JPS60110194A - 基板の洗浄装置 - Google Patents

基板の洗浄装置

Info

Publication number
JPS60110194A
JPS60110194A JP58217434A JP21743483A JPS60110194A JP S60110194 A JPS60110194 A JP S60110194A JP 58217434 A JP58217434 A JP 58217434A JP 21743483 A JP21743483 A JP 21743483A JP S60110194 A JPS60110194 A JP S60110194A
Authority
JP
Japan
Prior art keywords
reticle
arm
cleaning
foreign matter
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58217434A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0473775B2 (enExample
Inventor
安部　宣利
今村　和則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP58217434A priority Critical patent/JPS60110194A/ja
Publication of JPS60110194A publication Critical patent/JPS60110194A/ja
Priority to US07/011,413 priority patent/US4715392A/en
Publication of JPH0473775B2 publication Critical patent/JPH0473775B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP58217434A 1983-11-10 1983-11-18 基板の洗浄装置 Granted JPS60110194A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP58217434A JPS60110194A (ja) 1983-11-18 1983-11-18 基板の洗浄装置
US07/011,413 US4715392A (en) 1983-11-10 1987-02-04 Automatic photomask or reticle washing and cleaning system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58217434A JPS60110194A (ja) 1983-11-18 1983-11-18 基板の洗浄装置

Publications (2)

Publication Number Publication Date
JPS60110194A true JPS60110194A (ja) 1985-06-15
JPH0473775B2 JPH0473775B2 (enExample) 1992-11-24

Family

ID=16704160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58217434A Granted JPS60110194A (ja) 1983-11-10 1983-11-18 基板の洗浄装置

Country Status (1)

Country Link
JP (1) JPS60110194A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006100264A (ja) * 2004-09-01 2006-04-13 Sanyo Electric Co Ltd 洗浄装置
JP2013105857A (ja) * 2011-11-11 2013-05-30 Disco Abrasive Syst Ltd 筐体カバー機構
JP2021028600A (ja) * 2019-08-09 2021-02-25 池上通信機株式会社 シート体の検査装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011257304A (ja) * 2010-06-10 2011-12-22 Hitachi High-Technologies Corp 基板検査方法及び装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5892225A (ja) * 1981-11-27 1983-06-01 Fujitsu Ltd ウエハ洗浄装置
JPS5899734A (ja) * 1981-12-10 1983-06-14 Fujitsu Ltd フォト・マスク検査方法及びその装置
JPS58182826A (ja) * 1982-04-20 1983-10-25 Nippon Kogaku Kk <Nikon> 異物の自動除去装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5892225A (ja) * 1981-11-27 1983-06-01 Fujitsu Ltd ウエハ洗浄装置
JPS5899734A (ja) * 1981-12-10 1983-06-14 Fujitsu Ltd フォト・マスク検査方法及びその装置
JPS58182826A (ja) * 1982-04-20 1983-10-25 Nippon Kogaku Kk <Nikon> 異物の自動除去装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006100264A (ja) * 2004-09-01 2006-04-13 Sanyo Electric Co Ltd 洗浄装置
JP2013105857A (ja) * 2011-11-11 2013-05-30 Disco Abrasive Syst Ltd 筐体カバー機構
JP2021028600A (ja) * 2019-08-09 2021-02-25 池上通信機株式会社 シート体の検査装置

Also Published As

Publication number Publication date
JPH0473775B2 (enExample) 1992-11-24

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