JPS5988618A - 片持梁の製造方法 - Google Patents

片持梁の製造方法

Info

Publication number
JPS5988618A
JPS5988618A JP57199621A JP19962182A JPS5988618A JP S5988618 A JPS5988618 A JP S5988618A JP 57199621 A JP57199621 A JP 57199621A JP 19962182 A JP19962182 A JP 19962182A JP S5988618 A JPS5988618 A JP S5988618A
Authority
JP
Japan
Prior art keywords
thin film
piezoelectric thin
long side
cantilever beam
sides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57199621A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0439233B2 (OSRAM
Inventor
Katsuhiro Kinoshita
木下　勝裕
Masaki Teshigahara
勅使川原　正樹
Mitsutaka Kato
加藤　充孝
Seisuke Hinota
日野田　征佑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Tateisi Electronics Co
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tateisi Electronics Co, Omron Tateisi Electronics Co filed Critical Tateisi Electronics Co
Priority to JP57199621A priority Critical patent/JPS5988618A/ja
Publication of JPS5988618A publication Critical patent/JPS5988618A/ja
Publication of JPH0439233B2 publication Critical patent/JPH0439233B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Pressure Sensors (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
JP57199621A 1982-11-12 1982-11-12 片持梁の製造方法 Granted JPS5988618A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57199621A JPS5988618A (ja) 1982-11-12 1982-11-12 片持梁の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57199621A JPS5988618A (ja) 1982-11-12 1982-11-12 片持梁の製造方法

Publications (2)

Publication Number Publication Date
JPS5988618A true JPS5988618A (ja) 1984-05-22
JPH0439233B2 JPH0439233B2 (OSRAM) 1992-06-26

Family

ID=16410891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57199621A Granted JPS5988618A (ja) 1982-11-12 1982-11-12 片持梁の製造方法

Country Status (1)

Country Link
JP (1) JPS5988618A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6408496B1 (en) * 1997-07-09 2002-06-25 Ronald S. Maynard Method of manufacturing a vibrational transducer
US20130214877A1 (en) * 2012-02-21 2013-08-22 International Business Machines Corporation Switchable filters and design structures

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6408496B1 (en) * 1997-07-09 2002-06-25 Ronald S. Maynard Method of manufacturing a vibrational transducer
US20130214877A1 (en) * 2012-02-21 2013-08-22 International Business Machines Corporation Switchable filters and design structures
US9225311B2 (en) * 2012-02-21 2015-12-29 International Business Machines Corporation Method of manufacturing switchable filters
US10020789B2 (en) 2012-02-21 2018-07-10 International Business Machines Corporation Switchable filters and design structures
US10164596B2 (en) 2012-02-21 2018-12-25 Smartsens Technology (Cayman) Co., Ltd. Switchable filters and design structures
US10164597B2 (en) 2012-02-21 2018-12-25 Smartsens Technology (Cayman) Co., Ltd. Switchable filters and design structures
US10277188B2 (en) 2012-02-21 2019-04-30 Smartsens Technology (Cayman) Co., Ltd. Switchable filters and design structures

Also Published As

Publication number Publication date
JPH0439233B2 (OSRAM) 1992-06-26

Similar Documents

Publication Publication Date Title
JP4533934B2 (ja) 振動片及び振動子の製造方法
JP2011004035A (ja) 屈曲振動片および屈曲振動片の製造方法
JP7307029B2 (ja) 圧電デバイス及び圧電デバイスの製造方法
TW305944B (OSRAM)
JP3844213B2 (ja) 圧電振動片の製造方法、フォトマスク、圧電振動片および圧電デバイス
JP3910333B2 (ja) ガルバノマイクロミラーとその製造方法
JP2009222900A (ja) 捩り梁、光走査装置および画像形成装置
US20230126632A1 (en) Method For Manufacturing Vibration Element
JPS5988618A (ja) 片持梁の製造方法
JP4010218B2 (ja) 圧電振動片の製造方法
CN114221631A (zh) 谐振器及其制备方法、滤波器
JP4060699B2 (ja) 水晶振動子の製造方法
US12542531B2 (en) Method for manufacturing vibration element
WO2023135853A1 (ja) トランスデューサ
JP3230359B2 (ja) 共振型振動素子
JPH10300762A (ja) カンチレバーの製造方法
JPH10339638A (ja) 角速度センサ
CN114132892A (zh) 一种moems微镜的制备方法
JP2022079131A (ja) 振動デバイス及び振動デバイスの製造方法
JPH0329206B2 (OSRAM)
WO2004011366A1 (ja) マイクロマシンおよびその製造方法
CN1973435B (zh) 石英器件和石英器件的制造方法
JPH11346137A (ja) 水晶振動子の製造方法
JP2014209706A (ja) 振動子の製造方法
JP2024046887A (ja) デバイスの製造方法