JPS59193859U - Etching device - Google Patents
Etching deviceInfo
- Publication number
- JPS59193859U JPS59193859U JP8666983U JP8666983U JPS59193859U JP S59193859 U JPS59193859 U JP S59193859U JP 8666983 U JP8666983 U JP 8666983U JP 8666983 U JP8666983 U JP 8666983U JP S59193859 U JPS59193859 U JP S59193859U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- etched
- spray nozzle
- etching device
- etches
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図面は本考案の一実施例を示し、第1図は全体の概略構
成を示す縦断面図、第2図は噴射ノズルの縦断面図、第
3図は同底面図である。
図中、2は銅張積層板(被エツチング材)、13は噴射
ノズル、14は噴射口、19は直流電源装置である。The drawings show an embodiment of the present invention, with FIG. 1 being a vertical sectional view showing the overall schematic configuration, FIG. 2 being a vertical sectional view of an injection nozzle, and FIG. 3 being a bottom view thereof. In the figure, 2 is a copper-clad laminate (material to be etched), 13 is an injection nozzle, 14 is an injection port, and 19 is a DC power supply device.
Claims (1)
噴射ノズルとを相対的に移動させて該エツチング材の表
面をエツチングするものにおいて、前記噴射ノズルの噴
射口を前記被エツチング材の前記相対移動方向に対し略
直交するスリット状に定めると共に、前記被エツチング
材側が前記エツチング液に対して正となるよう電圧を印
加することを特徴とするエツチング装置。In a method for etching the surface of the etching material by relatively moving a material to be etched and a spray nozzle for etching liquid that etches the material, the jetting port of the spray nozzle is set relative to the direction of relative movement of the material to be etched. An etching apparatus characterized in that the slits are defined to be substantially orthogonal, and a voltage is applied so that the side of the material to be etched is positive with respect to the etching solution.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8666983U JPS59193859U (en) | 1983-06-06 | 1983-06-06 | Etching device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8666983U JPS59193859U (en) | 1983-06-06 | 1983-06-06 | Etching device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS59193859U true JPS59193859U (en) | 1984-12-22 |
Family
ID=30216600
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8666983U Pending JPS59193859U (en) | 1983-06-06 | 1983-06-06 | Etching device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59193859U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004033384A1 (en) * | 2002-10-11 | 2004-04-22 | Hitachi Zosen Corporation | Method and system for removing thin metal film |
US7544283B2 (en) | 2002-10-11 | 2009-06-09 | Hitachi Zosen Corporation | Method and apparatus for removing thin metal films |
-
1983
- 1983-06-06 JP JP8666983U patent/JPS59193859U/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004033384A1 (en) * | 2002-10-11 | 2004-04-22 | Hitachi Zosen Corporation | Method and system for removing thin metal film |
US7544283B2 (en) | 2002-10-11 | 2009-06-09 | Hitachi Zosen Corporation | Method and apparatus for removing thin metal films |
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