JPH0340802B2 - - Google Patents
Info
- Publication number
- JPH0340802B2 JPH0340802B2 JP24428883A JP24428883A JPH0340802B2 JP H0340802 B2 JPH0340802 B2 JP H0340802B2 JP 24428883 A JP24428883 A JP 24428883A JP 24428883 A JP24428883 A JP 24428883A JP H0340802 B2 JPH0340802 B2 JP H0340802B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- objective lens
- spatial frequency
- frequency filter
- regular pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007547 defect Effects 0.000 claims description 65
- 230000003287 optical effect Effects 0.000 claims description 29
- 238000007689 inspection Methods 0.000 claims description 26
- 239000013307 optical fiber Substances 0.000 claims description 23
- 230000001427 coherent effect Effects 0.000 claims description 14
- 239000004065 semiconductor Substances 0.000 claims description 12
- 238000012360 testing method Methods 0.000 claims description 4
- 238000005286 illumination Methods 0.000 description 22
- 230000002950 deficient Effects 0.000 description 15
- 238000010586 diagram Methods 0.000 description 15
- 230000005540 biological transmission Effects 0.000 description 8
- 238000003384 imaging method Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000000737 periodic effect Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24428883A JPS60135808A (ja) | 1983-12-26 | 1983-12-26 | 欠陥検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24428883A JPS60135808A (ja) | 1983-12-26 | 1983-12-26 | 欠陥検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60135808A JPS60135808A (ja) | 1985-07-19 |
| JPH0340802B2 true JPH0340802B2 (en:Method) | 1991-06-20 |
Family
ID=17116507
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24428883A Granted JPS60135808A (ja) | 1983-12-26 | 1983-12-26 | 欠陥検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60135808A (en:Method) |
-
1983
- 1983-12-26 JP JP24428883A patent/JPS60135808A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60135808A (ja) | 1985-07-19 |
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