JPS60130842A - 誘電体分離基板の製造方法 - Google Patents

誘電体分離基板の製造方法

Info

Publication number
JPS60130842A
JPS60130842A JP58240039A JP24003983A JPS60130842A JP S60130842 A JPS60130842 A JP S60130842A JP 58240039 A JP58240039 A JP 58240039A JP 24003983 A JP24003983 A JP 24003983A JP S60130842 A JPS60130842 A JP S60130842A
Authority
JP
Japan
Prior art keywords
substrate
silicon
porous
single crystal
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58240039A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6343888B2 (OSRAM
Inventor
Akinobu Satou
佐藤　倬暢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toko Inc
Original Assignee
Toko Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toko Inc filed Critical Toko Inc
Priority to JP58240039A priority Critical patent/JPS60130842A/ja
Publication of JPS60130842A publication Critical patent/JPS60130842A/ja
Publication of JPS6343888B2 publication Critical patent/JPS6343888B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/00—
    • H10W10/01—

Landscapes

  • Element Separation (AREA)
JP58240039A 1983-12-20 1983-12-20 誘電体分離基板の製造方法 Granted JPS60130842A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58240039A JPS60130842A (ja) 1983-12-20 1983-12-20 誘電体分離基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58240039A JPS60130842A (ja) 1983-12-20 1983-12-20 誘電体分離基板の製造方法

Publications (2)

Publication Number Publication Date
JPS60130842A true JPS60130842A (ja) 1985-07-12
JPS6343888B2 JPS6343888B2 (OSRAM) 1988-09-01

Family

ID=17053558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58240039A Granted JPS60130842A (ja) 1983-12-20 1983-12-20 誘電体分離基板の製造方法

Country Status (1)

Country Link
JP (1) JPS60130842A (OSRAM)

Also Published As

Publication number Publication date
JPS6343888B2 (OSRAM) 1988-09-01

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