JPS60102604A - Manufacture device of optical coupling device - Google Patents
Manufacture device of optical coupling deviceInfo
- Publication number
- JPS60102604A JPS60102604A JP58211172A JP21117283A JPS60102604A JP S60102604 A JPS60102604 A JP S60102604A JP 58211172 A JP58211172 A JP 58211172A JP 21117283 A JP21117283 A JP 21117283A JP S60102604 A JPS60102604 A JP S60102604A
- Authority
- JP
- Japan
- Prior art keywords
- coupling element
- solder
- coupling
- heated
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4248—Feed-through connections for the hermetical passage of fibres through a package wall
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
Abstract
Description
【発明の詳細な説明】
この発明は光情報伝送用の元素子と光7アイバーとの結
合装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a coupling device for optical information transmission between an element and an optical 7-eye.
AA’GaAs x InGaAsP f母材トシタ半
導体レーザや発光ダイオードの開発と相まって、低損失
光ファイバーの開発は、元ファイバー伝送システムの笑
属化を著しく加速した。The development of low-loss optical fibers, coupled with the development of AA'GaAs x InGaAsP f matrix semiconductor lasers and light-emitting diodes, has significantly accelerated the transformation of the original fiber transmission system.
光7アイバー通倍システムにおいて半導体レーザや発光
ダイオードから放射した高品質の光ビームを効率よく1
元ファイバーに結合させる方法を開発することは重要な
fi!1題である。このために。High-quality light beams emitted from semiconductor lasers and light-emitting diodes are efficiently converted into one beam in the optical 7-eye bar multiplication system.
It is important to develop a method for bonding to the original fiber! There is one question. For this.
光ファイバーの先端會丸めて、レンズ作用をもたせた方
式や、発光素子や受光素子等の元素子と元ファイバーの
間に球レンズや円柱レンズ等の結合素子全配置する等の
方法が提案されている。これらの結合索子は光素子′/
J為ら数μmから数lOμn1程度の距離まで近接させ
る必要があり、各種の保持固足方法が採用されている。Methods have been proposed, such as rounding the tip of the optical fiber to give it a lens effect, and arranging all coupling elements such as ball lenses or cylindrical lenses between elements such as light-emitting elements and light-receiving elements and the original fiber. . These coupling cords are optical elements′/
Because of this, it is necessary to place the metals close to each other at a distance of several micrometers to several 10 micrometers, and various methods of holding and fixing are employed.
これらの結合素子を用いて、概論値通りの高い元の結合
効率を得るためには、その位置決め?極めて高い精度で
行わなければならない。例えば、単一モードで発振して
いる牛4体レーザ光を単一モード元ファイバーに結合さ
せる場合、結合効率の直下((1dB におさえるため
Kは、ビーム出射方向で±20μm程度以内、出射方向
と垂直な面内では、±2μmd度以内に結合築子全調勢
、固足しなけれはならない。以下、元素子として発光素
子の場合2例にとり計しく説明する。Using these coupling elements, in order to obtain the original coupling efficiency as high as the general value, what is the positioning? This must be done with extremely high precision. For example, when coupling four-cow laser beams oscillating in a single mode to a single-mode original fiber, K should be within ±20 μm in the beam emission direction, just below the coupling efficiency (to suppress it to 1 dB, In a plane perpendicular to , the coupling turret must be fully adjusted and fixed within ±2 μmd degrees.Hereinafter, two examples will be explained in the case of a light emitting device as an element.
結合素子を調整、固定する作業は、通常固定された発光
素子に通電して発光させ、この発光ビーム全赤外テレビ
・カメラで監視するか、又は光フアイバー出力を測定し
ながら看脱可能な調整治具にと9つけた結合素子’kx
e ya z三軸方向に調整して最適位置を決める。そ
のあとで発光素子と結合素子を保持する谷々の金属部材
金牛田付や溶接等の手段で固定する方法が採用されてい
る。The work of adjusting and fixing the coupling element is usually done by energizing the fixed light emitting element to emit light, monitoring the emitted beam with a full infrared television camera, or by measuring the optical fiber output while making adjustments that can be noticed. Coupling element 'kx' attached to the jig
Adjust in the three axial directions to determine the optimal position. After that, a method is adopted in which the light emitting element and the coupling element are fixed by means such as welding or attaching metal members to the metal members that hold the light emitting element and the coupling element.
しかるに、溶接による方法では%溶接時に拐料が変形し
、結合素子の位置が10数μm程度移動することが多く
、数μm以下の精度で固定しなければならない場合には
、不適当であることがわかった。一方牛田付の場合には
、つける方法で若干異なるが、半田の融看固定時に各々
の部材音強く固定しておくことによって結合素子の位置
変動全1μm以下にすることができる。このため半田付
Icよる方法が多く採用されており、半田材を溶融する
ためには、高周波加熱や1通常の半田ゴテによる加熱手
段が採られている。しかし発光素子と結合素子の相対位
置全数μm以下の精度で調整し、かつ、その状態に強く
固定しながら、所定の半田材全加熱溶融することは容易
ではない。However, in the welding method, the material is deformed during welding, and the position of the coupling element often moves by about 10-odd micrometers, making it unsuitable when fixation must be performed with an accuracy of several micrometers or less. I understand. On the other hand, in the case of Ushida attachment, the total positional variation of the coupling element can be kept to 1 μm or less by firmly fixing each member when fixing the solder, although the method of attachment is slightly different. For this reason, a method using a soldering IC is often adopted, and in order to melt the solder material, heating means such as high frequency heating or a normal soldering iron are used. However, it is not easy to adjust the relative positions of the light emitting element and the coupling element with an accuracy of less than a total number of micrometers, and to heat and melt all of the predetermined solder material while firmly fixing it in that state.
例えは高周波加熱法の場合には5発光素子と結合菓子?
調整、固定するための治具によって半田材の加熱状態に
影響を与え、均一な融着状態を得ることが困難である。For example, in the case of high frequency heating method, 5 light emitting elements and a confectionery?
The heating state of the solder material is affected by the adjustment and fixing jig, making it difficult to obtain a uniform fusion state.
一方半田ゴテによる方法は、谷素子を調整、固定する治
具と、半田材の位置を陥丁ことが容易であるため加熱部
への恣影響をかなり低減できるが、半田ゴテに適した熱
伝尋のよい材料は、半田材と反応し易すく、このためコ
テ先の形状が変形しやすく、微少部分で行なわれる半田
付作業の作業性、再現性全署しく低下させ、接層強度の
梅現性にも問題があった。On the other hand, the method using a soldering iron requires a jig to adjust and fix the valley element, and the position of the solder material can be easily adjusted, so the arbitrary influence on the heated part can be considerably reduced. Thin materials tend to react with the soldering material, and as a result, the shape of the iron tip is easily deformed, which drastically reduces the workability and reproducibility of soldering work performed on minute parts, and reduces the bond strength. There was also a problem with reality.
この発明の目的は上述の欠点を解決するためになされた
もので光素子と光ファイバーとの、貼合装置において、
光素子と結合素子の相対位aを精度良く調整、固定しか
つ、半田付作業の作業住、再現性全同上させ、均一なJ
k層強度を実現する結合装置装造装置を提供することに
ある。The purpose of the present invention was to solve the above-mentioned drawbacks, and to provide a bonding device for optical elements and optical fibers.
The relative position a of the optical element and the coupling element can be adjusted and fixed with high accuracy, and the soldering work can be performed with uniform reproducibility and uniform J.
An object of the present invention is to provide a bonding device manufacturing device that realizes k-layer strength.
不兄明は、平田浴融手段として、高温ガス流またはレー
ザ元を用いること全特徴とする。Fuenimei is characterized by the use of a hot gas stream or a laser source as the Hirata bath melting means.
この発明は、元素子の材料によらず、かつ半導体レーザ
や発光ダイオードによらず適用できるが。This invention can be applied regardless of the material of the element and regardless of the semiconductor laser or light emitting diode.
もっとも大きな効果?与えると考えられる単一モードで
発振する半導体レーザと単一モード元ファイバーの結合
の場合全中心に1面を参照して詳細に説明する。The biggest effect? The case of coupling between a semiconductor laser that oscillates in a single mode and a single-mode source fiber will be described in detail with reference to one plane at the center of the entire structure.
第1図は、従来提案されている半田ゴテによる結合装置
の製造装置全説明するための結合装置の概念的斜視図で
、ステム1の中心部上端には半導体レーザペレット等の
発光素子(図示せず)がとりつけてあ−〇、これと同軸
上に補助リング2がとりつけである。結合素子ホルダー
4には、中心部に直径0.5〜1.5mm の球レンズ
等の結合素子3が予めめと−りつけられており、別に率
備されたマニエピレータ付治具(図ボせず)によって、
発光素子と結合素子3の相対位置全ビーム出射方間で±
20μm程度以内、出射方同と垂直な面内では±2μm
程度以内に調整する・結合素子ホルダー4の上部外周上
には、直径約1mmの穴5があけられ、その中に半田粒
6がセットできるようになっている。FIG. 1 is a conceptual perspective view of a bonding device for explaining the entire manufacturing device of a bonding device using a soldering iron, which has been proposed in the past. ) is attached, and the auxiliary ring 2 is attached coaxially with this. The coupling element holder 4 has a coupling element 3 such as a spherical lens with a diameter of 0.5 to 1.5 mm installed in advance in the center, and a jig with a mani-epilator (not shown in the figure) provided separately. ) by
The relative position of the light emitting element and the coupling element 3 is ± between all beam emission directions.
Within about 20μm, ±2μm in the plane perpendicular to the exit direction
- A hole 5 with a diameter of about 1 mm is bored on the upper outer periphery of the coupling element holder 4, into which a solder grain 6 can be set.
この半田粒6を先端が穴に入るようにA聞径化されて、
かつ微調反は(図示せず)にと9つけらλ′シ1ζ半田
ゴデ7によって加熱溶融する。この時ステム1と結合素
子ホルダー4は、前述リマニュビレータ付治具によって
固定されているので、半田粒6が均一に溶融したあと、
すみやかに半田ゴテ7を移動δせることによって、発光
素子と結合素子3とのろ七対位置関係の移#It無視で
きる程小さくでき、レーザビームは、は(よ平行光に変
換され、単一モードファイバー等の光学線路へ効率よく
光結合することができる。しかるに半田ゴテ7には、通
常熱伝導度の大きい銅等の材料が用いられるが、これら
の材料は、半田材と化学反応が起りや丁く。This solder grain 6 is made into an A diameter so that the tip fits into the hole.
Further, the fine-adjustment resistor (not shown) is heated and melted by a soldering god 7 having λ' and 1ζ. At this time, the stem 1 and the coupling element holder 4 are fixed by the above-mentioned jig with a remanipulator, so after the solder grains 6 are uniformly melted,
By quickly moving the soldering iron 7, the shift in the pairwise positional relationship between the light emitting element and the coupling element 3 can be made negligibly small, and the laser beam is converted into parallel light and becomes a single beam. It is possible to efficiently couple light to an optical line such as a mode fiber. However, materials such as copper that have high thermal conductivity are normally used for the soldering iron 7, but these materials do not cause chemical reactions with the soldering material. Riya Ding.
このため、コテ先の形状が変形されや丁い。特(C今回
のように細径化されたコテ先の変形は、半田付作業の均
一性、再現性を著しく低下させ、接76強度の再現性に
も大きな間阻となることがわかったー
第2図は、この発明の一実施例會ボすための結合装置の
概念的斜視図で、第1図と同一部材には同一の番号を附
与しである。各部拐の構成は第1図と殆んど同じで異な
るのは半田ゴテ7の代わりにノズル8金もったパイプ9
全用いていることである。ノズル8は、結合素子ホルダ
ー4の上部の穴5の数と位置が一致するように作られて
おり。As a result, the shape of the iron tip may be distorted or distorted. Particularly (C) It has been found that deformation of the tip of a thinner soldering iron as in this case significantly reduces the uniformity and reproducibility of soldering work, and also greatly impedes the reproducibility of the contact strength. Fig. 2 is a conceptual perspective view of a coupling device for assembling an embodiment of the present invention, in which the same members as in Fig. 1 are given the same numbers.The configuration of each part is shown in Fig. 1. It's almost the same, except that instead of the soldering iron 7, there's a nozzle 8 and a gold-filled pipe 9.
This is something I use completely. The nozzles 8 are made so that the number and position of the holes 5 in the upper part of the coupling element holder 4 match.
かつこのパイプ9の中k 200℃以上加熱した菫索ガ
ス全流し、ノズル8を通して加熱した窒業ガス等をジェ
ット噴射するようにしである。このジェット気流によっ
て半田粒6全局所的に加熱、溶融することができる。こ
の時ステムl及び結合素子ホルダー4全保持するマニュ
ピレータ付治具(lA示せず)奮進して各部材全補助加
熱した方が1作業時間の短縮の他半田接着強度の増加や
、均一性の同上に大きな効果をもたらす、この製造装置
によれば半田材と接触する治具がなくな9.無接触で、
半田付作業ができるようになったため、発光素子と結合
素子3の相対位置全調整・固定の精度が改善された他、
作業性、均一性においても者しい効果が得られた。In this pipe 9, a diaphragm gas heated to 200° C. or higher is completely flowed, and heated nitrogenous gas or the like is jetted through a nozzle 8. The entire solder grain 6 can be locally heated and melted by this jet stream. At this time, it is better to use a jig with a manipulator (lA not shown) to hold the entire stem l and coupling element holder 4 and perform auxiliary heating on all of the parts, which will not only shorten the working time but also increase the solder bond strength and improve uniformity. 9. With this manufacturing equipment, there are no jigs that come into contact with the solder material, which has a great effect on 9. No contact,
Since soldering work can now be performed, the accuracy of adjusting and fixing the relative position of the light emitting element and the coupling element 3 has been improved, as well as
Significant effects were also obtained in terms of workability and uniformity.
以上面温にしたジェット気流會用いて、再現性Ic優れ
た結合装置製造挟置について述べたが、ジェット気流の
代シに、i%エネルギー密度の炭酸ガスレーザ、鼠索ガ
スレーザ、YAGレーザ等の連続発振や、パルス発振す
る光源會用いて、元ファイバーで誘4する方法も、この
考案とelまltJノじ作業性、再現性及び接着強度を
得ることができる。As mentioned above, we have described how to manufacture a coupling device with excellent reproducibility Ic using a jet stream system with surface temperature. A method of using an oscillation or pulse oscillation light source to insulate the original fiber can also achieve the same workability, reproducibility, and adhesive strength as this invention.
また、発ブC素子及び結合素子3として半畳体レーザ及
び球レンズの場合についてこの発明VCついて説明して
きたが、こQ他に発光素子としてに元光ダイオード、結
合素子としては、ロンドレンズや、収束性ロッドレンズ
等にも使用できることはいうまでもない。In addition, although the VC of the present invention has been explained in the case of a semiconverter laser and a ball lens as the light emitting C element and the coupling element 3, in addition to this, an original photodiode may be used as the light emitting element, and a Rondo lens may be used as the coupling element. Needless to say, it can also be used for convergent rod lenses.
第1図は従来提案されている結合装置の製造装置を説明
するための結合装置の概念的斜視図、第2図はこの発明
の実/A 911 k説明するための結合装置の概念的
斜視図である。ここで1はステム、2は補助リング、3
は結合素子、4は結合素子ホルダー、5は穴、6は半田
粒、7は半田ゴテ、8はノズル、9はパイプ、を示す。Fig. 1 is a conceptual perspective view of a coupling device for explaining a conventionally proposed coupling device manufacturing device, and Fig. 2 is a conceptual perspective view of a coupling device for explaining the actual/A911k of the present invention. It is. Here, 1 is the stem, 2 is the auxiliary ring, and 3
4 is a coupling element, 4 is a coupling element holder, 5 is a hole, 6 is a solder grain, 7 is a soldering iron, 8 is a nozzle, and 9 is a pipe.
Claims (1)
て固足する光結合装置製造装置において、高温ガス流ま
たはレーザ光を用いて、無接触で半田材を加熱溶融する
ことを%徴とする光結合装置V製造装置。In optical coupling device manufacturing equipment in which the relative positions of optical elements and coupling elements are fully adjusted and fixed by soldering, the solder material is heated and melted without contact using a high-temperature gas flow or laser light. Optical coupling device V manufacturing equipment.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58211172A JPS60102604A (en) | 1983-11-10 | 1983-11-10 | Manufacture device of optical coupling device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58211172A JPS60102604A (en) | 1983-11-10 | 1983-11-10 | Manufacture device of optical coupling device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60102604A true JPS60102604A (en) | 1985-06-06 |
Family
ID=16601597
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58211172A Pending JPS60102604A (en) | 1983-11-10 | 1983-11-10 | Manufacture device of optical coupling device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60102604A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05155283A (en) * | 1991-12-02 | 1993-06-22 | Yoshitomo Yoshida | Deck construction for truck, etc. |
US6696668B2 (en) * | 2000-06-26 | 2004-02-24 | Fine Device Co., Ltd. | Laser soldering method and apparatus |
-
1983
- 1983-11-10 JP JP58211172A patent/JPS60102604A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05155283A (en) * | 1991-12-02 | 1993-06-22 | Yoshitomo Yoshida | Deck construction for truck, etc. |
US6696668B2 (en) * | 2000-06-26 | 2004-02-24 | Fine Device Co., Ltd. | Laser soldering method and apparatus |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5068865A (en) | Semiconductor laser module | |
US5020873A (en) | Optical component for accurately locating the end face of an optical waveguide with respect to an optical device | |
US5195155A (en) | Optical coupling apparatus and manufacturing method of the same, and lens holder | |
JP2627900B2 (en) | Optoelectronics package | |
JPS60102604A (en) | Manufacture device of optical coupling device | |
JP2804238B2 (en) | Method for manufacturing optical semiconductor module | |
JPH04359207A (en) | Laser diode coupling device and its assembling method | |
JPS6365411A (en) | Fixing method for lens | |
JPH01310315A (en) | Structure for connecting light guide and optical fiber and its production thereof | |
JPH05323158A (en) | Laser diode coupler and its assembling method | |
JPS63167311A (en) | Coupler between optical element and optical fiber | |
JPH05245681A (en) | Laser beam machine | |
JPH01158406A (en) | Manufacture of optical semiconductor assembly | |
JPH0429387A (en) | Optical coupler | |
JPS6076710A (en) | Optical coupling device | |
JPS61239209A (en) | Production of semiconductor laser and optical fiber coupling device | |
JPS5988886A (en) | Photo semiconductor device | |
JPH11271575A (en) | Optical semiconductor module | |
JPH02101786A (en) | Semiconductor laser device | |
JPH08254639A (en) | Optical fiber with lens, semiconductor laser module and its production | |
JPH02239211A (en) | Optical semiconductor element module and method for adjusting and assembling this module | |
JPH0611631A (en) | Optical element module | |
JPH03228004A (en) | Laser diode coupling device | |
JPH0222605A (en) | Jig for production of optical semiconductor assembly | |
JPS6076709A (en) | Optical coupling device |