JPS59109777U - Raw material gas supply device - Google Patents
Raw material gas supply deviceInfo
- Publication number
- JPS59109777U JPS59109777U JP259583U JP259583U JPS59109777U JP S59109777 U JPS59109777 U JP S59109777U JP 259583 U JP259583 U JP 259583U JP 259583 U JP259583 U JP 259583U JP S59109777 U JPS59109777 U JP S59109777U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- material gas
- gas supply
- supply device
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は気相反応装置の例を示す縦断面図である。第２
図は従来型の原料ガス供給ノズルの例を□示す縦断面図
である。第３図イ９口は本考案の実施例における原料ガ
ス供給ノズルを示す図で、イ図は縦断面図、０図は横断
面図である。
１・・・気相反応室、２・・・原料供給部、３・・・反
応部、６７・・・導入パイプ、８・−・Ａ
原料（金属）、９． １０． １３． １４． １７・
・・原料ガス供給ノズル、１１・・・基板、１２・・・
ＡＢ化合物、１５・・・矢印、１６−・・・４１合物、
１８・・・内管、１９・・・外管。FIG. 1 is a longitudinal sectional view showing an example of a gas phase reactor. Second
The figure is a vertical cross-sectional view showing an example of a conventional raw material gas supply nozzle. Figure 3A9 is a diagram showing a raw material gas supply nozzle in an embodiment of the present invention, where Figure A is a longitudinal cross-sectional view and Figure 0 is a cross-sectional view. DESCRIPTION OF SYMBOLS 1... Gas phase reaction chamber, 2... Raw material supply part, 3... Reaction part, 67... Introducing pipe, 8... A Raw material (metal), 9. 10. 13. 14. 17・
... Raw material gas supply nozzle, 11... Substrate, 12...
AB compound, 15...arrow, 16-...41 compound,
18...Inner tube, 19...Outer tube.
Claims (1)
るための原料ガス供給装置において、原料ガス供給ノズ
ルが、前記原料ガスを流す内管ど、その周りの不活性ガ
スを流す外管とから成る２重パイプより成ることを特徴
とする原料ガス供給装置。In a raw material gas supply device for supplying two or more kinds of raw material gases to a reaction chamber in a gas phase reactor, a raw material gas supply nozzle has an inner pipe through which the raw material gas flows, and an outer pipe around which an inert gas flows. A raw material gas supply device characterized by comprising a double pipe consisting of a pipe and a pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP259583U JPS59109777U (en) | 1983-01-11 | 1983-01-11 | Raw material gas supply device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP259583U JPS59109777U (en) | 1983-01-11 | 1983-01-11 | Raw material gas supply device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59109777U true JPS59109777U (en) | 1984-07-24 |
Family
ID=30134253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP259583U Pending JPS59109777U (en) | 1983-01-11 | 1983-01-11 | Raw material gas supply device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59109777U (en) |
-
1983
- 1983-01-11 JP JP259583U patent/JPS59109777U/en active Pending
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