JPS60125367A - 薄膜蒸着装置 - Google Patents

薄膜蒸着装置

Info

Publication number
JPS60125367A
JPS60125367A JP23556183A JP23556183A JPS60125367A JP S60125367 A JPS60125367 A JP S60125367A JP 23556183 A JP23556183 A JP 23556183A JP 23556183 A JP23556183 A JP 23556183A JP S60125367 A JPS60125367 A JP S60125367A
Authority
JP
Japan
Prior art keywords
substrate
clusters
vapor
crucible
cluster
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23556183A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0352533B2 (OSRAM
Inventor
Kenichiro Yamanishi
山西　健一郎
Akira Nushihara
主原　昭
Yoshifumi Minowa
美濃和　芳文
Sanjiyu Ko
広　三寿
Masahiro Hanai
正博 花井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP23556183A priority Critical patent/JPS60125367A/ja
Publication of JPS60125367A publication Critical patent/JPS60125367A/ja
Publication of JPH0352533B2 publication Critical patent/JPH0352533B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/221—Ion beam deposition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP23556183A 1983-12-12 1983-12-12 薄膜蒸着装置 Granted JPS60125367A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23556183A JPS60125367A (ja) 1983-12-12 1983-12-12 薄膜蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23556183A JPS60125367A (ja) 1983-12-12 1983-12-12 薄膜蒸着装置

Publications (2)

Publication Number Publication Date
JPS60125367A true JPS60125367A (ja) 1985-07-04
JPH0352533B2 JPH0352533B2 (OSRAM) 1991-08-12

Family

ID=16987808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23556183A Granted JPS60125367A (ja) 1983-12-12 1983-12-12 薄膜蒸着装置

Country Status (1)

Country Link
JP (1) JPS60125367A (OSRAM)

Also Published As

Publication number Publication date
JPH0352533B2 (OSRAM) 1991-08-12

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