3 inspecting_{1 ~ m}If the light is received, the inspection accuracy is lowered. Therefore, the light emitting element 41 emitting light adjacently._{1 ~ n}Each of the light receiving elements 3 to the extent that it does not receive the light interference of_{1 ~ m}It is necessary to increase the interval. For this reason, the light receiving element 3_{1 ~ m}The parallel interval α of the light emitting elements 41_{1 ~ n}The formation pitch is set to a distance corresponding to 10 pitches. Up to this distance, the light receiving element 3_{1 ~ m}When the two are separated from each other, the light emitting elements 41 emitting light adjacent to each other_{1 ~ n}You will not receive any optical interference.
[0022]
However, the light emitting element 41_{1 ~ n}The parallel interval α, which is 10 pitches, is merely an example, and the light emitting elements 41 emitting light adjacent to each other are merely examples._{1 ~ n}The parallel interval α may be set to any other distance as long as the optical interference is not received, and the present invention is not limited to the parallel interval α described above. Absent.
[0023]
Next, the operation and action of this optical element inspection apparatus will be described. First, the inspection unit 1 and the contact unit 2 are lowered to the standby position by the lifting mechanism 9, and then the light emitting elements 41 arranged in parallel with the lead frame 42._{1 ~ n}The lead frame 42 is transported to a predetermined position of the optical element inspection apparatus to be positioned and supported. The predetermined position here refers to the first light emitting element 41 arranged on the one end side (left end side in FIG. 1) of the lead frame 42.₁Contact pin 4 to cathode terminal 41a and anode terminal 41b₁Each of the conductive pins constituting the line is a position facing in the vertical direction in the figure.
[0024]
In this way, the light emitting element 41_{1 ~ n}After the positioning is completed, the inspection unit 1 and the contact unit 2 are raised to the inspection position by the lifting mechanism 9. Then, the light emitting elements 41 that are separated from each other by 10 pitches as the formation pitch.₁, 41₁₁, 41₂₁The contact pin 4 is connected to the cathode terminal 41a and the anode terminal 41b._{1 ~ m}Are in contact with each other.
[0025]
When such a conductive state is established, the constant pin 4 is tested by the tester 8._{1 ~ m}An inspection current is supplied to the light emitting element 41₁, 41₁₁, 41₂₁, ... are emitted. Then, the light emitting element 41₁, 41₁₁, 41₂₁,...,..._{1 ~ m}By the light emitting element 41₁, 41₁₁, 41₂₁, ... are inspected. At this time, the light emitting element 41 emitting light adjacently₁, 41₁₁, 41₂₁,... At a distance so as not to receive optical interference._{1 ~ m}(Specifically, the light emitting element 41_{1 ~ n}Light emitting element 41 that emits light adjacently.₁, 41₁₁, 41₂₁,... Is not received and the inspection accuracy is not lowered.
[0026]
Light emitting element 41₁, 41₁₁, 41₂₁When the inspection of... Is completed, the elevating mechanism 9 lowers the inspection unit 1 and the contact unit 2 to the standby position. Then, the inspection unit 1 and the contact unit 2 are connected to the light emitting element 41 with the pulse motor 7 and the board screw 6._{1 ~ n}The parallel direction β by a distance corresponding to 1 formation pitch of₁, Β₂And move to the back side in the figure. By this moving operation, the light receiving element 3_{1 ~ m}And contact pin 4_{1 ~ m}Is a light emitting element 41₂, 41₁₂, 41₂₂Move to a position opposite to.
[0027]
After the movement of the inspection unit 1 and the contact unit 2 is finished, the inspection unit 1 and the contact unit 2 are raised again to the inspection position by the lifting mechanism 9. Then, each contact pin 4_{1 ~ m}Includes a light emitting element 41.₂, 41_{1 2}, 41₂₂The cathode terminal 41a and the anode terminal 41b are brought into contact with each other and become conductive.
[0028]
When such a conductive state is established, the constant pin 4 is tested by the tester 8._{1 ~ m}An inspection current is supplied to the light emitting element 41₂, 41₁₂, 41₂₂, ... are emitted. Then, the light emitting element 41₂, 41₁₂, 41₂₂,...,..._{1 ~ m}By the light emitting element 41₂, 41₁₂, 41₂₂, ... are inspected.
[0029]
Further, the inspection operation similar to the above is repeated 10 times in total (the number of inspections is the light receiving element 3_{1 ~ m}Of the light emitting element 41_{1 ~ n}All the light emitting elements 41 are determined by the distance corresponding to 10 pitches of the formation pitch of_{1 ~ n}Perform the inspection. All light emitting elements 41_{1 ~ n}The lead frame 42 that has been inspected is conveyed by a conveyance mechanism (not shown) to a classification mechanism unit (not shown) that performs the next step.
[0030]
In the present embodiment, the light receiving element 3_{1 to m}Is used as the inspection optical element, and the light emitting element 41 is used._{1 to n}On the other hand,Light emitting elementIs provided in the inspection unit 1 as an inspection element,Light receiving elementThe inspection operation in this case can be performed in the same manner as described above.
[0031]
Second embodiment
FIG. 2 is a schematic perspective view showing the configuration of the optical element inspection apparatus according to the second embodiment of the present invention. This optical element inspection apparatus is similar to the first embodiment in the light emitting element 41._{1 ~ n}2 is the same or the same part as in FIG. 1 or FIG. 4 (particularly, the light emitting element 41)._{1 ~ n}1 is attached to the light emitting element 41._{1 ~ n}The detailed description about is omitted.
[0032]
The optical element inspection apparatus includes an inspection unit 20 and a contact unit 21. The inspection unit 20 includes a plurality of light receiving elements 22 which are inspection optical elements._{1 ~ m}Are arranged in a line at a predetermined interval. Light receiving element 22_{1 ~ m}The parallel interval α of the light emitting element 41 is the same as in the first embodiment._{1 ~ n}A distance corresponding to 10 pitches is appropriate. Light receiving element 22_{1 ~ m}The reason why the parallel interval α is set in this way is the same as that described in the first embodiment, and the description thereof will be omitted.
[0033]
The contact unit 21 includes a plurality of sets of contact pins 23._{1 ~ n}Are in a row and the light emitting element 41_{1 ~ n}It is erected at every formation pitch that is the same as the formation pitch. Each contact pin 23_{1 ~ n}Is composed of a pair of conductive pins, each of which is connected to each light emitting element 41._{1 ~ n}The cathode terminal 41a and the anode terminal 41b are in contact with each other.
[0034]
The contact unit 21 and the inspection unit 20 include contact pins 23_{1 ~ n}And light receiving element 22_{1 ~ m}And a certain interval (this interval is the light emitting element 41)._{1 ~ n}Contact pin parallel direction γ₁And light receiving element parallel direction γ₂Are arranged parallel to each other. Further, the contact pin 23_{1 ~ n}And light receiving element 22_{1 ~ m}Is the head position (contact pin 23₁And light receiving element 22₁And the contact pin 23 in the initial arrangement position.₁, 23₁₁, 23₂₁,...₁, 22₁₁, 22₂₁, ... means parallel direction γ₁, Γ₂Are disposed to face each other along a direction orthogonal to the.
[0035]
The inspection unit 20 is arranged in a parallel direction γ by a ball screw 24 screwed into the inspection unit 20 and a pulse motor 25 that rotationally drives the ball screw 24.₂Is reciprocated along the straight line. On the other hand, the contact unit 21 is repeatedly moved along the vertical direction in the drawing by the elevating mechanism 26.
[0036]
Each contact pin 23_{1 ~ n}A test current is supplied from the tester 27 to the tester 27 and each contact pin 23._{1 ~ n}Between the two, a relay boat 28 is interposed. The relay board 28 includes a tester 27 and a contact pin 23._{1 ~ n}Switching control is performed.
[0037]
In this embodiment as well, it is needless to say that the operation of each part constituting the optical element inspection apparatus is comprehensively controlled by a microcomputer (not shown) functioning as a control means.
[0038]
Next, the operation and action of this optical element inspection apparatus will be described. First, the elevating mechanism 26 lowers the contact unit 21 to the standby position, and then the light emitting elements 41 arranged in parallel with the lead frame 42._{1 ~ n}The lead frame 42 is transported to a predetermined position of the optical element inspection apparatus to be positioned and supported. The predetermined position here refers to the first light emitting element 41 arranged on the one end side (left end side in FIG. 1) of the lead frame 42.₁Contact pin 23 with respect to cathode terminal 41a and anode terminal 41b₁Each of the conductive pins constituting the line is a position facing the vertical direction in the figure.
[0039]
In this way, the light emitting element 41_{1 ~ n}After the positioning is completed, the contact unit 21 is raised to the inspection position by the lifting mechanism 26. Then, all the light emitting elements 41_{1 ~ n}The cathode terminal 41a and the anode terminal 41b are contact pins 23._{1 ~ n}Both are conductive when in contact. In such a conductive state, first, the contact pin 23 is relayed by the relay board 28.₁Starting with the light receiving element 22_{1 ~ m}Contact pin 23 for each formation pitch₁, 23₁₁, 23₂₁Are controlled to be connected to the tester 27.
[0040]
In this state, an inspection current is supplied from the tester 49 to the contact pin 23.₁, 23₁₁, 23₂₁,..., And the light emitting element 41₁, 41₁₁, 41₂₁, ... are emitted. Then, the light emitting element 41₁, 41₁₁, 41₂₁,...,._{1 ~ m}By the light emitting element 41₁, 41₁₁, 41₂₁, ... are inspected. At this time, the light emitting element 41 emitting light adjacently₁, 41₁₁, 41₂₁..,..._{1 ~ m}(Specifically, the light emitting element 41_{1 ~ n}The distance corresponding to 10 pitches), the light emitting element 41 emitting light adjacently₁, 41₁₁, 41₂₁,..._{1 ~ m}Does not reduce the inspection accuracy.
[0041]
Light emitting element 41₁, 41₁₁, 41₂₁When the inspection of... Is completed, the light emitting element 41 is obtained with the pulse motor 25 and the board screw 24._{1 ~ n}The parallel direction γ by the distance corresponding to the formation pitch of 1₂The inspection unit 20 is moved to the back side in the figure along the line. By this moving operation, the light receiving element 22_{1 ~ m}Is the parallel direction γ₂The light emitting element 41 along the direction orthogonal to₂, 41₁₂, 41₂₂Move to the position facing.
[0042]
After the movement of the inspection unit 20 is finished, the contact pin 23 is connected by the relay board 28.₂Starting with the light receiving element 22_{1 ~ m}Contact pin 23 for each formation pitch₂, 23₁₂, 23₂₂,... Are controlled to be connected to the tester 27. In this state, the tester 27 to the constant pin 23₂, 23₁₂, 23₂₂,... Are supplied with inspection current, and the light emitting element 41 is supplied.₂, 41₁₂, 41₂₂, ... are emitted. Then, the light emitting element 41₂, 41₁₂, 41₂₂,...,..._{1 ~ m}By the light emitting element 41₂, 41₁₂, 41₂₂, ... are inspected.
[0043]
Further, the inspection operation similar to that described above is repeated 10 times in total (the number of inspections is determined by the light receiving element 22)._{1 ~ m}Of the light emitting element 41_{1 ~ n}All the light emitting elements 41 are determined based on the formation pitch of 10)._{1 ~ n}Perform the inspection. All light emitting elements 41_{1 ~ n}The lead frame 42 that has been inspected is conveyed by a conveyance mechanism (not shown) to a classification mechanism unit (not shown) that performs the next step.
[0044]
As described above, the light emitting element 41_{1 ~ n}The general inspection procedure is as shown in FIG. In FIG. 3, the inspection procedure of the second embodiment is shown. However, in the inspection procedure of FIG. This is the inspection procedure of the first embodiment.
[0045]
In the present embodiment, the light receiving element 22 is also used._{1 to m}Is used as the inspection optical element, and the light emitting element 41 is used._{1 to n}On the other hand,Light emitting elementIs provided in the inspection unit 20 as an inspection element,Light receiving elementNeedless to say, the inspection operation in this case can be performed in the same manner as described above.
[0046]
【The invention's effect】
As described above, according to the present invention, a plurality of optical elements can be inspected at a time without causing optical interference with each other. Therefore, the inspection speed can be increased without reducing the inspection accuracy.
[Brief description of the drawings]
FIG. 1 is a schematic perspective view showing a configuration of an optical element inspection apparatus according to a first embodiment of the present invention.
FIG. 2 is a schematic perspective view showing a configuration of an optical element inspection apparatus according to a second embodiment of the present invention.
FIG. 3 is a diagram illustrating an inspection procedure of an optical element (light emitting element) using the optical element inspection apparatus according to the second embodiment.
FIG. 4 is a schematic perspective view showing a configuration of a conventional optical element inspection apparatus.
[Explanation of symbols]
1 Inspection unit 2 Contact unit
3_{1 ~ m}        Light receiving element 4_{1 ~ m}        Contact pin
21 Contact unit 22_{1 ~ m}        Light receiving element
23_{1 ~ n}      Contact pin

Claims (7)

A plurality of inspection optical elements for inspecting only a plurality of optical elements that are driven simultaneously among a plurality of optical elements to be inspected in parallel are arranged in parallel to face the inspection target optical element group. In addition, these inspection optical elements are not subjected to optical interference from simultaneously driven inspection target optical elements other than the inspection target optical elements individually corresponding to the arrangement pitch of the inspection target optical elements. An optical element inspection apparatus characterized in that only a plurality of inspection target optical elements that are spaced apart at a plurality of arrangement pitches and individually correspond to the plurality of inspection optical elements are simultaneously driven . The optical element inspection apparatus according to claim 1,
An optical element inspection apparatus, wherein the inspection target optical element is a light emitting element, and the inspection optical element is a light receiving element. The optical element inspection apparatus according to claim 1,
An optical element inspection apparatus, wherein the inspection target optical element is a light receiving element, and the inspection optical element is a light emitting element as a light source. A plurality of inspection optical elements for inspecting only a plurality of optical elements to be simultaneously driven among a plurality of inspection target optical elements arranged in parallel individually are arranged in parallel to face the inspection target optical element group. In addition, these inspection optical elements are spaced apart at positions that do not receive optical interference from inspection target optical elements other than individually corresponding inspection target optical elements,
A plurality of optical elements to be inspected are simultaneously driven, and each of the optical elements to be inspected that are simultaneously driven by a plurality of inspection optical elements that are spaced apart are individually inspected, and then used for inspection. The optical element group is moved along the parallel direction, and a plurality of inspection target elements arranged at positions adjacent to each of the simultaneously driven inspection target optical elements are simultaneously driven to be separated from each other. An optical element inspection method comprising repeatedly inspecting each of the inspection target element groups simultaneously driven by the inspection optical elements individually. The optical element inspection method according to claim 4,
An optical element inspection method, wherein the optical element to be inspected is a light emitting element, and the optical element for inspection is a light receiving element. The optical element inspection method according to claim 4,
An optical element inspection method, wherein the optical element to be inspected is a light receiving element, and the optical element for inspection is a light emitting element as a light source. An optical element inspection apparatus using the optical element inspection method according to claim 4.

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