JPS60137481A - 洗浄方法及び装置 - Google Patents
洗浄方法及び装置Info
- Publication number
- JPS60137481A JPS60137481A JP25071283A JP25071283A JPS60137481A JP S60137481 A JPS60137481 A JP S60137481A JP 25071283 A JP25071283 A JP 25071283A JP 25071283 A JP25071283 A JP 25071283A JP S60137481 A JPS60137481 A JP S60137481A
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- cleaning solvent
- liquid
- cleaned
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 12
- 238000005406 washing Methods 0.000 title description 2
- 238000004140 cleaning Methods 0.000 claims description 128
- 239000002904 solvent Substances 0.000 claims description 74
- 239000007788 liquid Substances 0.000 claims description 45
- 238000009835 boiling Methods 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 10
- 230000006835 compression Effects 0.000 claims description 7
- 238000007906 compression Methods 0.000 claims description 7
- 238000002347 injection Methods 0.000 claims description 4
- 239000007924 injection Substances 0.000 claims description 4
- 238000005507 spraying Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 description 11
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 5
- 239000007921 spray Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 239000000243 solution Substances 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- 241000270295 Serpentes Species 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25071283A JPS60137481A (ja) | 1983-12-25 | 1983-12-25 | 洗浄方法及び装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25071283A JPS60137481A (ja) | 1983-12-25 | 1983-12-25 | 洗浄方法及び装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60137481A true JPS60137481A (ja) | 1985-07-22 |
| JPH0249794B2 JPH0249794B2 (enrdf_load_stackoverflow) | 1990-10-31 |
Family
ID=17211926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25071283A Granted JPS60137481A (ja) | 1983-12-25 | 1983-12-25 | 洗浄方法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60137481A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012030173A (ja) * | 2010-07-30 | 2012-02-16 | Denso Corp | 洗浄乾燥方法及び洗浄乾燥装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5218594U (enrdf_load_stackoverflow) * | 1975-07-28 | 1977-02-09 | ||
| JPS5546936A (en) * | 1978-09-06 | 1980-04-02 | Ekstroem H A B & Co | Mandrel that can be expanded |
| JPS588378U (ja) * | 1981-07-07 | 1983-01-19 | 内田 千年 | ２個の小物用収納袋にも転用できる着脱自在の防寒用襟及保温器用入部を兼備せる掛蒲団カバ− |
-
1983
- 1983-12-25 JP JP25071283A patent/JPS60137481A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5218594U (enrdf_load_stackoverflow) * | 1975-07-28 | 1977-02-09 | ||
| JPS5546936A (en) * | 1978-09-06 | 1980-04-02 | Ekstroem H A B & Co | Mandrel that can be expanded |
| JPS588378U (ja) * | 1981-07-07 | 1983-01-19 | 内田 千年 | ２個の小物用収納袋にも転用できる着脱自在の防寒用襟及保温器用入部を兼備せる掛蒲団カバ− |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012030173A (ja) * | 2010-07-30 | 2012-02-16 | Denso Corp | 洗浄乾燥方法及び洗浄乾燥装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0249794B2 (enrdf_load_stackoverflow) | 1990-10-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0648548B1 (en) | Cleaning method and cleaning apparatus | |
| JPH03503975A (ja) | 表面および液体の洗浄方法 | |
| US7267727B2 (en) | Processing of semiconductor components with dense processing fluids and ultrasonic energy | |
| US20040055621A1 (en) | Processing of semiconductor components with dense processing fluids and ultrasonic energy | |
| US5653820A (en) | Method for cleaning metal articles and removing water from metal articles | |
| EP0578824A1 (en) | CONTINUOUS ULTRASONIC CLEANER. | |
| US6118511A (en) | Manufacturing method of liquid crystal display panel and cleaning apparatus for use therein | |
| US20080004194A1 (en) | Processing of semiconductor components with dense processing fluids | |
| US20080000505A1 (en) | Processing of semiconductor components with dense processing fluids | |
| JPH01130771A (ja) | 基板洗浄法及び基板洗浄装置 | |
| JPH07159980A (ja) | 基板洗浄装置 | |
| US20040016442A1 (en) | Megasonically energized liquid interface apparatus and method | |
| JPS60137481A (ja) | 洗浄方法及び装置 | |
| JPS6012187A (ja) | 洗浄方法及び装置 | |
| KR100586582B1 (ko) | 유리표면 처리장치 | |
| JPH02246115A (ja) | 精密洗浄方法およびそれに用いる洗浄液ならびに乾燥方法 | |
| JPS6087885A (ja) | 洗浄方法及び装置 | |
| JP3049377B2 (ja) | 金属材料の脱脂洗浄装置 | |
| JPS60257140A (ja) | 高圧ジエツト洗浄方法とその装置 | |
| JPS63194787A (ja) | 洗浄方法及び装置 | |
| JP2767165B2 (ja) | ウエーハ洗浄槽 | |
| JPS6353873B2 (enrdf_load_stackoverflow) | ||
| JP3357037B2 (ja) | 半導体基板の洗浄方法 | |
| JP3184672B2 (ja) | 金属品洗浄方法及び金属品洗浄装置 | |
| JP4228721B2 (ja) | 水切り乾燥装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |