JPS60136202A - 薄膜サ−ミスタ - Google Patents

薄膜サ−ミスタ

Info

Publication number
JPS60136202A
JPS60136202A JP58246037A JP24603783A JPS60136202A JP S60136202 A JPS60136202 A JP S60136202A JP 58246037 A JP58246037 A JP 58246037A JP 24603783 A JP24603783 A JP 24603783A JP S60136202 A JPS60136202 A JP S60136202A
Authority
JP
Japan
Prior art keywords
film
thin film
thermistor
water
film thermistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58246037A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0342485B2 (en, 2012
Inventor
彪 長井
一志 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58246037A priority Critical patent/JPS60136202A/ja
Publication of JPS60136202A publication Critical patent/JPS60136202A/ja
Publication of JPH0342485B2 publication Critical patent/JPH0342485B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thermistors And Varistors (AREA)
JP58246037A 1983-12-23 1983-12-23 薄膜サ−ミスタ Granted JPS60136202A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58246037A JPS60136202A (ja) 1983-12-23 1983-12-23 薄膜サ−ミスタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58246037A JPS60136202A (ja) 1983-12-23 1983-12-23 薄膜サ−ミスタ

Publications (2)

Publication Number Publication Date
JPS60136202A true JPS60136202A (ja) 1985-07-19
JPH0342485B2 JPH0342485B2 (en, 2012) 1991-06-27

Family

ID=17142510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58246037A Granted JPS60136202A (ja) 1983-12-23 1983-12-23 薄膜サ−ミスタ

Country Status (1)

Country Link
JP (1) JPS60136202A (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021065541A1 (ja) * 2019-10-03 2021-04-08 株式会社芝浦電子 温度センサ素子および温度センサ素子の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021065541A1 (ja) * 2019-10-03 2021-04-08 株式会社芝浦電子 温度センサ素子および温度センサ素子の製造方法
JPWO2021065541A1 (ja) * 2019-10-03 2021-11-11 株式会社芝浦電子 温度センサ素子および温度センサ素子の製造方法

Also Published As

Publication number Publication date
JPH0342485B2 (en, 2012) 1991-06-27

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