JPS595694A - 除塵洗浄装置 - Google Patents

除塵洗浄装置

Info

Publication number
JPS595694A
JPS595694A JP11487082A JP11487082A JPS595694A JP S595694 A JPS595694 A JP S595694A JP 11487082 A JP11487082 A JP 11487082A JP 11487082 A JP11487082 A JP 11487082A JP S595694 A JPS595694 A JP S595694A
Authority
JP
Japan
Prior art keywords
dust removal
removal chamber
conveyor
objects
air supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11487082A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0122756B2 (enExample
Inventor
納　泰二
澤　寿一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hosokawa Micron Corp
Original Assignee
Hosokawa Micron Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hosokawa Micron Corp filed Critical Hosokawa Micron Corp
Priority to JP11487082A priority Critical patent/JPS595694A/ja
Publication of JPS595694A publication Critical patent/JPS595694A/ja
Publication of JPH0122756B2 publication Critical patent/JPH0122756B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP11487082A 1982-07-01 1982-07-01 除塵洗浄装置 Granted JPS595694A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11487082A JPS595694A (ja) 1982-07-01 1982-07-01 除塵洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11487082A JPS595694A (ja) 1982-07-01 1982-07-01 除塵洗浄装置

Publications (2)

Publication Number Publication Date
JPS595694A true JPS595694A (ja) 1984-01-12
JPH0122756B2 JPH0122756B2 (enExample) 1989-04-27

Family

ID=14648744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11487082A Granted JPS595694A (ja) 1982-07-01 1982-07-01 除塵洗浄装置

Country Status (1)

Country Link
JP (1) JPS595694A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6174688A (ja) * 1984-09-19 1986-04-16 ホソカワミクロン株式会社 除塵洗浄装置
CN101829660A (zh) * 2009-03-09 2010-09-15 株式会社长冈制作所 基板输送装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6174688A (ja) * 1984-09-19 1986-04-16 ホソカワミクロン株式会社 除塵洗浄装置
CN101829660A (zh) * 2009-03-09 2010-09-15 株式会社长冈制作所 基板输送装置

Also Published As

Publication number Publication date
JPH0122756B2 (enExample) 1989-04-27

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