JPS6095991U - cleaning nozzle - Google Patents
cleaning nozzleInfo
- Publication number
- JPS6095991U JPS6095991U JP18681883U JP18681883U JPS6095991U JP S6095991 U JPS6095991 U JP S6095991U JP 18681883 U JP18681883 U JP 18681883U JP 18681883 U JP18681883 U JP 18681883U JP S6095991 U JPS6095991 U JP S6095991U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- cleaning nozzle
- utility
- air injection
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の説明図、第２図は水流と空気噴射層と
の関係を示す説明図、第３図は他の実施例の説明図。
１・・・ウニ六、２・・・噴出ノズル、３・・・空気噴
出一孔、４・・・水の噴出孔、５・・・空気噴出スリッ
ト。FIG. 1 is an explanatory diagram of the present invention, FIG. 2 is an explanatory diagram showing the relationship between water flow and an air injection layer, and FIG. 3 is an explanatory diagram of another embodiment. 1...Six sea urchins, 2...Blowout nozzle, 3...One air blowout hole, 4...Water blowout hole, 5...Air blowout slit.
Claims (1)
いて被加工物表面に向って洗浄水の噴出孔を横に設け、
その下方に加圧空気の噴射孔を横に設けてなる洗浄装置
の洗浄用ノズル―（２） 実用新案登録請求の範囲第
１項の記載において、空気の噴射孔は細孔を横に連続し
て設けて構成される洗浄用ノズル。 （３）実用新案登録請求の範囲第１項の記載において、
空気の噴射孔は横方向に長いスリットを設けて構成され
る洗浄用ノズル。[Claims for Utility Model Registration] (1) In a cleaning device that sprays cleaning water onto a workpiece, a cleaning water jetting hole is provided horizontally toward the surface of the workpiece,
A cleaning nozzle for a cleaning device having a pressurized air injection hole horizontally provided below the nozzle (2) In the statement of claim 1 of the utility model registration, the air injection hole is horizontally continuous with the pores. A cleaning nozzle configured with (3) In the statement in paragraph 1 of the claims for utility model registration,
The air injection hole is a cleaning nozzle with a long horizontal slit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18681883U JPS6095991U (en) | 1983-12-02 | 1983-12-02 | cleaning nozzle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18681883U JPS6095991U (en) | 1983-12-02 | 1983-12-02 | cleaning nozzle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6095991U true JPS6095991U (en) | 1985-06-29 |
Family
ID=30403416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18681883U Pending JPS6095991U (en) | 1983-12-02 | 1983-12-02 | cleaning nozzle |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6095991U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001000336A1 (en) * | 1999-06-24 | 2001-01-04 | Sumitomo Heavy Industries, Ltd. | Method and device for washing by fluid spraying |
| KR100292064B1 (en) * | 1999-05-13 | 2001-06-01 | 황인길 | A nozzle device for a developing process of a semiconductor wafer |
| US7267130B2 (en) | 2000-09-22 | 2007-09-11 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing apparatus |
| US7479205B2 (en) | 2000-09-22 | 2009-01-20 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing apparatus |
| JP2013502307A (en) * | 2009-08-19 | 2013-01-24 | ユニリーバー・ナームローゼ・ベンノートシヤープ | Equipment for washing dough |
-
1983
- 1983-12-02 JP JP18681883U patent/JPS6095991U/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100292064B1 (en) * | 1999-05-13 | 2001-06-01 | 황인길 | A nozzle device for a developing process of a semiconductor wafer |
| WO2001000336A1 (en) * | 1999-06-24 | 2001-01-04 | Sumitomo Heavy Industries, Ltd. | Method and device for washing by fluid spraying |
| US6726777B1 (en) | 1999-06-24 | 2004-04-27 | Sumitomo Heavy Industries Ltd. | Cleaning method and apparatus using fluid spraying |
| US7267130B2 (en) | 2000-09-22 | 2007-09-11 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing apparatus |
| US7428907B2 (en) | 2000-09-22 | 2008-09-30 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing apparatus |
| US7479205B2 (en) | 2000-09-22 | 2009-01-20 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing apparatus |
| JP2013502307A (en) * | 2009-08-19 | 2013-01-24 | ユニリーバー・ナームローゼ・ベンノートシヤープ | Equipment for washing dough |
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