JPS6011106A - 形状検出装置 - Google Patents

形状検出装置

Info

Publication number
JPS6011106A
JPS6011106A JP58119723A JP11972383A JPS6011106A JP S6011106 A JPS6011106 A JP S6011106A JP 58119723 A JP58119723 A JP 58119723A JP 11972383 A JP11972383 A JP 11972383A JP S6011106 A JPS6011106 A JP S6011106A
Authority
JP
Japan
Prior art keywords
sample
peak value
microscope
value
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58119723A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0129401B2 (enrdf_load_stackoverflow
Inventor
Kenichi Matsumura
憲一 松村
Norio Okuya
奥谷　憲男
Toshitoki Inoue
井上　利勅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58119723A priority Critical patent/JPS6011106A/ja
Publication of JPS6011106A publication Critical patent/JPS6011106A/ja
Publication of JPH0129401B2 publication Critical patent/JPH0129401B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP58119723A 1983-06-30 1983-06-30 形状検出装置 Granted JPS6011106A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58119723A JPS6011106A (ja) 1983-06-30 1983-06-30 形状検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58119723A JPS6011106A (ja) 1983-06-30 1983-06-30 形状検出装置

Publications (2)

Publication Number Publication Date
JPS6011106A true JPS6011106A (ja) 1985-01-21
JPH0129401B2 JPH0129401B2 (enrdf_load_stackoverflow) 1989-06-09

Family

ID=14768523

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58119723A Granted JPS6011106A (ja) 1983-06-30 1983-06-30 形状検出装置

Country Status (1)

Country Link
JP (1) JPS6011106A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4485238A (en) * 1981-12-16 1984-11-27 The Dow Chemical Company Preparation of ((6-substituted phenoxy-2-pyridinyl)-methyl)-3-(2,2-bis(trifluoromethyl)-1-ethenyl)-2,2-dimethylcyclopropane carboxylates
JPS62225904A (ja) * 1986-02-28 1987-10-03 ポラロイド　コ−ポレ−シヨン 透明物体表面と他表面との微小間隔の画像を形成する方法および装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4485238A (en) * 1981-12-16 1984-11-27 The Dow Chemical Company Preparation of ((6-substituted phenoxy-2-pyridinyl)-methyl)-3-(2,2-bis(trifluoromethyl)-1-ethenyl)-2,2-dimethylcyclopropane carboxylates
JPS62225904A (ja) * 1986-02-28 1987-10-03 ポラロイド　コ−ポレ−シヨン 透明物体表面と他表面との微小間隔の画像を形成する方法および装置

Also Published As

Publication number Publication date
JPH0129401B2 (enrdf_load_stackoverflow) 1989-06-09

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