JPS5985122A - Piezoelectric oscillator - Google Patents

Piezoelectric oscillator

Info

Publication number
JPS5985122A
JPS5985122A JP19442082A JP19442082A JPS5985122A JP S5985122 A JPS5985122 A JP S5985122A JP 19442082 A JP19442082 A JP 19442082A JP 19442082 A JP19442082 A JP 19442082A JP S5985122 A JPS5985122 A JP S5985122A
Authority
JP
Japan
Prior art keywords
metal
substrate
terminal
solder
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19442082A
Other languages
Japanese (ja)
Inventor
Kunio Sasaki
邦夫 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Crystal Device Corp
Original Assignee
Kyocera Crystal Device Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Crystal Device Corp filed Critical Kyocera Crystal Device Corp
Priority to JP19442082A priority Critical patent/JPS5985122A/en
Publication of JPS5985122A publication Critical patent/JPS5985122A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/0504Holders; Supports for bulk acoustic wave devices
    • H03H9/0509Holders; Supports for bulk acoustic wave devices consisting of adhesive elements
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/0504Holders; Supports for bulk acoustic wave devices
    • H03H9/0514Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To reduce the manufacture cost by adopting an air-tight base made of an insulating base both sides of which a metallic layer is provided. CONSTITUTION:After a needle-shape terminal 41 is pressed into a through-hole 31 to a substrate [(a) is front side and (b) is back side], a metallic foil 32 and a head of a terminal 41 are soldered. A high temperature solder having >=300 deg.C of melting point is used as the solder. A piezoelectric element made of a crystal substrate provided with electrodes is mounted on the base obtained in this way. That is, the crystal plate 52 as the piezoelectric element is placed on the crystal base 51 and its electrode 53 is connected to the terminal 41 by a conductive adhesives 54. The piezoelectric element like this is mounted onto a lead 42 of the terminal by inserting a ring 62 made of a heat resistant and insulating resin such as ''Teflon'' or phenolic resin thereto and placing a solder sheet 71 for sealing. The oscillator assembled in this way is heated at about 200 deg.C in nitrogen environment so as to melt the sealing solder sheet 71 and the inner wall of a metallic can 61 and a metal foil 36 of the back side of the substrate are bonded.

Description

【発明の詳細な説明】 本発明は圧電振動子、特に圧′屯素子を収容するケース
の構造に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a piezoelectric vibrator, particularly to the structure of a case that houses a piezoelectric element.

従来水晶等の圧電振動子は、安定度の高い振動子として
用いられる性質上、圧電、基板を気密性の高いケースに
収容して用いるのが常であった。
Conventionally, a piezoelectric vibrator such as a crystal is used as a highly stable vibrator, and therefore, the piezoelectric vibrator and the substrate are usually housed in a highly airtight case.

第1図にとのT5+1の圧側、振動子を示す。図におい
て、ケースは気密ベース11と金属カン12とがらなシ
、内部に例えば水晶からなる圧電素子を収容した後排気
し、貢窒にするか例えばN2等の不活性ガス雰囲気とし
て、気密ベース11とカン12とを半EJ1tたは抵抗
溶接で接合する。この気密ベース11は、第2図に示す
ように外周部を形成する金属リング21、中心部に貫通
ずる金属端子22およびこれらの間を埋めるガラス部分
23がらなり、金属部分に酸化被膜を設はゾむうぇでガ
ラス粉末をプレス成形し、これらを還元雰囲気中で60
0〜700℃に加温し、ガラスを溶融して作られる。
FIG. 1 shows the pressure side of T5+1 and the vibrator. In the figure, the case is made up of an airtight base 11 and a metal can 12, and after a piezoelectric element made of, for example, crystal is housed inside, it is evacuated and the airtight base 11 is placed in an atmosphere of nitrogen or an inert gas such as N2. The can 12 is joined by semi-EJ1t or resistance welding. As shown in FIG. 2, this airtight base 11 consists of a metal ring 21 forming the outer periphery, a metal terminal 22 penetrating through the center, and a glass portion 23 filling the space between them. Glass powder is press-molded in Zomuwe, and these are heated for 60 minutes in a reducing atmosphere.
It is made by heating the glass to 0-700℃ and melting it.

したがって、その気密性は非常に高く、現在量もすぐれ
たケースといえる。
Therefore, it can be said that the airtightness is very high and the current quantity is also excellent.

しかしながら、圧電素子は本来非常に安定度の高いもの
であるため、必ずしもそのすべてをこのようなガラス利
用の気密ベースを用いたケースに収容して使用する必要
はなく、振動周波数のエージング特性を問題にしない場
合にtよ、通常電極として用いられる銀の電極が硫化し
、変質することを防ぐことができ、また水晶の振動に重
大な影響を−りえる程の著しい湿度分の進入を防ぐこと
ができれば実用上は差支えない。
However, since piezoelectric elements are inherently very stable, it is not necessary to use them all in a case with an airtight base made of glass. If not, it can prevent the silver electrodes normally used as electrodes from becoming sulfurized and deteriorating in quality, and also prevent the entry of significant moisture that can seriously affect the vibration of the crystal. There is no practical problem if it can be done.

本発明はこのような事情に鑑みてなされたもので、その
目的は製造コストを大幅に吐減できる圧電振動子を提供
することにある。
The present invention has been made in view of these circumstances, and its purpose is to provide a piezoelectric vibrator that can significantly reduce manufacturing costs.

このような目的を達成するために、本発明は表面に金属
層を付した絶縁性基板からなる気密ベースを用いたもの
である。
To achieve this object, the present invention uses an airtight base made of an insulating substrate with a metal layer on its surface.

以下、実施例を用いて本発明の詳細な説明する。Hereinafter, the present invention will be explained in detail using Examples.

第3図は、フェノール寸たはエポキシ等の樹脂からなる
絶縁性基板の表面に銅箔等の金属箔を設けたいわゆるプ
リント配糾!用基板である。同図(a)は、ケースとし
て組立てられた時に内側になる表面、同図(b)は裏面
を示し、今月端子を通すための貫通穴31を有している
。表面について、32は金属箔の部分、33は電気的な
短絡を防止するために外周に沿って金属箔を除去した部
分、34目、金属箔部分を2分割するために金属箔を除
去した部分である。また、裏面について、35は端子用
貫通穴31の周囲の金属箔を除去した部分、36は金8
箔の部分である。又、同図(c)は図(b)の実MII
例において半田の流れを防止するために絶縁板の金属箔
36の周縁部38を残して半田レジスト3γを塗布した
ものである。
Figure 3 shows a so-called print layout in which metal foil such as copper foil is provided on the surface of an insulating substrate made of resin such as phenol or epoxy! This is a board for use. FIG. 4A shows the inner surface when assembled as a case, and FIG. Regarding the surface, 32 is the metal foil part, 33 is the part where the metal foil is removed along the outer periphery to prevent electrical short circuits, and 34th is the part where the metal foil is removed to divide the metal foil part into two. It is. Also, regarding the back side, 35 is the part where the metal foil around the terminal through hole 31 has been removed, and 36 is the gold 8
This is the foil part. In addition, the same figure (c) is the actual MII of figure (b).
In this example, a solder resist 3γ is applied to the peripheral edge 38 of the metal foil 36 of the insulating plate to prevent solder from flowing.

このような基板に対し、第4図に示すように釘状の端子
41を貫通穴31に圧入した後、金属箔部分32と上記
端子41の頭部とを半田により接着する。この時の半田
はrptp点が300℃以上の高温半田を使用し、自動
半田伺装置゛1tを用いで均−IF。
After a nail-shaped terminal 41 is press-fitted into the through hole 31 of such a board as shown in FIG. 4, the metal foil portion 32 and the head of the terminal 41 are bonded together with solder. At this time, high-temperature solder with an RPTP point of 300°C or higher was used, and it was uniformly IFed using an automatic soldering device 1T.

かつ金属箔部分全体に半田を伺着させるようにする。こ
れは基板表面の熱容量を大きクシ、後に圧電振動子を外
部機器に半田付けする際などに端子のリード部分42を
加熱しても表面の半田が溶融するのを防ぐ効果を有する
Also, the solder should be applied to the entire metal foil part. This has the effect of increasing the heat capacity of the substrate surface and preventing the solder on the surface from melting even if the lead portion 42 of the terminal is heated later when the piezoelectric vibrator is soldered to an external device.

このようにしてVeられたベースに、例えば水晶基板に
電極を付してなる圧電素子をマウントする。
A piezoelectric element formed by attaching electrodes to a quartz crystal substrate, for example, is mounted on the Ve base thus obtained.

例えば、第5図に示すように水晶の基板51に圧電素子
としての水晶板52を載せ、その電極53を導電性接着
剤54により端子41に接続する。
For example, as shown in FIG. 5, a crystal plate 52 as a piezoelectric element is placed on a crystal substrate 51, and its electrode 53 is connected to the terminal 41 using a conductive adhesive 54.

ここで水晶の基板51を介在させるのけ、外部から端子
41を通って伝わる熱および膨張係数の差による歪の影
響が直接水晶板52に及ばないようにするためである。
The purpose of interposing the crystal substrate 51 here is to prevent the effects of heat transmitted from the outside through the terminals 41 and distortion due to differences in expansion coefficients from directly affecting the crystal plate 52.

第6図は、このような圧電素子をマウントしたベースを
金J%カン61に圧入した様子を示したものであるが、
端子のリード部分42に、テフロンやフェノール等の耐
熱・絶縁性樹脂からなるリング62を挿入し、ここにさ
らに第7図に示すような封止用の半田シート71を載せ
る。半田シート71は、半田を厚さ0.3町程度のシー
ト状に圧延したものから形抜きしたもので、リング62
を避けるためにその外径より若干大きく開けた穴T2を
有する。
Figure 6 shows how the base on which such a piezoelectric element is mounted is press-fitted into the gold J% ring 61.
A ring 62 made of heat-resistant and insulating resin such as Teflon or phenol is inserted into the lead portion 42 of the terminal, and a sealing solder sheet 71 as shown in FIG. 7 is placed thereon. The solder sheet 71 is formed by rolling solder into a sheet with a thickness of about 0.3 cm and cutting it out.
In order to avoid this, the hole T2 is made slightly larger than the outer diameter of the hole T2.

このようにセツテングされた振動子を、窒素雰囲気中で
約200℃に加熱して封止用半田シート71を溶かし、
金属カン61の内壁と基板裏面の全5属箔部分36とを
接合し封止する。又、他の方法として、第3図(c)の
基板を用いれば、基板周縁部38と金属カン61との境
界部にペースト状半田を塗布し、加熱溶融する方法があ
る。この場合、半田はレジス)37によシ基板中央部に
流れ出すことがない。
The vibrator thus set is heated to about 200° C. in a nitrogen atmosphere to melt the sealing solder sheet 71.
The inner wall of the metal can 61 and all five metal foil portions 36 on the back surface of the substrate are bonded and sealed. Another method is to apply a paste-like solder to the boundary between the substrate periphery 38 and the metal can 61 and heat and melt it, if the substrate shown in FIG. 3(c) is used. In this case, the solder does not flow out to the center of the board due to the resist 37.

このような封止をすることにより、通常の使用には全く
問題のない気密ケースを備えた圧電振動子を構成するこ
とができる。すなわち、気密ベースを構成スる基板はフ
ェノール、エポキシ等の樹脂ではあるが、その表裏面の
大部分は最も信頼性の高い気密材料である金瀉によって
十買われておシ、かつ端子と基板、および基板と金属カ
ンとのシールも半田で行なわれているだめ、l’、ii
j度分等が基板而に垂直に偵:zl(L Lで’+1(
71人することかたいことによる。このように、上述し
たよう々((・?成でも実用上十分な信頼1′jユが得
られるが、樹脂の吸湿性−\の対策としてさらに万全を
刻す%:、合になよ、基板裏面の金属箔除去部分35に
ついて」、常水シリコン等を塗布してもよい、。
By performing such sealing, it is possible to construct a piezoelectric vibrator equipped with an airtight case that causes no problems in normal use. In other words, although the board that makes up the airtight base is made of resin such as phenol or epoxy, most of its front and back surfaces are made of gold, which is the most reliable airtight material, and the terminals and board , and the sealing between the board and the metal can is also done with solder, l', ii
j degrees etc. are perpendicular to the substrate: zl(L L'+1(
It depends on what 71 people do. In this way, as mentioned above, sufficient reliability can be obtained for practical use, but even more thorough measures must be taken as a countermeasure against the hygroscopicity of the resin. Regarding the metal foil removed portion 35 on the back side of the substrate, it is also possible to apply water silicone or the like.

第8図は、第6(シ1に示しだ絶縁性のリング62の代
りに耐熱性の樹脂からなり2つの端子を挿入する2つの
貫通穴を備えだ絶縁板81を用いた例である。この場合
は、金属カン61と絶縁板81との間に溝82ができる
だめ、この溝82に通常の糸状半田を挿入して加熱Wj
 IN’!するが、第6図に示した場合と比イサ(シて
半8]付けの信頼性が増す。
FIG. 8 shows an example in which an insulating plate 81 made of heat-resistant resin and provided with two through holes into which two terminals are inserted is used instead of the insulating ring 62 shown in FIG. In this case, since a groove 82 is formed between the metal can 61 and the insulating plate 81, ordinary filamentous solder is inserted into this groove 82 and heated Wj.
IN'! However, compared to the case shown in FIG. 6, the reliability of the cutter attachment is increased.

又、この場合も絶縁基板は第31f4(c)の半田レジ
ストを塗布したものを用いた方が半田が金属箔36と絶
豚板81の間に流れ込む心配がない。27”:91図は
この場合のシール後の断面構造を示したもので、金属カ
ン61は肉)Phiが0.15門、気密ベースを(′1
¥成する絶縁性基板91は厚さ1.Oan、同じく金属
箔部分92の厚さは0.05i++b、端子41の頭部
の直径は2.5t=+h、同じくリード部分42の直径
は0.4−1絶縁板81の厚さは0.8 +rxである
。93は端子41を金属箔部分92に接着した半田、9
4は金属カン61の内壁と金に1箔部分92とを封じた
半田を示す。ここで、矢印A(4二湿分の侵入経路を示
すが、気密ベースの板面に鋸直ではなく5.むしろ平行
に近い。もしとの湿分を防ぐ必要がある場合には、裏面
の金属箔の除去された端子周囲部分95に撥水シリコン
等を塗布すればよい。
Also in this case, it is better to use an insulating substrate coated with the solder resist No. 31f4(c) so that there is no fear that the solder will flow between the metal foil 36 and the dead plate 81. 27": Figure 91 shows the cross-sectional structure after sealing in this case. The metal can 61 has a flesh) Phi of 0.15, and the airtight base
The insulating substrate 91 has a thickness of 1. Oan, the thickness of the metal foil portion 92 is 0.05i++b, the diameter of the head of the terminal 41 is 2.5t=+h, the diameter of the lead portion 42 is 0.4-1, and the thickness of the insulating plate 81 is 0. 8 + rx. 93 is solder that adheres the terminal 41 to the metal foil portion 92;
4 shows solder that seals the inner wall of the metal can 61 and the gold foil portion 92. Here, arrow A (2) indicates the path of moisture intrusion, but it is not straight to the plate surface of the airtight base, but is rather close to parallel.If it is necessary to prevent moisture from entering, Water-repellent silicone or the like may be applied to the terminal surrounding portion 95 from which the metal foil has been removed.

なお、上述した実施例におい−Cは釘状の端子41を用
いた場合についてのみ説=Jt、だが、本発明はこれし
て限定されるものではなく、例えば第10図のように端
子100の頭部を成形加工し、圧電水子1旧のマウント
を容易にしたものも実用上有用である。図示の例ではリ
ード部分102は丸棒状である。才だ、端子の数は2本
に限定されるものではなく、金属カンを電気的端子の1
つとして兼用することによ91本で足りるもの、複数の
圧電素子を収容するために3本以上有するもの等にオー
いても全く同様に本発明を適用することができる。
In the above-mentioned embodiment, -C is the theory = Jt only for the case where the nail-shaped terminal 41 is used, but the present invention is not limited to this, and for example, as shown in FIG. It is also useful for practical use to mold the head to make it easier to mount the old Piezoelectric Suiko 1. In the illustrated example, the lead portion 102 has a round bar shape. However, the number of terminals is not limited to two, and a metal can can be used as one of the electrical terminals.
The present invention can be applied in exactly the same way to a device in which 91 pieces are sufficient because the piezoelectric device is used as one piezoelectric device, or a device in which 3 or more pieces are provided to accommodate a plurality of piezoelectric elements.

以」二の説明は、いわゆるプリント配線用基板を用いて
気密ベースを(1?成する場合を例に行なったが、絶縁
性基板としてi−tセラミック基板を用いてもよい。こ
の場合は、金属層は通常(Fビラジウム等をスクリーン
印刷および焼料けの手法を用いて被着させることにより
形成することができる。セラミック基板を用いた場合は
、通気性がないだめ真空中での封止も可能である。
The following explanation is based on the case where a so-called printed wiring board is used to form an airtight base, but an IT ceramic board may also be used as the insulating board. In this case, The metal layer can usually be formed by depositing (F-viradium, etc.) using screen printing and baking methods. If a ceramic substrate is used, it must be sealed in a vacuum because it is not breathable. is also possible.

咬だ、使用環境が良好である場合などには、第11図に
示すように気密ベースの絶縁性基板111の裏面外縁部
のみに金属層112を被着した第19成とし、この金属
層112において金属カンと半田によシ接合しても良い
。この場合、半田が流れて貫通穴113,114に挿入
した両端子を短絡することがないようにすれば、リング
62、絶縁板81のような絶縁性部材は省略することも
可能である。
However, if the usage environment is favorable, the metal layer 112 is coated only on the outer edge of the back surface of the airtight base insulating substrate 111 as shown in FIG. It is also possible to join the metal can with solder. In this case, insulating members such as the ring 62 and the insulating plate 81 can be omitted if the solder does not flow and short-circuit the terminals inserted into the through holes 113 and 114.

さらに、圧電素子は第10図に示しだような両端部にベ
ベル加工を施した短冊状のもの、もしくは丸板形、角板
形、その他いずれの形状の素子について適用しても同様
の効果が得られることは言うまでもない。
Furthermore, the same effect can be obtained even if the piezoelectric element is applied to a rectangular element with beveled ends on both ends as shown in Figure 10, or to a round plate shape, a square plate shape, or any other shape. It goes without saying that you can get it.

以上説明したように、本発明によれば、両面に金属層を
配した絶仔性基板から吃る気密ベースを用いたことによ
り、実用上十分な性能を有する1、E電振動子を安価に
得ることができる。゛また、気密ベースと金属カンとの
捌じは加熱炉中で多数を同時に行なうことができるだめ
生産性にもすぐれ、実用上きわめて有用である。
As explained above, according to the present invention, by using an airtight base made of a durable substrate with metal layers on both sides, a 1.E electric vibrator having practically sufficient performance can be produced at a low cost. Obtainable. Furthermore, since the airtight base and the metal can can be separated in large numbers at the same time in a heating furnace, productivity is excellent and it is extremely useful in practice.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図d、従来の圧電振動子の1jf;成例を示す斜視
図、?:I’y 2図はその気密ベースを示す亦i視図
、第3図(、)は本発明の一実施例における気密ベース
を構成する絶縁性基板を示す平面図、同図(b)は同じ
く底面図、i刊3図(C)は他の’5% M(H例の同
じく底面図、第4図はy・ν4子を挿入した気密ベース
、第5図は圧電素子をマウントL、た状1バ8.を示す
断面図、第6図は金、属カンを装着しだ状な1け示す斜
視図、第7図は側面用の半ヒ]シー1・を示す斜視図、
第8図は他の封止例を示干彊視図1、第9図は同じく断
面図1、第10図は?゛j1子の他のイ苦成例を示すつ
[イji!図、2+!: 11 r骨”−n”2 tL
性基板の他の構成例を示す底面1シ1である。 31.113,114・・・・ごシ)、′、!−f−を
挿入する貫通穴、32.36.92・・・・ぐjンλ・
]汀[5部分(金属層)、33゜34.35 ・・・・
金JJ”i箔除去部分(絶縁性基板)、41.100・
・・・j’il:l子、42,102・會・参り−ド部
分、52・・・・水晶板(圧111.ゼ、六子)、53
” ” ” ” ’iij:ti’i(、b 1. a
 * e *金ル4カン、62@Q・・絶((i (’
l−’)ング(絶縁性部材)、71・・・・封止用半日
−1シート、81・・・・絶縁板(絶縁性(ηIS利9
.91,111 ・・・・絶H性基板、101・・・・
圧’ii索子、112・・・・金属層。 特許出願人  ヤンセキ株式会社 代理力 山用政i1t’t4 (ζゴ・1名)第1図 
    第2図 第3図 第4図     第5図 第8図      第9図 第10図 1zIIJ
FIG. 1d is a perspective view showing an example of a conventional piezoelectric vibrator. :I'y Figure 2 is a perspective view showing the airtight base, Figure 3 (,) is a plan view showing the insulating substrate constituting the airtight base in an embodiment of the present invention, and Figure (b) is a Similarly, the bottom view, Figure 3 (C) of the i issue, is the same bottom view of the other '5% M (H example, Figure 4 is the airtight base with the y/ν4 element inserted, Figure 5 is the piezoelectric element mounted L, Fig. 6 is a perspective view showing a metal ring with a metal ring attached, Fig. 7 is a perspective view showing a side half-shield 1.
Fig. 8 shows another example of sealing.゛j1 I will show you another example of ``Iji!'' Figure, 2+! : 11 r bone”-n”2 tL
1 is a bottom surface 1 illustrating another example of the structure of a flexible substrate. 31.113,114...gosi),',! -f- is inserted through hole, 32.36.92...gun λ・
]Shi [5 parts (metal layer), 33°34.35...
Gold JJ" i foil removed part (insulating substrate), 41.100.
... j'il: l child, 42, 102, meeting, pilgrimage part, 52... crystal plate (pressure 111. ze, six children), 53
” ” ” ” 'iij:ti'i(, b 1. a
*e *Kinru 4 Kan, 62@Q...zetsu((i ('
l-') ng (insulating member), 71...Half day-1 sheet for sealing, 81...Insulating plate (insulating (ηIS utilization 9)
.. 91,111... Absolutely H-resistant substrate, 101...
pressure'ii cord, 112...metal layer. Patent applicant: Yanseki Co., Ltd. Agency: Masa Yamayo i1t't4 (ζgo・1 person) Figure 1
Figure 2 Figure 3 Figure 4 Figure 5 Figure 8 Figure 9 Figure 10 Figure 1zIIJ

Claims (1)

【特許請求の範囲】 (1,1圧電基板に電4\を設りた圧電素子を、金属カ
ンと気密ベースとからなるケースに収容してなる圧電振
動子において、気密ベースは両面に金属層を有する絶縁
性基板と、この絶縁性基板に設けた貫通穴に挿入されか
つ当該(=1基板の一面で貫通穴周囲の金属層に半田付
けされた金属端子とを備え、上記絶縁性基板は他面外H
部に金属カンと接合するだめの金8層をイd′↑えたこ
とを特徴とする圧電振動子。 (2)圧電基板に電極を設けた圧電素子を、金属カンと
気密ベースからなるケースに収容してなる圧電に挿入さ
れかつ当該絶縁性基板の一面でYt通大穴周囲金、用層
に半田付けされた金属端子と、上記絶縁性基板の他面で
金属端子の周囲に配置された絶縁性部材と力・らなシ、
上記絶縁性基板は他面外縁部にイη打えた金属層におい
て金属カンに半田により接合されたことを特徴とする圧
11℃振動子。
[Claims] (In a piezoelectric vibrator in which a piezoelectric element in which an electric conductor 4\ is provided on a 1,1 piezoelectric substrate is housed in a case consisting of a metal can and an airtight base, the airtight base has metal layers on both sides. and a metal terminal inserted into a through hole provided in the insulating substrate and soldered to a metal layer around the through hole on one surface of the substrate Other side outside H
A piezoelectric vibrator characterized by having 8 layers of gold attached to the metal ring in the part. (2) A piezoelectric element with electrodes provided on a piezoelectric substrate is inserted into a piezoelectric device that is housed in a case consisting of a metal can and an airtight base, and soldered to the metal layer surrounding the large Yt hole on one side of the insulating substrate. a metal terminal, and an insulating member placed around the metal terminal on the other side of the insulating substrate,
A pressure 11° C. vibrator characterized in that the insulating substrate is joined to a metal can by soldering at a metal layer with an indentation on the outer edge of the other surface.
JP19442082A 1982-11-05 1982-11-05 Piezoelectric oscillator Pending JPS5985122A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19442082A JPS5985122A (en) 1982-11-05 1982-11-05 Piezoelectric oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19442082A JPS5985122A (en) 1982-11-05 1982-11-05 Piezoelectric oscillator

Publications (1)

Publication Number Publication Date
JPS5985122A true JPS5985122A (en) 1984-05-17

Family

ID=16324302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19442082A Pending JPS5985122A (en) 1982-11-05 1982-11-05 Piezoelectric oscillator

Country Status (1)

Country Link
JP (1) JPS5985122A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02228110A (en) * 1989-03-01 1990-09-11 Hirai Seimitsu:Kk Package structure of crystal resonator

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5418294A (en) * 1977-07-11 1979-02-10 Nippon Denpa Kogyo Kk Piezooelectric vibrator

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5418294A (en) * 1977-07-11 1979-02-10 Nippon Denpa Kogyo Kk Piezooelectric vibrator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02228110A (en) * 1989-03-01 1990-09-11 Hirai Seimitsu:Kk Package structure of crystal resonator

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