JPS5976562U

JPS5976562U - spray etching equipment

Info

Publication number: JPS5976562U
Application number: JP17044382U
Authority: JP
Inventors: 池端　昌夫; 柴田　勲夫; 泰男井口; 裕子林
Original assignee: 沖電気工業株式会社
Priority date: 1982-11-12
Filing date: 1982-11-12
Publication date: 1984-05-24

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１図は従来のスプレーエツチング装置の断面図、第２
図はこの考案のスプレーエツチング装置の第１の実施例
の構成を示す断面図、第３図はこの考案のスプレーエツ
チング装置の第２の実施例の構成を示す断面図、第４図
はこの考案のスプレーエツチング装置の第３の実施例の
概略図、第５図はこの考案のスプレーエツチング装置の
第４の実施例の概略図である。１１・・・エツチング槽、１２，２２・・・エツチング
　　　　　。液、１３・・・ポンプ、１４，３５，４４・・・ノズル
、１５、　２５．　３２・・・試料台、１６．　３７．
　４３・・・被エツチング物、１７．２７・・・試料台
固定板、２８・・・防水機構、２９．３６・・・モータ
ー、３１・・・蓋、３２．４２・・・円板状試料台、３
３・・・駆動用回転板、３４．４１・・・ガイドレール
。Figure 1 is a sectional view of a conventional spray etching device, Figure 2 is a sectional view of a conventional spray etching device;
The figure is a sectional view showing the structure of the first embodiment of the spray etching apparatus of this invention, FIG. 3 is a sectional view showing the structure of the second embodiment of the spray etching apparatus of this invention, and FIG. FIG. 5 is a schematic diagram of a third embodiment of the spray etching apparatus according to the present invention, and FIG. 5 is a schematic diagram of a fourth embodiment of the spray etching apparatus of this invention. 11... Etching tank, 12, 22... Etching. Liquid, 13... Pump, 14, 35, 44... Nozzle, 15, 25. 32...sample stage, 16. 37.
43...Object to be etched, 17.27...Sample stage fixing plate, 28...Waterproof mechanism, 29.36...Motor, 31...Lid, 32.42...Disc-shaped sample stand, 3
3... Rotating plate for drive, 34.41... Guide rail.

Claims

[Scope of utility model registration request]

A nozzle is provided in an etching tank and sprays an etching liquid, and the etching liquid flows forcefully along the surface of the object to be etched at a predetermined slope with respect to the direction of the etching liquid sprayed from the nozzle in the etching tank. A spray etching device comprising means for positioning and holding the object to be etched.