JPS5987139U - 半導体ウエ−ハのピツチ変換装置 - Google Patents

半導体ウエ−ハのピツチ変換装置

Info

Publication number
JPS5987139U
JPS5987139U JP18170482U JP18170482U JPS5987139U JP S5987139 U JPS5987139 U JP S5987139U JP 18170482 U JP18170482 U JP 18170482U JP 18170482 U JP18170482 U JP 18170482U JP S5987139 U JPS5987139 U JP S5987139U
Authority
JP
Japan
Prior art keywords
semiconductor wafers
slits
semiconductor wafer
conversion device
pitch conversion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18170482U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6218040Y2 (enrdf_load_stackoverflow
Inventor
章 岩山
Original Assignee
日本電気ホームエレクトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気ホームエレクトロニクス株式会社 filed Critical 日本電気ホームエレクトロニクス株式会社
Priority to JP18170482U priority Critical patent/JPS5987139U/ja
Publication of JPS5987139U publication Critical patent/JPS5987139U/ja
Application granted granted Critical
Publication of JPS6218040Y2 publication Critical patent/JPS6218040Y2/ja
Granted legal-status Critical Current

Links

JP18170482U 1982-11-30 1982-11-30 半導体ウエ−ハのピツチ変換装置 Granted JPS5987139U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18170482U JPS5987139U (ja) 1982-11-30 1982-11-30 半導体ウエ−ハのピツチ変換装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18170482U JPS5987139U (ja) 1982-11-30 1982-11-30 半導体ウエ−ハのピツチ変換装置

Publications (2)

Publication Number Publication Date
JPS5987139U true JPS5987139U (ja) 1984-06-13
JPS6218040Y2 JPS6218040Y2 (enrdf_load_stackoverflow) 1987-05-09

Family

ID=30393684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18170482U Granted JPS5987139U (ja) 1982-11-30 1982-11-30 半導体ウエ−ハのピツチ変換装置

Country Status (1)

Country Link
JP (1) JPS5987139U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016213459A (ja) * 2015-04-30 2016-12-15 環球晶圓股▲ふん▼有限公司 ウエハ移し換え装置及びウエハ移し換え方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016213459A (ja) * 2015-04-30 2016-12-15 環球晶圓股▲ふん▼有限公司 ウエハ移し換え装置及びウエハ移し換え方法

Also Published As

Publication number Publication date
JPS6218040Y2 (enrdf_load_stackoverflow) 1987-05-09

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