JPS60121271A - 超硬質被覆層の形成方法 - Google Patents

超硬質被覆層の形成方法

Info

Publication number
JPS60121271A
JPS60121271A JP58227677A JP22767783A JPS60121271A JP S60121271 A JPS60121271 A JP S60121271A JP 58227677 A JP58227677 A JP 58227677A JP 22767783 A JP22767783 A JP 22767783A JP S60121271 A JPS60121271 A JP S60121271A
Authority
JP
Japan
Prior art keywords
gaseous
alcl3
carbon
base body
activated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58227677A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6261109B2 (enrdf_load_stackoverflow
Inventor
Akio Nishiyama
昭雄 西山
Noribumi Kikuchi
菊池　則文
Takayuki Shingyouchi
新行内　隆之
Hiroaki Yamashita
山下　博明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP58227677A priority Critical patent/JPS60121271A/ja
Publication of JPS60121271A publication Critical patent/JPS60121271A/ja
Publication of JPS6261109B2 publication Critical patent/JPS6261109B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/278—Diamond only doping or introduction of a secondary phase in the diamond
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/271—Diamond only using hot filaments

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP58227677A 1983-12-01 1983-12-01 超硬質被覆層の形成方法 Granted JPS60121271A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58227677A JPS60121271A (ja) 1983-12-01 1983-12-01 超硬質被覆層の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58227677A JPS60121271A (ja) 1983-12-01 1983-12-01 超硬質被覆層の形成方法

Publications (2)

Publication Number Publication Date
JPS60121271A true JPS60121271A (ja) 1985-06-28
JPS6261109B2 JPS6261109B2 (enrdf_load_stackoverflow) 1987-12-19

Family

ID=16864596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58227677A Granted JPS60121271A (ja) 1983-12-01 1983-12-01 超硬質被覆層の形成方法

Country Status (1)

Country Link
JP (1) JPS60121271A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04116172A (ja) * 1990-08-31 1992-04-16 Energy Conversion Devices Inc 高速で薄膜を形成する方法および薄膜形成装置
US5310447A (en) * 1989-12-11 1994-05-10 General Electric Company Single-crystal diamond of very high thermal conductivity
WO1995012009A1 (de) * 1993-10-29 1995-05-04 Balzers Aktiengesellschaft Beschichteter körper, verfahren zu dessen herstellung sowie dessen verwendung
US5419276A (en) * 1989-12-11 1995-05-30 General Electric Company Single-crystal diamond of very high thermal conductivity

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5310447A (en) * 1989-12-11 1994-05-10 General Electric Company Single-crystal diamond of very high thermal conductivity
US5419276A (en) * 1989-12-11 1995-05-30 General Electric Company Single-crystal diamond of very high thermal conductivity
JPH04116172A (ja) * 1990-08-31 1992-04-16 Energy Conversion Devices Inc 高速で薄膜を形成する方法および薄膜形成装置
WO1995012009A1 (de) * 1993-10-29 1995-05-04 Balzers Aktiengesellschaft Beschichteter körper, verfahren zu dessen herstellung sowie dessen verwendung

Also Published As

Publication number Publication date
JPS6261109B2 (enrdf_load_stackoverflow) 1987-12-19

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