JPS60117061U - ウエハ用ピンセツト - Google Patents

ウエハ用ピンセツト

Info

Publication number
JPS60117061U
JPS60117061U JP392784U JP392784U JPS60117061U JP S60117061 U JPS60117061 U JP S60117061U JP 392784 U JP392784 U JP 392784U JP 392784 U JP392784 U JP 392784U JP S60117061 U JPS60117061 U JP S60117061U
Authority
JP
Japan
Prior art keywords
tweezers
wafers
stopper
clamping
periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP392784U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0115507Y2 (enExample
Inventor
哲 安田
Original Assignee
ロ−ム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ロ−ム株式会社 filed Critical ロ−ム株式会社
Priority to JP392784U priority Critical patent/JPS60117061U/ja
Publication of JPS60117061U publication Critical patent/JPS60117061U/ja
Application granted granted Critical
Publication of JPH0115507Y2 publication Critical patent/JPH0115507Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP392784U 1984-01-14 1984-01-14 ウエハ用ピンセツト Granted JPS60117061U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP392784U JPS60117061U (ja) 1984-01-14 1984-01-14 ウエハ用ピンセツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP392784U JPS60117061U (ja) 1984-01-14 1984-01-14 ウエハ用ピンセツト

Publications (2)

Publication Number Publication Date
JPS60117061U true JPS60117061U (ja) 1985-08-07
JPH0115507Y2 JPH0115507Y2 (enExample) 1989-05-09

Family

ID=30479011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP392784U Granted JPS60117061U (ja) 1984-01-14 1984-01-14 ウエハ用ピンセツト

Country Status (1)

Country Link
JP (1) JPS60117061U (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5318316A (en) * 1976-08-02 1978-02-20 Motorola Inc Multichannel communication system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5318316A (en) * 1976-08-02 1978-02-20 Motorola Inc Multichannel communication system

Also Published As

Publication number Publication date
JPH0115507Y2 (enExample) 1989-05-09

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