JPS6111979U - Resist coating equipment - Google Patents
Resist coating equipmentInfo
- Publication number
- JPS6111979U JPS6111979U JP9640684U JP9640684U JPS6111979U JP S6111979 U JPS6111979 U JP S6111979U JP 9640684 U JP9640684 U JP 9640684U JP 9640684 U JP9640684 U JP 9640684U JP S6111979 U JPS6111979 U JP S6111979U
- Authority
- JP
- Japan
- Prior art keywords
- resist coating
- coating equipment
- coating
- resist
- recorded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図、第２図は本考案の実施例の説明図である。
第１図は正面から見た図、第２図は真上から見た図であ
る。
尚、図中、１・・・・・・レジストノズル、２・・・・
・・スピンチｙツク、３・・・・・・塗布カップ、、４
・・・・・・洗浄液配管、５・・・；・・排液管、６・
・・排液管フタ、７・・・洗浄液流出口。FIG. 1 and FIG. 2 are explanatory diagrams of an embodiment of the present invention. FIG. 1 is a view from the front, and FIG. 2 is a view from directly above. In addition, in the figure, 1... resist nozzle, 2...
...Spinch ytsuku, 3...Application cup, 4
...Cleaning liquid piping, 5...; ...Drainage pipe, 6.
... Drain pipe lid, 7... Cleaning liquid outlet.
Claims (1)
プ部を洗浄する手段を具備したことを特徴とするレジス
ト塗布装置。A resist coating device for coating a resist onto a wafer, the device being equipped with a means for cleaning a coating cup portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9640684U JPS6111979U (en) | 1984-06-27 | 1984-06-27 | Resist coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9640684U JPS6111979U (en) | 1984-06-27 | 1984-06-27 | Resist coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6111979U true JPS6111979U (en) | 1986-01-24 |
Family
ID=30655868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9640684U Pending JPS6111979U (en) | 1984-06-27 | 1984-06-27 | Resist coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6111979U (en) |
-
1984
- 1984-06-27 JP JP9640684U patent/JPS6111979U/en active Pending
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