JPS60124111A - 表面弾性波素子 - Google Patents
表面弾性波素子Info
- Publication number
- JPS60124111A JPS60124111A JP23244483A JP23244483A JPS60124111A JP S60124111 A JPS60124111 A JP S60124111A JP 23244483 A JP23244483 A JP 23244483A JP 23244483 A JP23244483 A JP 23244483A JP S60124111 A JPS60124111 A JP S60124111A
- Authority
- JP
- Japan
- Prior art keywords
- acoustic wave
- surface acoustic
- film
- silicon substrate
- wave device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 40
- 239000000758 substrate Substances 0.000 claims abstract description 37
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 29
- 239000010703 silicon Substances 0.000 claims abstract description 29
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 26
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 20
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 20
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 42
- 238000010897 surface acoustic wave method Methods 0.000 claims description 32
- 239000011787 zinc oxide Substances 0.000 claims description 20
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 4
- 239000011701 zinc Substances 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 230000008878 coupling Effects 0.000 abstract description 7
- 238000010168 coupling process Methods 0.000 abstract description 7
- 238000005859 coupling reaction Methods 0.000 abstract description 7
- 230000000644 propagated effect Effects 0.000 abstract description 2
- 229910052681 coesite Inorganic materials 0.000 abstract 4
- 229910052906 cristobalite Inorganic materials 0.000 abstract 4
- 229910052682 stishovite Inorganic materials 0.000 abstract 4
- 229910052905 tridymite Inorganic materials 0.000 abstract 4
- 229920001296 polysiloxane Polymers 0.000 abstract 2
- 239000010408 film Substances 0.000 description 48
- 238000005516 engineering process Methods 0.000 description 4
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 150000003376 silicon Chemical class 0.000 description 3
- 241000981595 Zoysia japonica Species 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 240000005109 Cryptomeria japonica Species 0.000 description 1
- IBXOPEGTOZQGQO-UHFFFAOYSA-N [Li].[Nb] Chemical compound [Li].[Nb] IBXOPEGTOZQGQO-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- HFLAMWCKUFHSAZ-UHFFFAOYSA-N niobium dioxide Inorganic materials O=[Nb]=O HFLAMWCKUFHSAZ-UHFFFAOYSA-N 0.000 description 1
- 230000009022 nonlinear effect Effects 0.000 description 1
- 239000006187 pill Substances 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000010079 rubber tapping Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23244483A JPS60124111A (ja) | 1983-12-09 | 1983-12-09 | 表面弾性波素子 |
| US06/677,712 US4567392A (en) | 1983-12-09 | 1984-12-04 | Sezawa surface-acoustic-wave device using ZnO(0001)/SiO2 / Si(100)(011) |
| GB08430699A GB2152315B (en) | 1983-12-09 | 1984-12-05 | Surface acoustic wave device |
| DE3444749A DE3444749C2 (de) | 1983-12-09 | 1984-12-07 | Akustische Oberflächenwellen ausbildendes Bauelement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23244483A JPS60124111A (ja) | 1983-12-09 | 1983-12-09 | 表面弾性波素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60124111A true JPS60124111A (ja) | 1985-07-03 |
| JPH0311685B2 JPH0311685B2 (en, 2012) | 1991-02-18 |
Family
ID=16939365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23244483A Granted JPS60124111A (ja) | 1983-12-09 | 1983-12-09 | 表面弾性波素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60124111A (en, 2012) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5852702A (en) * | 1996-02-28 | 1998-12-22 | Minolta Co., Ltd. | Thin film optical waveguide and optical deflecting device |
| WO2012107388A1 (de) | 2011-02-07 | 2012-08-16 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Transparente akustisch wirksame vorrichtung |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5856513A (ja) * | 1981-03-05 | 1983-04-04 | Clarion Co Ltd | 表面弾性波素子 |
-
1983
- 1983-12-09 JP JP23244483A patent/JPS60124111A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5856513A (ja) * | 1981-03-05 | 1983-04-04 | Clarion Co Ltd | 表面弾性波素子 |
| JPS5863214A (ja) * | 1981-03-05 | 1983-04-15 | Clarion Co Ltd | 表面弾性波素子 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5852702A (en) * | 1996-02-28 | 1998-12-22 | Minolta Co., Ltd. | Thin film optical waveguide and optical deflecting device |
| WO2012107388A1 (de) | 2011-02-07 | 2012-08-16 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Transparente akustisch wirksame vorrichtung |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0311685B2 (en, 2012) | 1991-02-18 |
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