JPS5961704A - 寸法測定装置 - Google Patents

寸法測定装置

Info

Publication number
JPS5961704A
JPS5961704A JP57172738A JP17273882A JPS5961704A JP S5961704 A JPS5961704 A JP S5961704A JP 57172738 A JP57172738 A JP 57172738A JP 17273882 A JP17273882 A JP 17273882A JP S5961704 A JPS5961704 A JP S5961704A
Authority
JP
Japan
Prior art keywords
light
measured
image
dimension measuring
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57172738A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6352325B2 (enrdf_load_stackoverflow
Inventor
Kihachiro Nishikawa
西川　喜八郎
Hiroshi Machida
浩 町田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57172738A priority Critical patent/JPS5961704A/ja
Publication of JPS5961704A publication Critical patent/JPS5961704A/ja
Publication of JPS6352325B2 publication Critical patent/JPS6352325B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP57172738A 1982-09-30 1982-09-30 寸法測定装置 Granted JPS5961704A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57172738A JPS5961704A (ja) 1982-09-30 1982-09-30 寸法測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57172738A JPS5961704A (ja) 1982-09-30 1982-09-30 寸法測定装置

Publications (2)

Publication Number Publication Date
JPS5961704A true JPS5961704A (ja) 1984-04-09
JPS6352325B2 JPS6352325B2 (enrdf_load_stackoverflow) 1988-10-18

Family

ID=15947396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57172738A Granted JPS5961704A (ja) 1982-09-30 1982-09-30 寸法測定装置

Country Status (1)

Country Link
JP (1) JPS5961704A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6700671B2 (en) 2000-10-10 2004-03-02 Keyence Corporation Non-contact type profile measuring apparatus
JP2017518501A (ja) * 2014-06-04 2017-07-06 コーニング インコーポレイテッド ガラス物品の厚さを測定する方法およびシステム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5491262A (en) * 1977-12-28 1979-07-19 Toshiba Corp Dimension measuring apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5491262A (en) * 1977-12-28 1979-07-19 Toshiba Corp Dimension measuring apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6700671B2 (en) 2000-10-10 2004-03-02 Keyence Corporation Non-contact type profile measuring apparatus
JP2017518501A (ja) * 2014-06-04 2017-07-06 コーニング インコーポレイテッド ガラス物品の厚さを測定する方法およびシステム

Also Published As

Publication number Publication date
JPS6352325B2 (enrdf_load_stackoverflow) 1988-10-18

Similar Documents

Publication Publication Date Title
WO1998028661A3 (en) Optical height meter, surface-inspection device provided with such a height meter, and lithographic apparatus provided with the inspection device
JPS5961704A (ja) 寸法測定装置
JPS58216903A (ja) 厚さ測定装置
CN114324365B (zh) 一种曲面检测装置
JP2873450B2 (ja) 光による欠点検査装置
EP0509847A2 (en) Measuring the cross-sectional distribution of the refractive index of optical waveguides
JPS58204356A (ja) 金属物体表面探傷方法
JPH01143904A (ja) 薄膜検査装置
JPS62188949A (ja) 表面状態測定装置
JP2565274B2 (ja) 高さ測定装置
JPS60222756A (ja) 異物検査装置
JPS60144606A (ja) 位置測定装置
JPS61143760A (ja) 縮小投影露光装置
US6483936B1 (en) Monitor pattern for photolithography
JPH0545297A (ja) 面板異物検査装置
EP0509848A2 (en) Measuring the cross-sectional distribution of the refractive index of an optical waveguide
JP3454905B2 (ja) 測定器の位置決め装置
JPS62274248A (ja) 表面状態測定装置
JPH04145311A (ja) 高さ測定装置
JP2001108406A (ja) 板状体の端面位置測定装置
JPS5999216A (ja) 物体の表面高さ測定装置
JPS6315812Y2 (enrdf_load_stackoverflow)
JPS54136888A (en) Surface defect detecting device
JPS58142242A (ja) マイクロレンズの焦点距離測定方法
JPS603541A (ja) 透光管材欠陥精密検査方法