JPS60123048A - 半導体立体回路素子の製造方法 - Google Patents

半導体立体回路素子の製造方法

Info

Publication number
JPS60123048A
JPS60123048A JP58229763A JP22976383A JPS60123048A JP S60123048 A JPS60123048 A JP S60123048A JP 58229763 A JP58229763 A JP 58229763A JP 22976383 A JP22976383 A JP 22976383A JP S60123048 A JPS60123048 A JP S60123048A
Authority
JP
Japan
Prior art keywords
single crystal
film
spinel
electrode
dimensional circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58229763A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0116015B2 (enrdf_load_stackoverflow
Inventor
Takashi Nakakado
中門　孝
Hiroyuki Aoe
青江　弘行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP58229763A priority Critical patent/JPS60123048A/ja
Publication of JPS60123048A publication Critical patent/JPS60123048A/ja
Publication of JPH0116015B2 publication Critical patent/JPH0116015B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Non-Volatile Memory (AREA)
JP58229763A 1983-12-07 1983-12-07 半導体立体回路素子の製造方法 Granted JPS60123048A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58229763A JPS60123048A (ja) 1983-12-07 1983-12-07 半導体立体回路素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58229763A JPS60123048A (ja) 1983-12-07 1983-12-07 半導体立体回路素子の製造方法

Publications (2)

Publication Number Publication Date
JPS60123048A true JPS60123048A (ja) 1985-07-01
JPH0116015B2 JPH0116015B2 (enrdf_load_stackoverflow) 1989-03-22

Family

ID=16897287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58229763A Granted JPS60123048A (ja) 1983-12-07 1983-12-07 半導体立体回路素子の製造方法

Country Status (1)

Country Link
JP (1) JPS60123048A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS586147A (ja) * 1981-07-03 1983-01-13 Nec Corp 半導体装置及びその製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS586147A (ja) * 1981-07-03 1983-01-13 Nec Corp 半導体装置及びその製造方法

Also Published As

Publication number Publication date
JPH0116015B2 (enrdf_load_stackoverflow) 1989-03-22

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