JPS5999243A - 感ガス素子 - Google Patents

感ガス素子

Info

Publication number
JPS5999243A
JPS5999243A JP20770682A JP20770682A JPS5999243A JP S5999243 A JPS5999243 A JP S5999243A JP 20770682 A JP20770682 A JP 20770682A JP 20770682 A JP20770682 A JP 20770682A JP S5999243 A JPS5999243 A JP S5999243A
Authority
JP
Japan
Prior art keywords
gas
catalyst layer
sensitive element
sensitive
resistance value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20770682A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6152420B2 (enrdf_load_stackoverflow
Inventor
Tadashi Sakai
忠司 酒井
Osamu Takigawa
修 滝川
Masayuki Shiratori
白鳥　昌之
Masaki Katsura
桂　正樹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP20770682A priority Critical patent/JPS5999243A/ja
Publication of JPS5999243A publication Critical patent/JPS5999243A/ja
Publication of JPS6152420B2 publication Critical patent/JPS6152420B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP20770682A 1982-11-29 1982-11-29 感ガス素子 Granted JPS5999243A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20770682A JPS5999243A (ja) 1982-11-29 1982-11-29 感ガス素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20770682A JPS5999243A (ja) 1982-11-29 1982-11-29 感ガス素子

Publications (2)

Publication Number Publication Date
JPS5999243A true JPS5999243A (ja) 1984-06-07
JPS6152420B2 JPS6152420B2 (enrdf_load_stackoverflow) 1986-11-13

Family

ID=16544213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20770682A Granted JPS5999243A (ja) 1982-11-29 1982-11-29 感ガス素子

Country Status (1)

Country Link
JP (1) JPS5999243A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62254047A (ja) * 1986-04-25 1987-11-05 Figaro Eng Inc 低アルコ−ル感度ガスセンサの製造方法
JPH0254157A (ja) * 1988-08-18 1990-02-23 Toshiba Corp ガスセンサ
US5086286A (en) * 1989-07-28 1992-02-04 Kurabe Industrial Co., Ltd. Gas-sensitive device
JP2002323467A (ja) * 2001-04-25 2002-11-08 Denso Corp 薄膜型ガスセンサ及びその製造方法
WO2003006977A3 (de) * 2001-07-10 2003-04-03 Bosch Gmbh Robert Schichtverbund und mikromechanisches sensorelement, insbesondere gassensorelement, mit diesem schichtverbund
JP2018054593A (ja) * 2016-09-21 2018-04-05 大阪瓦斯株式会社 ガスセンサおよびガス検知装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62254047A (ja) * 1986-04-25 1987-11-05 Figaro Eng Inc 低アルコ−ル感度ガスセンサの製造方法
JPH0254157A (ja) * 1988-08-18 1990-02-23 Toshiba Corp ガスセンサ
US5086286A (en) * 1989-07-28 1992-02-04 Kurabe Industrial Co., Ltd. Gas-sensitive device
JP2002323467A (ja) * 2001-04-25 2002-11-08 Denso Corp 薄膜型ガスセンサ及びその製造方法
WO2003006977A3 (de) * 2001-07-10 2003-04-03 Bosch Gmbh Robert Schichtverbund und mikromechanisches sensorelement, insbesondere gassensorelement, mit diesem schichtverbund
JP2018054593A (ja) * 2016-09-21 2018-04-05 大阪瓦斯株式会社 ガスセンサおよびガス検知装置

Also Published As

Publication number Publication date
JPS6152420B2 (enrdf_load_stackoverflow) 1986-11-13

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