JPS5972732U - Beam lead pellet handling equipment - Google Patents

Beam lead pellet handling equipment

Info

Publication number
JPS5972732U
JPS5972732U JP16711982U JP16711982U JPS5972732U JP S5972732 U JPS5972732 U JP S5972732U JP 16711982 U JP16711982 U JP 16711982U JP 16711982 U JP16711982 U JP 16711982U JP S5972732 U JPS5972732 U JP S5972732U
Authority
JP
Japan
Prior art keywords
beam lead
lead pellet
handling equipment
pellet handling
cleaning tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16711982U
Other languages
Japanese (ja)
Other versions
JPH0341472Y2 (en
Inventor
池田　史麻呂
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP16711982U priority Critical patent/JPS5972732U/en
Publication of JPS5972732U publication Critical patent/JPS5972732U/en
Application granted granted Critical
Publication of JPH0341472Y2 publication Critical patent/JPH0341472Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の方法による洗浄のしくみを説明する概略
図である。第２図は本考案による洗浄のしくみを説明す
る概略図である。 尚、図において、１・・・・・・吸着ノズル、２・・・
・・ゼームリードベレット、３・・・・・・洗浄槽、４
・・・・・・噴霧ノズル、５・・・・・・電磁弁、６・
・・・・・ヒータ、７・・・・・・断熱材、ａ・・・・
・・高圧エア、ｂ・・・・・・トリクレン。FIG. 1 is a schematic diagram illustrating a cleaning mechanism according to a conventional method. FIG. 2 is a schematic diagram illustrating the cleaning mechanism according to the present invention. In addition, in the figure, 1... suction nozzle, 2...
・・・・Seam lead bellet, 3・・・・・・Cleaning tank, 4
... Spray nozzle, 5 ... Solenoid valve, 6.
...Heater, 7...Insulation material, a...
...High pressure air, b...Triclean.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 半導体集積回路素子製造工程におけるビームリードベレ
ットハンドリング装置において、真空によって吸着ノズ
ルに吸着されたビームリードベレットを洗浄槽内でトリ
クレン洗浄する際に、洗浄槽全体をヒーターによって加
熱する構造を有することを特徴とするビームリードベレ
ットのハンドリング装置。A beam lead pellet handling device used in a semiconductor integrated circuit device manufacturing process is characterized by having a structure in which the entire cleaning tank is heated by a heater when the beam lead pellet, which has been vacuum-adsorbed to a suction nozzle, is tricleaned in the cleaning tank. Beam lead pellet handling device.
JP16711982U 1982-11-04 1982-11-04 Beam lead pellet handling equipment Granted JPS5972732U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16711982U JPS5972732U (en) 1982-11-04 1982-11-04 Beam lead pellet handling equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16711982U JPS5972732U (en) 1982-11-04 1982-11-04 Beam lead pellet handling equipment

Publications (2)

Publication Number Publication Date
JPS5972732U true JPS5972732U (en) 1984-05-17
JPH0341472Y2 JPH0341472Y2 (en) 1991-08-30

Family

ID=30365702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16711982U Granted JPS5972732U (en) 1982-11-04 1982-11-04 Beam lead pellet handling equipment

Country Status (1)

Country Link
JP (1) JPS5972732U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5140766A (en) * 1974-10-02 1976-04-05 Nippon Electric Co 33v zokukagobutsuhandotaino hyomenshorihoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5140766A (en) * 1974-10-02 1976-04-05 Nippon Electric Co 33v zokukagobutsuhandotaino hyomenshorihoho

Also Published As

Publication number Publication date
JPH0341472Y2 (en) 1991-08-30

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