JPS58155364U - Jig for manufacturing hollow bodies using chemical vapor deposition method - Google Patents
Jig for manufacturing hollow bodies using chemical vapor deposition methodInfo
- Publication number
- JPS58155364U JPS58155364U JP5152082U JP5152082U JPS58155364U JP S58155364 U JPS58155364 U JP S58155364U JP 5152082 U JP5152082 U JP 5152082U JP 5152082 U JP5152082 U JP 5152082U JP S58155364 U JPS58155364 U JP S58155364U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- jig
- chemical vapor
- deposition method
- base material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案にかかる治具の１部所面側面図、第２図
は使用法の説明図、第３図は異なる実施例をあられすａ
平面図、およびｂ側面図である。図はいずれも実施例を
あられす。
１・・・・・・蒸着基材、２・・・・・・取付具、３・
・・・・・スペーサ、４・・・・・・鍔状体、５・・・
・・・支持棒、７・・・・・・反応容器、８・・・・・
・反応ガス、１０・・・・・・加熱炉。Figure 1 is a side view of part of the jig according to the present invention, Figure 2 is an explanatory diagram of how to use it, and Figure 3 shows a different embodiment.
They are a top view and a side view. All figures show examples. 1... Vapor deposition base material, 2... Fixture, 3.
... Spacer, 4 ... Flange-shaped body, 5 ...
...Support rod, 7...Reaction container, 8...
・Reaction gas, 10... Heating furnace.
Claims (2)
蒸着基材を反応ガス気流中に保持するための治具であっ
て、上記蒸着基材が着脱自在に装着される取付具と、こ
の取付具に装着される蒸着基材よりも大きな外径をもち
、該蒸着基材との間に間隔をおいて下流側に配設される
鍔状体とをそなえ、該鍔状体の蒸着基材側表面の少なく
とも外周部は、外周側が蒸着基材から離れるような傾斜
面として形成されていることを特徴とする化学蒸着法に
よる中空体製造用治具。(1) A jig for holding a vapor deposition substrate on the surface of which a vapor deposition layer is formed by a chemical vapor deposition method in a reaction gas flow, which includes a fixture to which the vapor deposition substrate is detachably attached; A flanged body having a larger outer diameter than the vapor deposition base material attached to the fixture and disposed on the downstream side with a space between the flanged body and the vapor deposition base material. 1. A jig for producing a hollow body by a chemical vapor deposition method, characterized in that at least an outer peripheral portion of the material side surface is formed as an inclined surface such that the outer peripheral side is separated from the vapor deposition base material.
下部よりも外側から始まっている実用新案登録請求の範
囲第１項記載の化学蒸着法による中空体製造用治具。(2) A jig for manufacturing a hollow body by a chemical vapor deposition method according to claim 1, wherein the inclined surface of the brim-like body starts outside just below the outer periphery of the vapor deposition base material to which it is attached.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5152082U JPS58155364U (en) | 1982-04-08 | 1982-04-08 | Jig for manufacturing hollow bodies using chemical vapor deposition method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5152082U JPS58155364U (en) | 1982-04-08 | 1982-04-08 | Jig for manufacturing hollow bodies using chemical vapor deposition method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58155364U true JPS58155364U (en) | 1983-10-17 |
Family
ID=30062228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5152082U Pending JPS58155364U (en) | 1982-04-08 | 1982-04-08 | Jig for manufacturing hollow bodies using chemical vapor deposition method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58155364U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58128986U (en) * | 1982-02-25 | 1983-09-01 | 株式会社豊田自動織機製作所 | Weft inserting device in jet loom |
-
1982
- 1982-04-08 JP JP5152082U patent/JPS58155364U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58128986U (en) * | 1982-02-25 | 1983-09-01 | 株式会社豊田自動織機製作所 | Weft inserting device in jet loom |
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