JPS60135808A - 欠陥検査装置 - Google Patents

欠陥検査装置

Info

Publication number
JPS60135808A
JPS60135808A JP24428883A JP24428883A JPS60135808A JP S60135808 A JPS60135808 A JP S60135808A JP 24428883 A JP24428883 A JP 24428883A JP 24428883 A JP24428883 A JP 24428883A JP S60135808 A JPS60135808 A JP S60135808A
Authority
JP
Japan
Prior art keywords
objective lens
light
regular pattern
frequency filter
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24428883A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0340802B2 (en:Method
Inventor
Susumu Saito
晋 斉藤
Hideo Kiyouda
供田　英夫
Takashi Yokokura
横倉　隆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Optical Co Ltd
Original Assignee
Tokyo Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Optical Co Ltd filed Critical Tokyo Optical Co Ltd
Priority to JP24428883A priority Critical patent/JPS60135808A/ja
Publication of JPS60135808A publication Critical patent/JPS60135808A/ja
Publication of JPH0340802B2 publication Critical patent/JPH0340802B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP24428883A 1983-12-26 1983-12-26 欠陥検査装置 Granted JPS60135808A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24428883A JPS60135808A (ja) 1983-12-26 1983-12-26 欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24428883A JPS60135808A (ja) 1983-12-26 1983-12-26 欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS60135808A true JPS60135808A (ja) 1985-07-19
JPH0340802B2 JPH0340802B2 (en:Method) 1991-06-20

Family

ID=17116507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24428883A Granted JPS60135808A (ja) 1983-12-26 1983-12-26 欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS60135808A (en:Method)

Also Published As

Publication number Publication date
JPH0340802B2 (en:Method) 1991-06-20

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