JPS60127932A - Ｘｙステ−ジ - Google Patents

Ｘｙステ−ジ

Info

Publication number
JPS60127932A
JPS60127932A JP23589683A JP23589683A JPS60127932A JP S60127932 A JPS60127932 A JP S60127932A JP 23589683 A JP23589683 A JP 23589683A JP 23589683 A JP23589683 A JP 23589683A JP S60127932 A JPS60127932 A JP S60127932A
Authority
JP
Japan
Prior art keywords
guide
stage
movable guide
base
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23589683A
Other languages
English (en)
Japanese (ja)
Other versions
JPH05166B2 (enrdf_load_stackoverflow
Inventor
Sadao Sugiyama
定夫 杉山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Tateisi Electronics Co
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tateisi Electronics Co, Omron Tateisi Electronics Co filed Critical Tateisi Electronics Co
Priority to JP23589683A priority Critical patent/JPS60127932A/ja
Publication of JPS60127932A publication Critical patent/JPS60127932A/ja
Publication of JPH05166B2 publication Critical patent/JPH05166B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
JP23589683A 1983-12-13 1983-12-13 Ｘｙステ−ジ Granted JPS60127932A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23589683A JPS60127932A (ja) 1983-12-13 1983-12-13 Ｘｙステ−ジ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23589683A JPS60127932A (ja) 1983-12-13 1983-12-13 Ｘｙステ−ジ

Publications (2)

Publication Number Publication Date
JPS60127932A true JPS60127932A (ja) 1985-07-08
JPH05166B2 JPH05166B2 (enrdf_load_stackoverflow) 1993-01-05

Family

ID=16992842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23589683A Granted JPS60127932A (ja) 1983-12-13 1983-12-13 Ｘｙステ−ジ

Country Status (1)

Country Link
JP (1) JPS60127932A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6258133U (enrdf_load_stackoverflow) * 1985-09-30 1987-04-10
JPH01188241A (ja) * 1988-01-22 1989-07-27 Canon Inc 移動案内装置
JPH05277862A (ja) * 1991-06-26 1993-10-26 Sony Corp 直交二方向移動テーブル装置
JPH08318439A (ja) * 1996-06-17 1996-12-03 Canon Inc 移動案内装置
JP2007175841A (ja) * 2005-12-28 2007-07-12 Sumitomo Heavy Ind Ltd ステージ装置
JP2010110860A (ja) * 2008-11-06 2010-05-20 Oiles Ind Co Ltd 平面移動ステージ装置
JP2016100531A (ja) * 2014-11-25 2016-05-30 日本精工株式会社 テーブル装置、位置決め装置、フラットパネルディスプレイ製造装置、及び精密機械

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6258133U (enrdf_load_stackoverflow) * 1985-09-30 1987-04-10
JPH01188241A (ja) * 1988-01-22 1989-07-27 Canon Inc 移動案内装置
JPH05277862A (ja) * 1991-06-26 1993-10-26 Sony Corp 直交二方向移動テーブル装置
JPH08318439A (ja) * 1996-06-17 1996-12-03 Canon Inc 移動案内装置
JP2007175841A (ja) * 2005-12-28 2007-07-12 Sumitomo Heavy Ind Ltd ステージ装置
JP2010110860A (ja) * 2008-11-06 2010-05-20 Oiles Ind Co Ltd 平面移動ステージ装置
JP2016100531A (ja) * 2014-11-25 2016-05-30 日本精工株式会社 テーブル装置、位置決め装置、フラットパネルディスプレイ製造装置、及び精密機械

Also Published As

Publication number Publication date
JPH05166B2 (enrdf_load_stackoverflow) 1993-01-05

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