JPS6013971U - Vapor phase growth equipment - Google Patents

Vapor phase growth equipment

Info

Publication number
JPS6013971U
JPS6013971U JP10605683U JP10605683U JPS6013971U JP S6013971 U JPS6013971 U JP S6013971U JP 10605683 U JP10605683 U JP 10605683U JP 10605683 U JP10605683 U JP 10605683U JP S6013971 U JPS6013971 U JP S6013971U
Authority
JP
Japan
Prior art keywords
vapor phase
growth equipment
phase growth
source container
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10605683U
Other languages
Japanese (ja)
Other versions
JPS6342137Y2 (en
Inventor
喜美 塩谷
井上　信市
田淵　明
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP10605683U priority Critical patent/JPS6013971U/en
Publication of JPS6013971U publication Critical patent/JPS6013971U/en
Application granted granted Critical
Publication of JPS6342137Y2 publication Critical patent/JPS6342137Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の気相成長装置の概略構成図、第２図は本
考案の一実施例の気相成長装置のソース容器の模式的概
略構成図である。 同図において２０はソース容器、２１はキャリヤガス導
入管、２２はキャリヤガス導入口、２３は反応ガス導出
管、２４は塩化モリブデン（ＭｏＣｌ３）の固体粉末を
示す。FIG. 1 is a schematic diagram of a conventional vapor phase growth apparatus, and FIG. 2 is a schematic diagram of a source container of a vapor phase growth apparatus according to an embodiment of the present invention. In the figure, 20 is a source container, 21 is a carrier gas inlet pipe, 22 is a carrier gas inlet, 23 is a reaction gas outlet pipe, and 24 is a solid powder of molybdenum chloride (MoCl3).

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 底面に複数のキャリヤガス導入管の導入口が配置された
ソース容器内に高融点金属化合物粉末を収容し、該ソー
ス容器からソースガスを噴出する構造を具備してなるこ
とを特徴とする気相成長装置。A gas phase characterized by having a structure in which a high melting point metal compound powder is housed in a source container in which a plurality of carrier gas inlet pipe inlets are arranged at the bottom, and a source gas is ejected from the source container. growth equipment.
JP10605683U 1983-07-07 1983-07-07 Vapor phase growth equipment Granted JPS6013971U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10605683U JPS6013971U (en) 1983-07-07 1983-07-07 Vapor phase growth equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10605683U JPS6013971U (en) 1983-07-07 1983-07-07 Vapor phase growth equipment

Publications (2)

Publication Number Publication Date
JPS6013971U true JPS6013971U (en) 1985-01-30
JPS6342137Y2 JPS6342137Y2 (en) 1988-11-04

Family

ID=30248347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10605683U Granted JPS6013971U (en) 1983-07-07 1983-07-07 Vapor phase growth equipment

Country Status (1)

Country Link
JP (1) JPS6013971U (en)

Also Published As

Publication number Publication date
JPS6342137Y2 (en) 1988-11-04

Similar Documents

Publication Publication Date Title
JPS6013971U (en) Vapor phase growth equipment
JPS5853234U (en) Vapor phase growth equipment
JPS59140435U (en) Vapor phase growth equipment
JPS58168575U (en) Metal-organic vapor phase epitaxy equipment
JPS59109777U (en) Raw material gas supply device
JPS59103770U (en) Thin film vapor phase growth equipment
JPS6057125U (en) Semiconductor vapor phase growth equipment
JPS6018541U (en) Vapor phase growth equipment
JPS6096820U (en) Vapor phase growth nozzle
JPS58166953U (en) Immersion nozzle for continuous casting
JPS5812941U (en) Susceptor for vapor phase growth equipment
JPS6139937U (en) Diffusion furnace type vapor phase growth equipment
JPS58141195U (en) Ceramic heat treatment jig
JPS59161557U (en) Container for cassette tape
JPS6091591U (en) Car carrier gas tight door
JPS59131148U (en) Vertical vapor phase growth apparatus
JPS605115U (en) Vapor phase growth equipment
JPS5984837U (en) Vapor phase growth equipment
JPS5988912U (en) Hanging antenna for portable transceiver
JPS58145131U (en) Partition pot
JPS59182932U (en) Wafer transfer device
JPS5854300U (en) iron storage case
JPS58103870U (en) Scalloped seine chain
JPS59115638U (en) Source board for vapor phase growth
JPS58151441U (en) reaction tube