JPS5970923A - 振動センサ - Google Patents

振動センサ

Info

Publication number
JPS5970923A
JPS5970923A JP57180726A JP18072682A JPS5970923A JP S5970923 A JPS5970923 A JP S5970923A JP 57180726 A JP57180726 A JP 57180726A JP 18072682 A JP18072682 A JP 18072682A JP S5970923 A JPS5970923 A JP S5970923A
Authority
JP
Japan
Prior art keywords
vibrator
slit
piezoelectric vibrator
electrode
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57180726A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0256619B2 (enrdf_load_stackoverflow
Inventor
Tetsuji Fukada
深田　哲司
Yukihiko Ise
伊勢　悠紀彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57180726A priority Critical patent/JPS5970923A/ja
Priority to EP83107244A priority patent/EP0100501B1/en
Priority to DE8383107244T priority patent/DE3379175D1/de
Publication of JPS5970923A publication Critical patent/JPS5970923A/ja
Publication of JPH0256619B2 publication Critical patent/JPH0256619B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H13/00—Measuring resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP57180726A 1982-07-28 1982-10-14 振動センサ Granted JPS5970923A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP57180726A JPS5970923A (ja) 1982-10-14 1982-10-14 振動センサ
EP83107244A EP0100501B1 (en) 1982-07-28 1983-07-23 Vibration sensor
DE8383107244T DE3379175D1 (en) 1982-07-28 1983-07-23 Vibration sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57180726A JPS5970923A (ja) 1982-10-14 1982-10-14 振動センサ

Publications (2)

Publication Number Publication Date
JPS5970923A true JPS5970923A (ja) 1984-04-21
JPH0256619B2 JPH0256619B2 (enrdf_load_stackoverflow) 1990-11-30

Family

ID=16088227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57180726A Granted JPS5970923A (ja) 1982-07-28 1982-10-14 振動センサ

Country Status (1)

Country Link
JP (1) JPS5970923A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS618630A (ja) * 1984-06-22 1986-01-16 Matsushita Electric Ind Co Ltd 振動センサ
US5003824A (en) * 1989-12-26 1991-04-02 Matsushita Electric Industrial Co., Ltd. Vibration/acceleration sensor
US6111338A (en) * 1993-05-28 2000-08-29 Matsushita Electric Industrial Co., Ltd. Acceleration sensor and method for producing the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS618630A (ja) * 1984-06-22 1986-01-16 Matsushita Electric Ind Co Ltd 振動センサ
US5003824A (en) * 1989-12-26 1991-04-02 Matsushita Electric Industrial Co., Ltd. Vibration/acceleration sensor
US6111338A (en) * 1993-05-28 2000-08-29 Matsushita Electric Industrial Co., Ltd. Acceleration sensor and method for producing the same

Also Published As

Publication number Publication date
JPH0256619B2 (enrdf_load_stackoverflow) 1990-11-30

Similar Documents

Publication Publication Date Title
EP0130705B1 (en) Beam structure for piezoelectric vibrating beam force or pressure sensors
JPH0854411A (ja) 加速度計および製造方法
JPS5970923A (ja) 振動センサ
JPH08247768A (ja) 角速度センサ
JP3257203B2 (ja) 角速度検出素子の振動数調整方法と角速度検出素子
EP0100501B1 (en) Vibration sensor
JPS618630A (ja) 振動センサ
JPS5970924A (ja) 振動センサ
JPH0259647B2 (enrdf_load_stackoverflow)
JPS6032588Y2 (ja) 振動検出器
JPH10185582A (ja) 角速度センサおよびその加振方法
JPS6246266A (ja) 振動センサ
JP2002372421A (ja) 角速度センサ及びその製造方法
EP0592987B1 (en) Vibratory gyroscope
JP4319998B2 (ja) 振動ジャイロの振動子
JP2001133474A (ja) 加速度センサおよびその製造方法
JPH046285B2 (enrdf_load_stackoverflow)
JPS6119554Y2 (enrdf_load_stackoverflow)
JPS5923223A (ja) 振動センサ
GB2126818A (en) Saw resonator
JP3188929B2 (ja) 振動ジャイロの振動体共振周波数の調整方法
JPS63252220A (ja) 角速度センサ
JPH03116882A (ja) 水晶振動子の製造方法
JPH09181547A (ja) 水晶振動子の周波数調整方法および調整治具
JPH095085A (ja) 振動型ジャイロスコープ