JPS60141060U - 電子顕微鏡 - Google Patents

電子顕微鏡

Info

Publication number
JPS60141060U
JPS60141060U JP2901884U JP2901884U JPS60141060U JP S60141060 U JPS60141060 U JP S60141060U JP 2901884 U JP2901884 U JP 2901884U JP 2901884 U JP2901884 U JP 2901884U JP S60141060 U JPS60141060 U JP S60141060U
Authority
JP
Japan
Prior art keywords
deflection
deflector
electron beam
lens system
signal representing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2901884U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0238367Y2 (enExample
Inventor
平田　義弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP2901884U priority Critical patent/JPS60141060U/ja
Publication of JPS60141060U publication Critical patent/JPS60141060U/ja
Application granted granted Critical
Publication of JPH0238367Y2 publication Critical patent/JPH0238367Y2/ja
Granted legal-status Critical Current

Links

JP2901884U 1984-02-29 1984-02-29 電子顕微鏡 Granted JPS60141060U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2901884U JPS60141060U (ja) 1984-02-29 1984-02-29 電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2901884U JPS60141060U (ja) 1984-02-29 1984-02-29 電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS60141060U true JPS60141060U (ja) 1985-09-18
JPH0238367Y2 JPH0238367Y2 (enExample) 1990-10-16

Family

ID=30527444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2901884U Granted JPS60141060U (ja) 1984-02-29 1984-02-29 電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS60141060U (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5464991A (en) * 1977-11-02 1979-05-25 Furuno Electric Co Device for measuring radar target position

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5464991A (en) * 1977-11-02 1979-05-25 Furuno Electric Co Device for measuring radar target position

Also Published As

Publication number Publication date
JPH0238367Y2 (enExample) 1990-10-16

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