JPS6218040Y2 - - Google Patents
Info
- Publication number
- JPS6218040Y2 JPS6218040Y2 JP18170482U JP18170482U JPS6218040Y2 JP S6218040 Y2 JPS6218040 Y2 JP S6218040Y2 JP 18170482 U JP18170482 U JP 18170482U JP 18170482 U JP18170482 U JP 18170482U JP S6218040 Y2 JPS6218040 Y2 JP S6218040Y2
- Authority
- JP
- Japan
- Prior art keywords
- pitch
- wafers
- slits
- jig
- slide plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 46
- 239000011295 pitch Substances 0.000 claims description 41
- 238000006243 chemical reaction Methods 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 102100025490 Slit homolog 1 protein Human genes 0.000 description 1
- 101710123186 Slit homolog 1 protein Proteins 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18170482U JPS5987139U (ja) | 1982-11-30 | 1982-11-30 | 半導体ウエ−ハのピツチ変換装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18170482U JPS5987139U (ja) | 1982-11-30 | 1982-11-30 | 半導体ウエ−ハのピツチ変換装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5987139U JPS5987139U (ja) | 1984-06-13 |
| JPS6218040Y2 true JPS6218040Y2 (enrdf_load_stackoverflow) | 1987-05-09 |
Family
ID=30393684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18170482U Granted JPS5987139U (ja) | 1982-11-30 | 1982-11-30 | 半導体ウエ−ハのピツチ変換装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5987139U (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI663671B (zh) * | 2015-04-30 | 2019-06-21 | 環球晶圓股份有限公司 | 晶圓轉換裝置及其晶圓轉換方法 |
-
1982
- 1982-11-30 JP JP18170482U patent/JPS5987139U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5987139U (ja) | 1984-06-13 |
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