JPS60120240A - Ｉｓｆｅｔセンサ - Google Patents
ＩｓｆｅｔセンサInfo
- Publication number
- JPS60120240A JPS60120240A JP58228785A JP22878583A JPS60120240A JP S60120240 A JPS60120240 A JP S60120240A JP 58228785 A JP58228785 A JP 58228785A JP 22878583 A JP22878583 A JP 22878583A JP S60120240 A JPS60120240 A JP S60120240A
- Authority
- JP
- Japan
- Prior art keywords
- gate
- electrode
- ion
- mosfet
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010410 layer Substances 0.000 abstract description 10
- 239000000758 substrate Substances 0.000 abstract description 10
- 230000000694 effects Effects 0.000 abstract description 8
- 229910052710 silicon Inorganic materials 0.000 abstract description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 7
- 239000010703 silicon Substances 0.000 abstract description 7
- 229910052782 aluminium Inorganic materials 0.000 abstract description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 6
- 239000007788 liquid Substances 0.000 abstract description 3
- 229910052594 sapphire Inorganic materials 0.000 abstract description 3
- 239000010980 sapphire Substances 0.000 abstract description 3
- 239000003792 electrolyte Substances 0.000 abstract description 2
- 238000002161 passivation Methods 0.000 abstract description 2
- 239000002356 single layer Substances 0.000 abstract description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- DLUTTXMPJCVUFR-HJCIYZGTSA-N Parillin Chemical compound C([C@H]1O[C@H]([C@@H]([C@@H](O)[C@@H]1O[C@H]1[C@@H]([C@H](O)[C@@H](O)[C@H](C)O1)O)O[C@H]1[C@@H]([C@@H](O)[C@H](O)[C@@H](CO)O1)O)O[C@@H]1C[C@H]2CC[C@H]3[C@@H]4C[C@H]5[C@@H]([C@]4(CC[C@@H]3[C@@]2(C)CC1)C)[C@@H]([C@]1(OC[C@@H](C)CC1)O5)C)O[C@@H]1O[C@H](CO)[C@@H](O)[C@H](O)[C@H]1O DLUTTXMPJCVUFR-HJCIYZGTSA-N 0.000 abstract 1
- -1 SiN4 Chemical compound 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- DLUTTXMPJCVUFR-UHFFFAOYSA-N parillin Natural products O1C2(OCC(C)CC2)C(C)C(C2(CCC3C4(C)CC5)C)C1CC2C3CCC4CC5OC(C(C(O)C1OC2C(C(O)C(O)C(C)O2)O)OC2C(C(O)C(O)C(CO)O2)O)OC1COC1OC(CO)C(O)C(O)C1O DLUTTXMPJCVUFR-UHFFFAOYSA-N 0.000 abstract 1
- 239000011347 resin Substances 0.000 abstract 1
- 229920005989 resin Polymers 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 description 15
- 150000002500 ions Chemical class 0.000 description 15
- 239000012528 membrane Substances 0.000 description 6
- 239000007864 aqueous solution Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000009413 insulation Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000005684 electric field Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 235000006693 Cassia laevigata Nutrition 0.000 description 1
- 241000522641 Senna Species 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229940124513 senna glycoside Drugs 0.000 description 1
- 230000035807 sensation Effects 0.000 description 1
- 230000035936 sexual power Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Molecular Biology (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58228785A JPS60120240A (ja) | 1983-12-03 | 1983-12-03 | Ｉｓｆｅｔセンサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58228785A JPS60120240A (ja) | 1983-12-03 | 1983-12-03 | Ｉｓｆｅｔセンサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60120240A true JPS60120240A (ja) | 1985-06-27 |
| JPH0315974B2 JPH0315974B2 (en, 2012) | 1991-03-04 |
Family
ID=16881805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58228785A Granted JPS60120240A (ja) | 1983-12-03 | 1983-12-03 | Ｉｓｆｅｔセンサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60120240A (en, 2012) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62132160A (ja) * | 1985-12-04 | 1987-06-15 | Terumo Corp | 分離ゲ−ト型ｉｓｆｅｔを用いたバイオセンサ− |
| EP0190005A3 (en) * | 1985-01-23 | 1988-12-14 | Integrated Ionics, Inc. | Ambient sensing devices with isolation |
| JPS6453151A (en) * | 1987-05-22 | 1989-03-01 | Abbott Lab | Ion selecting electrode |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5630640A (en) * | 1979-08-22 | 1981-03-27 | Olympus Optical Co Ltd | Detecting method of chemical substance by chemically sensitive element of insulated-gate transistor structure |
-
1983
- 1983-12-03 JP JP58228785A patent/JPS60120240A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5630640A (en) * | 1979-08-22 | 1981-03-27 | Olympus Optical Co Ltd | Detecting method of chemical substance by chemically sensitive element of insulated-gate transistor structure |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0190005A3 (en) * | 1985-01-23 | 1988-12-14 | Integrated Ionics, Inc. | Ambient sensing devices with isolation |
| JPS62132160A (ja) * | 1985-12-04 | 1987-06-15 | Terumo Corp | 分離ゲ−ト型ｉｓｆｅｔを用いたバイオセンサ− |
| JPS6453151A (en) * | 1987-05-22 | 1989-03-01 | Abbott Lab | Ion selecting electrode |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0315974B2 (en, 2012) | 1991-03-04 |
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