JPS60101941A - Appearance inspection apparatus of semiconductor pellet - Google Patents

Abstract

PURPOSE:To eliminate the step for removing difective pellets and directly transfer the pellets to the mounting process by providing a microscope and an injection needle for coating of ink on the upper surface of apparatus, giving the marks in differnet colors or shapes corresponding to the defective pellets and good pellets and counting a number of good pellets in the apparatus for inspecting appearance of a plurality of semiconductor pellets arranged on a movable stage. CONSTITUTION:A sheet 2 to which many semiconductor pellets 1 are attached is placed on the X-Y stage not illustrated and the stage is then shifted in the X-Y directions. In such structure, an objective lens 3 which forms a microscope and an injection needle 4 attached to the cylinder 5 are arranged on the pellets. The appearance of respective pellets 1 are inspected by the lens 3. If defective pellets are found, the defective mode switch is depressed, while when good pellets are found, the good mode switch is depressed in order to attach different ink marks on the relevant pellets with the injection needle 4.

Description

[Detailed description of the invention] The present invention relates to an apparatus for inspecting the appearance of semiconductor pellets.

Generally, circuit elements incorporating electric circuits are used in the assembly of semiconductor devices such as transistors and ICs.

The circuit elements are made of semiconductor pellets and are easily cracked or chipped even by small external forces. In addition, in the process of manufacturing electric circuits, using techniques such as photo-etching and selective diffusion, the wiring layer may be damaged due to contamination. Furthermore, when testing the characteristics of electrical circuits, defective products are marked as defective.
Although C scratch marks are attached, due to a mistake, inspection may not be performed and there may be no measurement marks on the surface.

Since the circuits of these bullets may be damaged and there is no guarantee that they will work properly, they are removed before mounting as they do not perform the intended function.

This is because the defective mark on the pellet is a scratch mark, and the length, depth, or angle of the mark is not constant, which makes it difficult to detect the defective mark in the pellet binary image that appears on the pellet position recognition device used in the mounting process. This is because it was difficult. In addition, if you try to display the results of the electric circuit characteristic test using other methods, such as ink, there is a problem that it will disappear due to the water used in the timing process, or the ink that flows will adhere to other pellets. However, there is a problem that it becomes defective.
Currently, scratch marks are used.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a bullet visual inspection apparatus that improves the efficiency of bullet visual inspection work and facilitates automatic detection of defective marks in the mounting process.

To achieve the above object, the present invention is an apparatus for visual inspection of a plurality of semiconductor pellets arranged on a sheet on a movable stage, which is equipped with a mechanism for forming defective identification marks instead of removing defective products. Yes, and will be explained in detail below using the figures.

FIG. 1 shows an embodiment of the invention. A plurality of pellets 1 are arranged on a sheet 2, and the sheet 2 is fixed on an XY stage. After observing the appearance of the pellet through the entire objective lens 3 of the microscope, if it is a defective pellet, press the defect mode switch (not shown) and the ink application head (not shown) moves horizontally in the direction of arrow A in Figure 1, and the surface of the observed pellet is removed. apply ink to. The tip of the ink application head consists of an injection needle 4, which is large enough to fit into the gap between the objective lens 3 and the pellet 1 without any problem. Further, ink application is performed by a discharge device (not shown) using air pressure, and the amount of application can be adjusted by changing the air pressure and application time.

Next, the pellet appearance inspection work will be explained.

A sheet 2 on which a plurality of pellets 1 are arranged is fixed to an X-Y stage (not shown), and the X-Y stage is moved so that the pellets whose appearance is to be checked come within the field of view of the microscope. Next, focus the microscope on the pellet surface. After observation, if the product is defective, press the defect button and apply ink, and if the product is good, press the good button and count the number of non-defective products. Repeat the same below. Once all of the pellets on the notebook have been inspected, the notebook is moved to the next mounting process, where mounting work begins.

At this time, since ink has not been applied to the defective pellet,
It becomes easy to distinguish between good and defective products using a binarized image. Furthermore, since there is no process that uses water after applying the ink, the ink does not disappear or run off and adhere to other pellets.

As described above, the visual inspection device of the present invention makes it possible to supply pellets to the mounting process without removing defective pellets, improving the efficiency of the pellet visual inspection process, and automatically removing defective marks in the mounting process. Detection is now possible.

[Brief explanation of drawings]

FIG. 1 is a schematic diagram of a pellet visual inspection device according to the present invention. In the figure, 1...Bellet, 2...Sheet, 3...Objective lens, 4...Injection needle,
5... It is a cylinder. Kume 1 figure

Claims (1)

[Claims] A visual inspection apparatus for a plurality of semiconductor pellets arranged on a movable stage, characterized in that the apparatus has a mechanism for forming marks such as non-s and @ marks.