JPS5957446A - 静電吸着式基板保持装置 - Google Patents

静電吸着式基板保持装置

Info

Publication number
JPS5957446A
JPS5957446A JP57167659A JP16765982A JPS5957446A JP S5957446 A JPS5957446 A JP S5957446A JP 57167659 A JP57167659 A JP 57167659A JP 16765982 A JP16765982 A JP 16765982A JP S5957446 A JPS5957446 A JP S5957446A
Authority
JP
Japan
Prior art keywords
substrate
dielectric film
film
baked
electrode patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57167659A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6219060B2 (enExample
Inventor
Fumio Muramatsu
村松　文雄
Ryoji Tsunoda
角田　良二
Genichi Kanazawa
金沢　元一
Makoto Ozawa
誠 小沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Kokusai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Co Ltd filed Critical Kokusai Electric Co Ltd
Priority to JP57167659A priority Critical patent/JPS5957446A/ja
Publication of JPS5957446A publication Critical patent/JPS5957446A/ja
Publication of JPS6219060B2 publication Critical patent/JPS6219060B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/50—
    • H10P72/72—

Landscapes

  • Jigs For Machine Tools (AREA)
JP57167659A 1982-09-28 1982-09-28 静電吸着式基板保持装置 Granted JPS5957446A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57167659A JPS5957446A (ja) 1982-09-28 1982-09-28 静電吸着式基板保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57167659A JPS5957446A (ja) 1982-09-28 1982-09-28 静電吸着式基板保持装置

Publications (2)

Publication Number Publication Date
JPS5957446A true JPS5957446A (ja) 1984-04-03
JPS6219060B2 JPS6219060B2 (enExample) 1987-04-25

Family

ID=15853850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57167659A Granted JPS5957446A (ja) 1982-09-28 1982-09-28 静電吸着式基板保持装置

Country Status (1)

Country Link
JP (1) JPS5957446A (enExample)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6156842A (ja) * 1984-08-27 1986-03-22 Kokusai Electric Co Ltd 静電吸着板
JPS62157752A (ja) * 1985-12-29 1987-07-13 Kyocera Corp 静電チヤツク
JPS62264638A (ja) * 1987-04-21 1987-11-17 Toto Ltd 静電チヤツク基盤の製造方法
JPS62286248A (ja) * 1986-06-05 1987-12-12 Toto Ltd 静電チヤツク板及びその製造方法
JPS62286247A (ja) * 1986-06-05 1987-12-12 Toto Ltd 静電チヤツク板及びその製造方法
JPH0531239U (ja) * 1991-10-02 1993-04-23 住友金属工業株式会社 静電チヤツク
US5384681A (en) * 1993-03-01 1995-01-24 Toto Ltd. Electrostatic chuck
KR100420456B1 (ko) * 2000-01-20 2004-03-02 스미토모덴키고교가부시키가이샤 반도체 제조 장치용 웨이퍼 지지체와 그 제조 방법 및반도체 제조 장치
CN106910703A (zh) * 2017-03-10 2017-06-30 京东方科技集团股份有限公司 载台及其制备方法、加工装置及其操作方法
WO2024232306A1 (ja) * 2023-05-11 2024-11-14 国立大学法人 東京大学 測定装置、測定方法及び校正方法

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6156842A (ja) * 1984-08-27 1986-03-22 Kokusai Electric Co Ltd 静電吸着板
JPS62157752A (ja) * 1985-12-29 1987-07-13 Kyocera Corp 静電チヤツク
JPS62286248A (ja) * 1986-06-05 1987-12-12 Toto Ltd 静電チヤツク板及びその製造方法
JPS62286247A (ja) * 1986-06-05 1987-12-12 Toto Ltd 静電チヤツク板及びその製造方法
JPS62264638A (ja) * 1987-04-21 1987-11-17 Toto Ltd 静電チヤツク基盤の製造方法
JPH0531239U (ja) * 1991-10-02 1993-04-23 住友金属工業株式会社 静電チヤツク
US5384681A (en) * 1993-03-01 1995-01-24 Toto Ltd. Electrostatic chuck
KR100420456B1 (ko) * 2000-01-20 2004-03-02 스미토모덴키고교가부시키가이샤 반도체 제조 장치용 웨이퍼 지지체와 그 제조 방법 및반도체 제조 장치
CN106910703A (zh) * 2017-03-10 2017-06-30 京东方科技集团股份有限公司 载台及其制备方法、加工装置及其操作方法
WO2024232306A1 (ja) * 2023-05-11 2024-11-14 国立大学法人 東京大学 測定装置、測定方法及び校正方法

Also Published As

Publication number Publication date
JPS6219060B2 (enExample) 1987-04-25

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