JPS60140035A - クリ−ンル−ム内の荷搬送設備 - Google Patents
クリ−ンル−ム内の荷搬送設備Info
- Publication number
- JPS60140035A JPS60140035A JP25162383A JP25162383A JPS60140035A JP S60140035 A JPS60140035 A JP S60140035A JP 25162383 A JP25162383 A JP 25162383A JP 25162383 A JP25162383 A JP 25162383A JP S60140035 A JPS60140035 A JP S60140035A
- Authority
- JP
- Japan
- Prior art keywords
- clean
- load
- clean room
- room
- station
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000428 dust Substances 0.000 abstract description 8
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 238000005192 partition Methods 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25162383A JPS60140035A (ja) | 1983-12-27 | 1983-12-27 | クリ−ンル−ム内の荷搬送設備 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25162383A JPS60140035A (ja) | 1983-12-27 | 1983-12-27 | クリ−ンル−ム内の荷搬送設備 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60140035A true JPS60140035A (ja) | 1985-07-24 |
| JPH0215443B2 JPH0215443B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-04-12 |
Family
ID=17225578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25162383A Granted JPS60140035A (ja) | 1983-12-27 | 1983-12-27 | クリ−ンル−ム内の荷搬送設備 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60140035A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6244806U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1985-09-09 | 1987-03-18 | ||
| JPS62122245U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1986-01-24 | 1987-08-03 | ||
| JPS62144208U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1986-02-28 | 1987-09-11 | ||
| JPS62200610U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1986-06-10 | 1987-12-21 | ||
| JPS6341004U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1986-09-02 | 1988-03-17 | ||
| JPS6348706U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1986-09-17 | 1988-04-02 | ||
| JPS6384012U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1986-11-20 | 1988-06-02 |
-
1983
- 1983-12-27 JP JP25162383A patent/JPS60140035A/ja active Granted
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6244806U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1985-09-09 | 1987-03-18 | ||
| JPS62122245U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1986-01-24 | 1987-08-03 | ||
| JPS62144208U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1986-02-28 | 1987-09-11 | ||
| JPS62200610U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1986-06-10 | 1987-12-21 | ||
| JPS6341004U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1986-09-02 | 1988-03-17 | ||
| JPS6348706U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1986-09-17 | 1988-04-02 | ||
| JPS6384012U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1986-11-20 | 1988-06-02 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0215443B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-04-12 |