JPS595725A - 酸化亜鉛薄膜の電極構造 - Google Patents
酸化亜鉛薄膜の電極構造Info
- Publication number
- JPS595725A JPS595725A JP57114450A JP11445082A JPS595725A JP S595725 A JPS595725 A JP S595725A JP 57114450 A JP57114450 A JP 57114450A JP 11445082 A JP11445082 A JP 11445082A JP S595725 A JPS595725 A JP S595725A
- Authority
- JP
- Japan
- Prior art keywords
- zinc oxide
- oxide film
- thin film
- electrode structure
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 title claims abstract description 94
- 239000011787 zinc oxide Substances 0.000 title claims abstract description 47
- 239000010409 thin film Substances 0.000 title claims description 31
- 238000000034 method Methods 0.000 abstract description 9
- 238000010894 electron beam technology Methods 0.000 abstract description 5
- 238000009792 diffusion process Methods 0.000 abstract description 4
- 238000004544 sputter deposition Methods 0.000 abstract description 4
- 238000010897 surface acoustic wave method Methods 0.000 abstract description 2
- 229910000942 Elinvar Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 230000010355 oscillation Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Die Bonding (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57114450A JPS595725A (ja) | 1982-06-30 | 1982-06-30 | 酸化亜鉛薄膜の電極構造 |
| US06/509,028 US4445066A (en) | 1982-06-30 | 1983-06-29 | Electrode structure for a zinc oxide thin film transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57114450A JPS595725A (ja) | 1982-06-30 | 1982-06-30 | 酸化亜鉛薄膜の電極構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS595725A true JPS595725A (ja) | 1984-01-12 |
| JPH0115210B2 JPH0115210B2 (enrdf_load_stackoverflow) | 1989-03-16 |
Family
ID=14638031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57114450A Granted JPS595725A (ja) | 1982-06-30 | 1982-06-30 | 酸化亜鉛薄膜の電極構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS595725A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7770275B2 (en) * | 2007-09-03 | 2010-08-10 | Nihon Dempa Kogyo Co., Ltd. | Methods for manufacturing tuning-fork type piezoelectric vibrating devices |
-
1982
- 1982-06-30 JP JP57114450A patent/JPS595725A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7770275B2 (en) * | 2007-09-03 | 2010-08-10 | Nihon Dempa Kogyo Co., Ltd. | Methods for manufacturing tuning-fork type piezoelectric vibrating devices |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0115210B2 (enrdf_load_stackoverflow) | 1989-03-16 |
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