JPS5965464A - Semiconductor integrated circuit device - Google Patents
Semiconductor integrated circuit deviceInfo
- Publication number
- JPS5965464A JPS5965464A JP57175073A JP17507382A JPS5965464A JP S5965464 A JPS5965464 A JP S5965464A JP 57175073 A JP57175073 A JP 57175073A JP 17507382 A JP17507382 A JP 17507382A JP S5965464 A JPS5965464 A JP S5965464A
- Authority
- JP
- Japan
- Prior art keywords
- region
- type
- transistor
- power source
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims description 13
- 238000002955 isolation Methods 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 abstract description 9
- 238000010586 diagram Methods 0.000 abstract description 6
- 230000006378 damage Effects 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 3
- 238000009792 diffusion process Methods 0.000 description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 238000000926 separation method Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Bipolar Transistors (AREA)
- Bipolar Integrated Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は半導体集積回路装置に関し、特に印加電源端子
の誤接続時において、半導体集積回路及び電源の破壊を
防止する保護手段を内蔵したものに関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a semiconductor integrated circuit device, and more particularly to one having a built-in protection means for preventing damage to the semiconductor integrated circuit and the power supply when an applied power supply terminal is incorrectly connected.
従来例の構成とその問題点
バイポーラ型半導体集積回路は、トランジスタダイオー
ド、抵抗等の多数の素子を一つのシリコンチップ上に形
成し、これを所望の回路機能を果たすべく相互に接続し
たものであるが、これら素子間の分離方法として、現在
広く用いられている方法にPN接合分離がある。Conventional configurations and their problems A bipolar semiconductor integrated circuit is a circuit in which a large number of elements such as transistors, diodes, and resistors are formed on a single silicon chip, and these are interconnected to perform the desired circuit function. However, as a method for separating these elements, PN junction separation is currently widely used.
この方法の構造を第1図に示す。即ち、第1図は半導体
集積回路で用いられるN P N )ランジスタを例と
してPN接合分離を示しだものであり、同図(8)は平
面図、同図(B)は同平面図のx−x’断面図である。The structure of this method is shown in FIG. That is, FIG. 1 shows PN junction isolation using an N P N transistor used in a semiconductor integrated circuit as an example. FIG. 1 (8) is a plan view, and FIG. -x' sectional view.
図中、1はP型基板、2は前記P型基板1上にトランジ
スタのコレクタ抵抗を下げるために拡散されたN型埋込
拡散領域、3は前記N型埋込拡散領域2が形成された後
、基板上全面にエピタキシャル成長技術により形成され
、NPNトランジスタのコレクタとなるN型エピタキシ
ャル層、4は各素子を個々に分離させるため導入された
P型分離拡散領域、5はP型ベース拡散領域、6は前記
P型ベース拡散領域6の中に形成されたエミッタ拡散領
域、7はコレクタに電極と接触をとるために設けられた
N型拡散領域、8はシリコン酸化膜、91,92.93
はそれぞれエミッタコレクタ、ベース電極である。In the figure, 1 is a P-type substrate, 2 is an N-type buried diffusion region diffused on the P-type substrate 1 to lower the collector resistance of the transistor, and 3 is the N-type buried diffusion region 2 formed thereon. After that, an N-type epitaxial layer is formed on the entire surface of the substrate by epitaxial growth technology and becomes the collector of the NPN transistor; 4 is a P-type isolation diffusion region introduced to separate each element; 5 is a P-type base diffusion region; 6 is an emitter diffusion region formed in the P-type base diffusion region 6; 7 is an N-type diffusion region provided in the collector to make contact with the electrode; 8 is a silicon oxide film; 91, 92, 93;
are the emitter collector and base electrodes, respectively.
ところで、前記P型分離領域4及びP型基板1は、集積
回路中の最低電位に接続され、領域2゜エピタキシャル
層3との間が逆方向にバイアスされるため、各素子は電
気的に分離されるのである。By the way, the P-type isolation region 4 and the P-type substrate 1 are connected to the lowest potential in the integrated circuit, and the regions 2 and the epitaxial layer 3 are biased in the opposite direction, so that each element is electrically isolated. It will be done.
集積回路では通常最低電位は外部より印加する電源の負
電極に、最高電位は正電極に接続され、各素子はこれら
の電位の間で動作する。In an integrated circuit, the lowest potential is usually connected to the negative electrode of an externally applied power supply, and the highest potential is connected to the positive electrode, and each element operates between these potentials.
集積回路では様々な回路構成が用いられるが、ある種の
回路構成では、しばしばNPN)ランジスタのコレクタ
電極92を直接電源に接続し、電気信号をエミッタ電極
91からとり出すことがある。しかし、この回路構成で
は、電源の正電極と負電極を誤まって接続すると、第1
図のP型基板1およびP型分離領域4には正電極が、領
域2゜エピタキシャル層3には負電極が接続されるため
、PN接合は順方向にバイアスされ過大電流が流れ、集
積回路や電源が破壊に至る危惧が存在した。Although a variety of circuit configurations are used in integrated circuits, some circuit configurations often connect the collector electrode 92 of the transistor (NPN) directly to a power source and extract the electrical signal from the emitter electrode 91. However, with this circuit configuration, if the positive and negative electrodes of the power supply are connected incorrectly, the first
Since a positive electrode is connected to the P-type substrate 1 and P-type isolation region 4 in the figure, and a negative electrode is connected to the region 2° epitaxial layer 3, the PN junction is forward biased and an excessive current flows, causing the integrated circuit and There were concerns that the power supply would be destroyed.
発明の目的
本発明は集積回路への印加電源端子の誤接続時における
集積回路及び電源の破壊という不都合を避ける保護手段
を有する半導体集積回路装置を提供するものである。OBJECTS OF THE INVENTION The present invention provides a semiconductor integrated circuit device having a protection means for avoiding the inconvenience of destruction of the integrated circuit and the power supply when the power supply terminal to the integrated circuit is incorrectly connected.
発明の構成
本発明は、PN接合分離により形成されたNPNトラン
ジスタのコレクタ領域に対して、エミッタ領域を電源側
に回路接続したPNP)ランジスタのベース領域および
コレクタ領域を接続してなる半導体集積回路装置である
。これによれば、電源が逆接続されたときにも、PNP
)ランジスタが逆バイアス方向の回路接続になり、過
大電流を阻止する作用をなす。Structure of the Invention The present invention provides a semiconductor integrated circuit device in which the base region and collector region of a PNP transistor whose emitter region is circuit-connected to the power supply side are connected to the collector region of an NPN transistor formed by PN junction separation. It is. According to this, even when the power supply is reversely connected, the PNP
) The transistor is connected to the circuit in the reverse bias direction, which acts to prevent excessive current.
実施例の説明
第2図は本発明の一実施例である半導体集積回路装置で
あシ、同図(八は平面図、同図中)は平面図Y−Y/断
面図、同図(qはその等価回路図である。DESCRIPTION OF EMBODIMENTS FIG. 2 shows a semiconductor integrated circuit device which is an embodiment of the present invention. is its equivalent circuit diagram.
同図において、1はP型基板、2,21はN型埋込拡散
領域、3,31はN型エピタキシャル層、4はP型分離
拡散領域、6,61.62はP型拡散領域で、61は6
2をとり囲む関係で形成されたP型拡散領域、7.了1
はN型拡散領域、8はシリコン酸化膜、91.92,9
3.94は配線であり、94は電源に接続される。即ち
、第2図(A) 、 (B)の右部の素子は第1図で例
示したNPN トランジスタであり、又左部の素子は半
導体集積回路でよく使用されるPNP );ランジスタ
である。In the figure, 1 is a P-type substrate, 2 and 21 are N-type buried diffusion regions, 3 and 31 are N-type epitaxial layers, 4 is a P-type isolation diffusion region, 6 and 61.62 are P-type diffusion regions, 61 is 6
7. a P-type diffusion region formed in a relationship surrounding 2; 1st
is an N-type diffusion region, 8 is a silicon oxide film, 91.92, 9
3.94 is a wiring, and 94 is connected to a power supply. That is, the elements on the right in FIGS. 2A and 2B are the NPN transistors illustrated in FIG. 1, and the elements on the left are PNP transistors often used in semiconductor integrated circuits.
NPN)ランジスタのコレクタは配線92によりN型領
域71及びP型頭域61に接続され、P型領域52は配
線94によシミ源12に接続される。The collector of the (NPN) transistor is connected to the N-type region 71 and the P-type head region 61 by a wiring 92, and the P-type region 52 is connected to the stain source 12 by a wiring 94.
本実施例の前記半導体装置において、誤まって電源の正
電極を基板1側に、負電極を配線94に接続した場合、
P型領域52とN型エピタキシャル層31が形成するP
N接合が逆方向にノくイアスされる。このPN接合の耐
圧は使用電源電圧よシも高くなるように設計されている
。この理由は、領域52とエピタキシャル層31はそれ
ぞれNPNトランジスタの領域6及びエピタキシャル層
3、即ちベース及びコレクタと同時に形成されるが、ベ
ース、コレクタ間の耐圧が電源電圧よりも低いと正常な
電源接続時にN’ P N )ランジスタが耐圧不足と
なり安定な回路動作が期待できないからである。In the semiconductor device of this embodiment, if the positive electrode of the power source is mistakenly connected to the substrate 1 side and the negative electrode is connected to the wiring 94,
The P type region 52 and the N type epitaxial layer 31 form
The N junction is biased in the opposite direction. The breakdown voltage of this PN junction is designed to be higher than the power supply voltage used. The reason for this is that although the region 52 and the epitaxial layer 31 are formed at the same time as the region 6 and the epitaxial layer 3 of the NPN transistor, that is, the base and collector, normal power supply connection is possible if the withstand voltage between the base and collector is lower than the power supply voltage. This is because sometimes the N'P N ) transistor has insufficient withstand voltage, and stable circuit operation cannot be expected.
かくして領域62とエピタキシャル層31のなすPN接
合は、印加電圧を支持し、誤接続時に過大電流が流れ、
集積回路及び電源が破壊されるという不都合が防止でき
るのである。Thus, the PN junction formed between the region 62 and the epitaxial layer 31 supports the applied voltage, and in the event of a misconnection, an excessive current flows.
This prevents the inconvenience of destroying the integrated circuit and power supply.
なおこの関係を等価回路図で示すと、第2図(qのごと
くになシ、NPN )ランジスタ10と電源12の間に
PNP トランジスタ11とダイオード接続して挿入し
ても、NPNトランジスタ10の電気的特性には何ら悪
影響を及ぼすことなく、又ベース電位は高々電源電圧ま
であるから、エミッタの動作電圧範囲が狭くなることは
ない。This relationship is shown in an equivalent circuit diagram as shown in Fig. 2 (NPN as in q). Since the base potential is at most the power supply voltage, the operating voltage range of the emitter will not be narrowed.
発明の効果
以上述べたごとく、本発明は回路動作に何ら悪影響を及
ぼすことなく電源端子の誤接続時に集積回路及び電源を
過大電流による破壊から守ることが可能であり、簡便に
してかつ実用的な効果を有する半導体集積回路装置を提
供するものである。Effects of the Invention As described above, the present invention is capable of protecting integrated circuits and power supplies from destruction due to excessive current when power terminals are incorrectly connected without any adverse effect on circuit operation, and is simple and practical. The present invention provides a semiconductor integrated circuit device having effects.
第1図はPN接合分離によるバイポーラ型半導体集積回
路の構造図で、同図(へは平面図、同図(B)はそのx
−x’断面図、第2図は本発明の実施例を示す図で、同
図(5)は平面図、同図(B)はそのY−Y′断面図、
同図(qはその等価回路図である。
1・・・・・・P型基板、2,21・・・・・・N型埋
込拡散領域、3,31・・・・・・N型エピタキシャル
層、4・・・・・・P型分離拡散領域、5,51.52
・・・・・・P型拡散領域、6 、7 、71・・・・
・・N型拡散領域、8・・・・・・シリコン酸化膜、9
1.92,93.94・・・・・・配線、12・・・・
・・電源。Figure 1 is a structural diagram of a bipolar semiconductor integrated circuit using PN junction isolation.
-x' sectional view, Figure 2 is a diagram showing an embodiment of the present invention, figure (5) is a plan view, figure (B) is its Y-Y' sectional view,
The same figure (q is its equivalent circuit diagram. 1... P type substrate, 2, 21... N type buried diffusion region, 3, 31... N type Epitaxial layer, 4...P type isolation diffusion region, 5, 51.52
...P-type diffusion region, 6, 7, 71...
...N-type diffusion region, 8...Silicon oxide film, 9
1.92,93.94...Wiring, 12...
··power supply.
Claims (1)
PNP )ランジスタを有し、前記PNPトランジスタ
のエミッタを電源に接続し、前記PNPトランジスタの
ベース及びコレクタの共通傍続。 点を前記NPN トランジスタのでレクタに接続したこ
とを特徴とする半導体集積回路装置。Claims: An NPN) transistor and a PNP) transistor formed by PN junction isolation, the emitter of the PNP transistor being connected to a power supply, and the base and collector of the PNP transistor being connected in common. 1. A semiconductor integrated circuit device, characterized in that a point is connected to a resistor of the NPN transistor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57175073A JPS5965464A (en) | 1982-10-05 | 1982-10-05 | Semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57175073A JPS5965464A (en) | 1982-10-05 | 1982-10-05 | Semiconductor integrated circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5965464A true JPS5965464A (en) | 1984-04-13 |
Family
ID=15989754
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57175073A Pending JPS5965464A (en) | 1982-10-05 | 1982-10-05 | Semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5965464A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54158885A (en) * | 1978-06-06 | 1979-12-15 | Nec Corp | Semiconductor integrated circuit |
-
1982
- 1982-10-05 JP JP57175073A patent/JPS5965464A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54158885A (en) * | 1978-06-06 | 1979-12-15 | Nec Corp | Semiconductor integrated circuit |
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