JPS6111979U - Resist coating equipment - Google Patents

Resist coating equipment

Info

Publication number
JPS6111979U
JPS6111979U JP9640684U JP9640684U JPS6111979U JP S6111979 U JPS6111979 U JP S6111979U JP 9640684 U JP9640684 U JP 9640684U JP 9640684 U JP9640684 U JP 9640684U JP S6111979 U JPS6111979 U JP S6111979U
Authority
JP
Japan
Prior art keywords
resist coating
coating equipment
coating
resist
recorded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9640684U
Other languages
Japanese (ja)
Inventor
久 高橋
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP9640684U priority Critical patent/JPS6111979U/en
Publication of JPS6111979U publication Critical patent/JPS6111979U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図、第2図は本考案の実施例の説明図である。 第1図は正面から見た図、第2図は真上から見た図であ
る。 尚、図中、1・・・・・・レジストノズル、2・・・・
・・スピンチyツク、3・・・・・・塗布カップ、、4
・・・・・・洗浄液配管、5・・・;・・排液管、6・
・・排液管フタ、7・・・洗浄液流出口。
FIG. 1 and FIG. 2 are explanatory diagrams of an embodiment of the present invention. FIG. 1 is a view from the front, and FIG. 2 is a view from directly above. In addition, in the figure, 1... resist nozzle, 2...
...Spinch ytsuku, 3...Application cup, 4
...Cleaning liquid piping, 5...; ...Drainage pipe, 6.
... Drain pipe lid, 7... Cleaning liquid outlet.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ウエハ上にレジストを塗布する装置に於いそ、塗布カッ
プ部を洗浄する手段を具備したことを特徴とするレジス
ト塗布装置。
A resist coating device for coating a resist onto a wafer, the device being equipped with a means for cleaning a coating cup portion.
JP9640684U 1984-06-27 1984-06-27 Resist coating equipment Pending JPS6111979U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9640684U JPS6111979U (en) 1984-06-27 1984-06-27 Resist coating equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9640684U JPS6111979U (en) 1984-06-27 1984-06-27 Resist coating equipment

Publications (1)

Publication Number Publication Date
JPS6111979U true JPS6111979U (en) 1986-01-24

Family

ID=30655868

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9640684U Pending JPS6111979U (en) 1984-06-27 1984-06-27 Resist coating equipment

Country Status (1)

Country Link
JP (1) JPS6111979U (en)

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